US5365371A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Projection exposure apparatus
Assignee: Renesas Electronics Corp
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Filing: 1993-02-05
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Granted: 1994-11-15
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Expires: 2013-02-05
Abstract
Abstract A projection exposure apparatus includes a light source, a condenser lens for condensing an illumination light emanating from the light source onto a mask including a circuit pattern, a projection lens for condensing onto a surface of a wafer the illumination light that has passed through the mask, and a polarizer disposed on a surface of a pupil of the projection lens for converting the illumination light converged onto the surface of the wafer into polarized light having radial planes of polarization intersecting the optical axis of the projection lens.
Inventors
- 👤 Kazuya Kamon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:05
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70566; G02; G02B; G02B13/00; G02B13/24; G02B27/00; G02B27/28; G02B27/283; G02B5/00; G02B5/30; G02B5/3025
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
114 words
A projection exposure apparatus comprising: a light source for producing source light; a condenser lens for condensing the source light from said light source onto a mask including a circuit pattern; a projection lens having an optical axis and a pupil including a surface, said projection lens condensing the source light that has passed through the mask onto a surface of a wafer as illumination light; and a polarizer disposed on the surface of the pupil of said projection lens, Said polarizer at least principally transmitting as the illumination light that is converged onto the surface of the wafer polarized light having radial planes of polarization intersecting the optical axis of said projection lens.
Claim 2
Dependent Claim
114 words
A projection exposure apparatus comprising: a light source for producing source light; a condenser lens for condensing the source light from said light source onto a mask including a circuit pattern; a projection lens having an optical axis and a pupil including a surface, said projection lens condensing the source light that has passed through the mask onto a surface of a wafer as illumination light; and a polarizer disposed on the surface of the pupil of said projection lens, Said polarizer at least principally transmitting as the illumination light that is converged onto the surface of the wafer polarized light having radial planes of polarization intersecting the optical axis of said projection lens.
Claim 3
Dependent Claim
24 words
The projection exposure apparatus according to claim 1 wherein said polarizer is disposed detachably on the surface of the pupil of said projection lens.
Claim 4
Dependent Claim
95 words
The projection exposure apparatus of claim 1 wherein said polarizer comprises: a first conical lens having a concave form, a first axis, and a first index of refraction; and a second conical lens having a convex form, a second axis, and a second index of fraction different from the first index of refraction, said second conical lens being fitted into the concave form of said first conical lens so that the first and second axes of said first and second conical lenses are coincident with each other and the optical axis of said projection lens.
Claim 5
Dependent Claim
64 words
The projection exposure apparatus of claim 1 wherein said polarizer comprises: a plurality of linearly polarizing filters, each filter having a segmental shape with a predetermined central angle, said linearly polarizing filters being disposed radially about a common center intersecting the optical axis of said projection lens and forming a circle lying in a plane perpendicular to the optical axis of said projection lens.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-14 | 1998-05-16 | 1998-11-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-14 | 2002-05-16 | 2002-11-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-14 | 2006-05-16 | 2006-11-15 | $7700.00 | Window Closed / Lapsed |