US5358908A
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Method of creating sharp points and other features on the surface of a semiconductor substrate
Assignee: Micron Technology Inc
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Filing: 1992-02-14
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Granted: 1994-10-25
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Expires: 2012-02-14
Abstract
Abstract A method of producing sharp points on the surface of a substrate is described. The points are useful as field emitter tips, and may also be used to collect radiant energy and for the production of micromachined objects such as micron sized gears and levers. Conventional techniques of asperity fabrication typically use an undercut of a hard mask to etch away the substrate material. This conventional method is very time specific and difficult to control. The inventive process uses a more easily controlled etch than conventional asperity fabrication techniques. The inventive process begins with a substrate highly doped with a P-type dopant such as boron which prevents an etch with KOH or other material. A hard mask is patterned over the substrate surface, and an N-type dopant, such as phosphorous or arsenic, is implanted into the substrate surface. The N-type dopant diffuses under the hard mask at a rate more easily controlled than the etch used in conventional techniques. The N-type dopant counterdopes the boron implanted substrate, thereby making the substrate etchable. The mask is removed and the substrate is etched, thereby removing the counterdoped areas and leaving the P-doped areas, which includes the asperity.
Inventors
- 👤 Alan R. Reinberg
- 👤 Howard E. Rhodes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 02:55
CPC Classifications
H; H01; H01H; H01H1/00; H01H1/0036; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025; H10; H10F; H10F77/00; H10F77/70; H10F77/703; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10S; Y10S438/00; Y10S438/914; Y10S438/924
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
174 words
A method of etching an amount of material from a substrate, comprising the steps of: a) doping a surface of the substrate with a first-type dopant; b) forming a doping barrier on said surface of the substrate, said barrier having vias through which doping material can pass into said substrate; c) counterdoping first regions of the substrate with a second type dopant and leaving second regions of the substrate uncounterdoped; d) diffusing said second type dopant to form a three dimensional variation in first type and second type active doping concentrations of the substrate; e) etching the substrate using said first type active doping concentration as an etch stop, said etch removing said first regions of the substrate which are counterdoped above a first active doping concentration and leaving said uncounterdoped second regions and portions of said first regions of the substrate which are counterdoped below said first active doping concentration intact to form a feature from said uncounterdoped regions and from said first regions which are counterdoped below said first active doping concentration.
Claim 2
Independent Claim
174 words
A method of etching an amount of material from a substrate, comprising the steps of: a) doping a surface of the substrate with a first-type dopant; b) forming a doping barrier on said surface of the substrate, said barrier having vias through which doping material can pass into said substrate; c) counterdoping first regions of the substrate with a second type dopant and leaving second regions of the substrate uncounterdoped; d) diffusing said second type dopant to form a three dimensional variation in first type and second type active doping concentrations of the substrate; e) etching the substrate using said first type active doping concentration as an etch stop, said etch removing said first regions of the substrate which are counterdoped above a first active doping concentration and leaving said uncounterdoped second regions and portions of said first regions of the substrate which are counterdoped below said first active doping concentration intact to form a feature from said uncounterdoped regions and from said first regions which are counterdoped below said first active doping concentration.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein said first type dopant is a P-type dopant and said second type dopant is an N-type dopant.
Claim 4
Dependent Claim
28 words
The method of claim 1 wherein said doping step dopes said substrate with a material comprising boron to a concentration greater than about 10 20 boron/cm 3 .
Claim 5
Dependent Claim
22 words
The method of claim 1 wherein said barrier is formed by photomasking a pattern of dopant resistive material over said substrate surface.
Claim 6
Dependent Claim
76 words
The method of claim 1 wherein said barrier forming step comprises the steps of: a) forming a blanket layer of mask material over said substrate; b) patterning a layer of photoresist over said mask material, said photoresist covering part of said mask material and leaving other parts of said mask material exposed; c) etching said exposed parts of said mask material, said etching undercutting said photoresist and forming a peak of mask material under said photoresist.
Claim 7
Dependent Claim
36 words
The method of claim 1 wherein said diffusing step forms a peak of material counterdoped below said first active doping concentration whereby said etching step results in a sharp point which protrudes from said substrate surface.
Claim 8
Dependent Claim
77 words
The method of claim 1 wherein said first type dopant is boron, and said first type active doping concentration of said uncounterdoped region is greater than about 10 20 boron/cm 3 , said first type active doping concentration of said second counterdoped region is less than about 10 14 boron/cm 3 , and said first type active doping concentration of said first counterdoped region is between about 10 14 boron/cm 3 and 10 20 boron/cm 3 .
Claim 9
Dependent Claim
17 words
The method of claim 1, further comprising the step of removing said barrier prior to step e).
Claim 10
Independent Claim
176 words
A method of etching an amount of material from a substrate, comprising the steps of: a) doping a surface of the substrate with a P-type dopant; b) forming a doping barrier on said surface of the substrate, said barrier having vias through which a dopant can pass into said substrate; c) counterdoping first regions of the substrate with an N-type dopant and leaving second regions of the substrate uncounterdoped; d) diffusing said N-type dopant to form a three dimensional variation in active N-type and P-type doping concentration in the substrate; e) etching the substrate using said active P-type doping concentration as an etch stop, said etch removing regions of the substrate which are doped with said N-type dopant above a first active doping concentration and leaving said uncounterdoped second regions and portions of said first regions which are doped with said N-type dopant below said first active doping concentration intact to form a feature from said uncounterdoped regions and from said first regions which are doped with said N-type dopant below said first active doping concentration.
Claim 11
Independent Claim
176 words
A method of etching an amount of material from a substrate, comprising the steps of: a) doping a surface of the substrate with a P-type dopant; b) forming a doping barrier on said surface of the substrate, said barrier having vias through which a dopant can pass into said substrate; c) counterdoping first regions of the substrate with an N-type dopant and leaving second regions of the substrate uncounterdoped; d) diffusing said N-type dopant to form a three dimensional variation in active N-type and P-type doping concentration in the substrate; e) etching the substrate using said active P-type doping concentration as an etch stop, said etch removing regions of the substrate which are doped with said N-type dopant above a first active doping concentration and leaving said uncounterdoped second regions and portions of said first regions which are doped with said N-type dopant below said first active doping concentration intact to form a feature from said uncounterdoped regions and from said first regions which are doped with said N-type dopant below said first active doping concentration.
Claim 12
Dependent Claim
28 words
The method of claim 9 wherein said doping step dopes said substrate with a dopant comprising boron to a concentration greater than about 10 20 boron/cm 3 .
Claim 13
Dependent Claim
22 words
The method of claim 9 wherein said barrier is formed by photomasking a pattern of dopant resistive material over said substrate surface.
Claim 14
Dependent Claim
76 words
The method of claim 9 wherein said barrier forming step comprises the steps of: a) forming a blanket layer of mask material over said substrate; b) patterning a layer of photoresist over said mask material, said photoresist covering part of said mask material and leaving other parts of said mask material exposed; c) etching said exposed parts of said mask material, said etching undercutting said photoresist and forming a peak of mask material under said photoresist.
Claim 15
Dependent Claim
36 words
The method of claim 9 wherein said diffusing step forms a peak of material doped below said first active N-type concentration whereby said etching step results in a sharp point which protrudes from said substrate surface.
Claim 16
Dependent Claim
18 words
The method of claim 9, further comprising the step of removing said doping barrier prior to step e).
Claim 17
Independent Claim
154 words
A method of producing a substantially pointed feature from a substrate material, comprising the steps of: a) doping the substrate with a P-type material; b) forming a barrier on a surface of the substrate, said barrier having vias through which doping material can pass into said substrate; c) counterdoping P-type first regions of the substrates with an N-type doping material and leaving second regions of said P-type substrate uncounterdoped; d) diffusing said N-type doping material to form a substantially pointed uncounterdoped region, a first counterdoped region which is counterdoped more heavily than said uncounterdoped region, and a second counterdoped region which is counterdoped more heavily than said first counterdoped region; e) etching the substrate using said first counterdoped region as an etch stop and etching said second counterdoped region of the substrate, thereby leaving said substantially pointed uncounterdoped region and a portion of said first counterdoped region to form the substantially pointed feature thereby.
Claim 18
Independent Claim
154 words
A method of producing a substantially pointed feature from a substrate material, comprising the steps of: a) doping the substrate with a P-type material; b) forming a barrier on a surface of the substrate, said barrier having vias through which doping material can pass into said substrate; c) counterdoping P-type first regions of the substrates with an N-type doping material and leaving second regions of said P-type substrate uncounterdoped; d) diffusing said N-type doping material to form a substantially pointed uncounterdoped region, a first counterdoped region which is counterdoped more heavily than said uncounterdoped region, and a second counterdoped region which is counterdoped more heavily than said first counterdoped region; e) etching the substrate using said first counterdoped region as an etch stop and etching said second counterdoped region of the substrate, thereby leaving said substantially pointed uncounterdoped region and a portion of said first counterdoped region to form the substantially pointed feature thereby.
Claim 19
Dependent Claim
28 words
The method of claim 15 wherein said doping step dopes said substrate with a material comprising boron to a concentration greater than about 10 20 boron/cm 3 .
Claim 20
Dependent Claim
63 words
The method of claim 16 wherein said uncounterdoped region has a high P-type conductivity and is not easily etched by an etchant, said second counterdoped region has a low P-type conductivity and is easily etched by said etchant, and said first counterdoped region has a P-type conductivity between said uncounterdoped region and said second counterdoped region and is marginally etched by said etchant.
Claim 21
Dependent Claim
64 words
The method of claim 17 wherein an active boron concentration of said uncounterdoped region is greater than about 10 20 boron/cm 3 , an active boron concentration of said second counterdoped region is less than about 10 14 boron/cm 3 , and an active boron concentration of said first counterdoped region is between about 10 14 boron/cm 3 and 10 20 boron/cm 3 .
Claim 22
Dependent Claim
22 words
The method of claim 15 wherein said barrier is formed by photomasking a pattern of dopant resistive material over said substrate surface.
Claim 23
Dependent Claim
82 words
The method of claim 15 wherein said barrier forming step comprises the steps of: a) forming a blanket layer of mask material over said substrate; b) patterning a layer of photoresist over said mask material, said photoresist covering a portion of said mask material and leaving other portions of said mask material exposed; c) etching said exposed portions of said mask material with an etching material, said etching material undercutting said photoresist and forming a peak of mask material under said photoresist.
Claim 24
Dependent Claim
17 words
The method of claim 15, further comprising the step of removing said barrier prior to step e).
Claim 25
Dependent Claim
10 words
The method of claim 17 wherein said etchant comprises KOH.
References Cited (Backward Citations)
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