US5357536A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for the positioning of laser diodes
Assignee: Xerox Corp
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Filing: 1993-05-07
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Granted: 1994-10-18
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Expires: 2013-05-07
Abstract
Abstract The present invention encompasses both a method and an apparatus for fabricating a multiple beam semiconductor laser array, wherein the laser includes a plurality of semiconductor laser dies affixed in a linear fashion to a supporting heatsink. Accurate alignment of the lasers and control of interlaser spacing is achieved through the use of alignment structures formed on the mounting surface of the heatsink. Once assembled, the alignment structures remain in an abutting relationship with the ridge waveguides present on each of the semiconductor lasers. The method not only enables the accurate placement of the laser diodes relative to one another so as to reduce interlaser spacing error, but also eliminates the need for multiple-step alignment operations to produce the multiple diode laser array.
Inventors
- 👤 John R. Andrews
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:16
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/02; H01S5/022; H01S5/0233; H01S5/0234; H01S5/40; H01S5/4025; H01S5/4031; H01S5/023; H01S5/02325; H01S5/02326; H01S5/20; H01S5/22
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
102 words
A multiple diode laser array comprising: a heatsink having a generally planar surface; a plurality of laser diodes, each of said plurality of laser diodes including a wafer having a series of epitaxially grown layers deposited upon a surface thereof to form an emitter, and a ridge-shaped waveguide defining the position of the emitter; and alignment means, disposed at preset intervals along the planar surface of said heatsink and adapted to associate with the waveguides of said plurality of laser diodes, for controlling the spacing of said laser diodes with respect to one another to assure accurate spacing of the emitters therein.
Claim 2
Dependent Claim
102 words
A multiple diode laser array comprising: a heatsink having a generally planar surface; a plurality of laser diodes, each of said plurality of laser diodes including a wafer having a series of epitaxially grown layers deposited upon a surface thereof to form an emitter, and a ridge-shaped waveguide defining the position of the emitter; and alignment means, disposed at preset intervals along the planar surface of said heatsink and adapted to associate with the waveguides of said plurality of laser diodes, for controlling the spacing of said laser diodes with respect to one another to assure accurate spacing of the emitters therein.
Claim 3
Dependent Claim
51 words
The multiple diode laser array of claim 1, wherein said alignment means comprise a plurality of spaced members protruding from the planar surface of said heatsink so as to form substantially parallel recesses therebetween, each of said recesses being adapted to receive one of the ridge-shaped waveguides of said laser diodes.
Claim 4
Dependent Claim
26 words
The multiple diode laser array of claim 2, wherein each of said plurality of members comprises a polyimide layer deposited on the surface of said heatsink.
Claim 5
Dependent Claim
27 words
The multiple diode laser array of claim 2, wherein each of said plurality of members comprises an organic thin film deposited on the surface of said heatsink.
Claim 6
Dependent Claim
26 words
The multiple diode laser array of claim 2, wherein each of said plurality of members comprises a metallic layer deposited on the surface of said heatsink.
Claim 7
Dependent Claim
30 words
The multiple diode laser array of claim 2, wherein each of said plurality of members comprises a layer of high thermal conductivity material deposited on the surface of said heatsink.
Claim 8
Dependent Claim
27 words
The multiple diode laser array of claim 6, wherein said layer of high thermal conductivity material is selected from the group consisting of: gold; silicon; and diamond.
Claim 9
Dependent Claim
28 words
The multiple diode laser array of claim 1, wherein said ridge-shaped waveguide comprises a narrow cladding layer formed over a portion of the surface of said epitaxial layers.
Claim 10
Dependent Claim
40 words
The multiple diode laser array of claim 8, wherein said cladding layer ranges from about 1 μm to less than 5 μm in width, said cladding layer having a thickness ranging from about 0.2 μm to less than 0.5 μm.
Claim 11
Dependent Claim
27 words
The multiple diode laser array of claim 1, further comprising a layer of solder interposed between at least a portion of said heatsink and said laser diodes.
Claim 12
Dependent Claim
58 words
The multiple diode laser array of claim 1, wherein: said plurality of laser diodes includes a first laser diode and a second laser diode; and said first laser diode emits a radiant energy beam having a first wavelength and said second laser diode emits a radiant energy beam having a second wavelength which differs from said first wavelength.
Claim 13
Dependent Claim
58 words
The multiple diode laser array of claim 1, wherein: said plurality of laser diodes includes a first laser diode and a second laser diode; and said first laser diode emits a radiant energy beam having a first polarity and said second laser diode emits a radiant energy beam having a second polarity which differs from said first polarity.
Claim 14
Dependent Claim
125 words
A plurality of single diode lasers with each including a ridge-shaped wafer portion having a series of epitaxially layers forming a p-n junction emitter, and a waveguide present on the surface of the wafer to define the position of the emitter, said diode lasers being assembled adjacent one another to provide a multiple diode laser array, comprising: a heatsink including a generally planar surface; alignment means, disposed along the planar surface of said heatsink, for controlling the location of said diode lasers, said alignment means being adapted to remain in an abutting relationship with the waveguides of the diode lasers so as to maintain a predetermined spacing between the emitters of adjacent diode lasers; and means for permanently affixing the diode lasers to the heatsink.
Claim 15
Dependent Claim
125 words
A plurality of single diode lasers with each including a ridge-shaped wafer portion having a series of epitaxially layers forming a p-n junction emitter, and a waveguide present on the surface of the wafer to define the position of the emitter, said diode lasers being assembled adjacent one another to provide a multiple diode laser array, comprising: a heatsink including a generally planar surface; alignment means, disposed along the planar surface of said heatsink, for controlling the location of said diode lasers, said alignment means being adapted to remain in an abutting relationship with the waveguides of the diode lasers so as to maintain a predetermined spacing between the emitters of adjacent diode lasers; and means for permanently affixing the diode lasers to the heatsink.
Claim 16
Dependent Claim
57 words
The multiple diode laser array of claim 13, wherein said alignment means comprise a plurality of members protruding from the planar surface of said heatsink to form substantially parallel recesses therebetween with the recesses being adapted to receive the ridge-shaped waveguides of said diode lasers so as to maintain the predetermined emitter spacing between adjacent diode lasers.
Claim 17
Dependent Claim
26 words
The multiple diode laser array of claim 14, wherein each of said plurality of members comprises a polyimide layer deposited on the surface of said heatsink.
Claim 18
Dependent Claim
27 words
The multiple diode laser array of claim 14, wherein each of said plurality of members comprises an organic thin film deposited on the surface of said heatsink.
Claim 19
Dependent Claim
30 words
The multiple diode laser array of claim 14, wherein each of said plurality of members comprises a layer of high thermal conductivity material deposited on the surface of said heatsink.
Claim 20
Dependent Claim
27 words
The multiple diode laser array of claim 17, wherein said layer of high thermal conductivity material is selected from the group consisting of: gold; silicon; and diamond.
Claim 21
Dependent Claim
27 words
The multiple diode laser array of claim 14, wherein: said heatsink is a malleable material; and said plurality of members comprise cold formed members on said heatsink.
Claim 22
Independent Claim
100 words
A method of fabricating an array of multiple laser diodes, each laser diode having a raised waveguide on a surface thereof which defines the location of light emitting regions thereon, comprising the steps of: forming a plurality of spaced alignment members on a surface of a heatsink to form substantially parallel elongated recesses therebetween; placing the lasers on said heatsink so as to maintain the laser diodes in a predetermined spaced-apart arrangement by an abutting contact region between a surface of the raised waveguide and a surface of the alignment member; and permanently affixing the laser diodes to said heatsink.
Claim 23
Independent Claim
100 words
A method of fabricating an array of multiple laser diodes, each laser diode having a raised waveguide on a surface thereof which defines the location of light emitting regions thereon, comprising the steps of: forming a plurality of spaced alignment members on a surface of a heatsink to form substantially parallel elongated recesses therebetween; placing the lasers on said heatsink so as to maintain the laser diodes in a predetermined spaced-apart arrangement by an abutting contact region between a surface of the raised waveguide and a surface of the alignment member; and permanently affixing the laser diodes to said heatsink.
Claim 24
Dependent Claim
25 words
The method of claim 20, wherein said affixing step comprises the step of applying solder to a region between said heatsink and the laser diode.
Claim 25
Dependent Claim
35 words
The method of claim 20, wherein said forming step includes: depositing a polyimide layer on the surface of the heatsink; and selectively etching the polyimide layer to remove portions thereof to create the elongated recesses.
Claim 26
Dependent Claim
37 words
The method of claim 20, wherein said forming step includes: depositing an organic thin film on the surface of the heatsink; and selectively etching the organic thin film to remove portions thereof to create the elongated recesses.
Claim 27
Dependent Claim
43 words
The method of claim 20, wherein said forming step includes: depositing a layer of high thermal conductivity material on the surface of the heatsink; and selectively etching the layer of high thermal conductivity material to remove portions thereof to create the elongated recesses.
Claim 28
Dependent Claim
86 words
The method of claim 20, wherein said forming step includes: depositing a photoresist layer on the surface of the heatsink; patterning the photoresist layer; evaporating a layer of metal onto the surface of the heatsink; removing the photoresist layer and the overcoating metal layer thereon to leave metal on unmasked regions of the heatsink surface where the alignment members are to be located; and increasing the thickness of the metal layer present on the surface of the heatsink to produce alignment members having a predetermined thickness.
Claim 29
Dependent Claim
28 words
The method of claim 20, wherein said heatsink is a malleable material and where said forming step includes cold forming said heatsink to create the elongated recesses therein.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-17 | 1998-04-18 | 1998-10-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-17 | 2002-04-18 | 2002-10-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-17 | 2006-04-18 | 2006-10-18 | $7700.00 | Window Closed / Lapsed |