US5350606A
Expired / Lapsed
US
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Single crystal ferroelectric barium titanate films
Assignee: Kanegafuchi Chemical Industry Co Ltd
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Filing: 1993-06-09
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Granted: 1994-09-27
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Expires: 2013-06-09
Abstract
Abstract A ferroelectric thin film consisting of a single crystal of BaTiO 3 which has a perovskite structure is produced by a method comprising evaporating Ba and Ti in an atomic ratio of 1:1 from discrete evaporation sources of Ba and Ti to deposit them on a substrate in a vacuum deposition vessel while supplying a small amount of an oxygen gas to the reactor.
Inventors
- 👤 Toshio Takada
- 👤 Takahito Terashima
- 👤 Kenji Iijima
- 👤 Kazunuki Yamamoto
- 👤 Kazuto Hirata
- 👤 Yoshichika Bando
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 03:33
CPC Classifications
C; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/10; C30B29/16; C30B29/22; C30B29/32
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
78 words
A method for producing a substantially single crystal ferroelectric thin film having a thickness of not larger than 1 μm, which method comprises evaporating Ba and Ti in an atomic ratio of 1:1 from discrete evaporation sources of Ba and Ti to deposit the evaporated Ba and Ti on a substrate in a vacuum deposition vessel while supplying oxygen gas in an amount sufficient to maintain oxygen pressure within the vessel between 10 -5 and 10 -3 Torr.
Claim 2
Independent Claim
78 words
A method for producing a substantially single crystal ferroelectric thin film having a thickness of not larger than 1 μm, which method comprises evaporating Ba and Ti in an atomic ratio of 1:1 from discrete evaporation sources of Ba and Ti to deposit the evaporated Ba and Ti on a substrate in a vacuum deposition vessel while supplying oxygen gas in an amount sufficient to maintain oxygen pressure within the vessel between 10 -5 and 10 -3 Torr.
Claim 3
Dependent Claim
25 words
The method according to claim 1, wherein a plasma is generated during evaporation of Ba and Ti and deposition of BaTiO 3 on the substrate.
Claim 4
Dependent Claim
29 words
The method according to claim 1, wherein said oxygen gas is supplied towards the substrate surface to form an oxygen-containing atmosphere having a relatively high pressure near the substrate.
Claim 5
Dependent Claim
23 words
The method according to claim 1, wherein a single crystal is used as the substrate with its (001) plane forming the substrate surface.
Claim 6
Dependent Claim
23 words
The method according to claim 1, wherein a single crystal is used as the substrate with its (110) plane forming the substrate surface.
Claim 7
Dependent Claim
19 words
The method according to claim 1, wherein the substrate is heated at a temperature not lower than 500° C.
Claim 8
Dependent Claim
18 words
The method according to claim 1, wherein a deposition rate of BaTiO 3 is 4 Å/sec. or less.
Claim 9
Dependent Claim
24 words
The method according to claim 1, wherein the ferroelectric thin film thus produced comprises a single crystal of BaTiO 3 having a perovskite structure.
Claim 10
Dependent Claim
25 words
The method according to claim 6, wherein the ferroelectric thin film thus produced consists of a single crystal of BaTiO 3 having a perovskite structure.
References Cited (Backward Citations)
US2992079A
Cited
US3409412A
Cited
US3872359A
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JPS593091A
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US4724038A
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US5009762A
Cited
US5006363A
Cited
US5145713A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-09-26 | 1998-03-28 | 1998-09-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-09-26 | 2002-03-28 | 2002-09-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-09-26 | 2006-03-28 | 2006-09-27 | $7700.00 | Window Closed / Lapsed |