US5348775A
Expired / Lapsed
US
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Production of PT/PZT/PLZT laser `direct write` patterns
Assignee: Northern Illinois University
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Filing: 1993-02-08
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Granted: 1994-09-20
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Expires: 2013-02-08
Abstract
Abstract This invention encompasses methods and reagents for making PT, PZT, and PLZT as well as their extrinsic ions doped powders and thin films. In particular, the invention includes methods for localized laser annealing of PT, PZT, PLZT films to the surface of materials to provide articles useful in electronic devices such as high value capacitors, optical switches, wave guides, and the like. A 15-25% by weight of PT/PZT/PLZT in about a 5-10% acetic acid solution having an effective wetting agent of a surfactant has been found to be a superior isolation for making both powders and thin films, especially thin films for laser writing.
Inventors
- 👤 Chhiu-Tsu Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:20
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C03; C03C; C03C17/00; C03C17/22; C03C17/23; C03C17/25; C03C23/00; C03C23/0005; C03C23/0025; C04B41/45; C04B41/46; C04B41/48; C04B41/80; C04B41/81; C04B41/82; C04B41/83; C23; C23C; C23C26/00; C23C26/02; H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/077; H10N30/078; C03C2217/00; C03C2217/20; C03C2217/21; C03C2217/23; C03C2218/00; C03C2218/10; C03C2218/11; C03C2218/30; C03C2218/32; C04B2111/00; C04B2111/00474; C04B2111/00844; H10N30/80; H10N30/85; H10N30/853; H10N30/8548; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
167 words
A method for forming a design of a thin ferroelectric film on a solid surface comprising: (a) providing a solution of about 15 to 25 percent by weight of lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate in about 5-10% aqueous acetic acid solution having an effective wetting amount of a surfactant, wherein the titanium component of the solution is in the form of titanium acetate; (b) spin-coating the solid surface with the solution of (a); (c) drying the coating; (d) annealing a portion of the lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate to the solid surface by irradiating the dried spin-coated solid surface with a laser in the desired pattern; and (e) washing the solid surface with a strong acid to remove lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate not annealed by irradiation with the laser thereby leaving a pattern of the laser annealed lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate on the solid surface.
Claim 2
Independent Claim
167 words
A method for forming a design of a thin ferroelectric film on a solid surface comprising: (a) providing a solution of about 15 to 25 percent by weight of lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate in about 5-10% aqueous acetic acid solution having an effective wetting amount of a surfactant, wherein the titanium component of the solution is in the form of titanium acetate; (b) spin-coating the solid surface with the solution of (a); (c) drying the coating; (d) annealing a portion of the lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate to the solid surface by irradiating the dried spin-coated solid surface with a laser in the desired pattern; and (e) washing the solid surface with a strong acid to remove lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate not annealed by irradiation with the laser thereby leaving a pattern of the laser annealed lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate on the solid surface.
Claim 3
Dependent Claim
21 words
A method according to claim 1 wherein the solid surface comprises glass, quartz, platinum, gold, silver, sapphire, silicon, or ceramic material.
Claim 4
Dependent Claim
14 words
A method according to claim 1 wherein the surfactant in a nonionic polyoxyalkylene surfactant.
Claim 5
Dependent Claim
19 words
A method of claim 1 wherein the solution further contains acetate, acetylacetonate, or carbonate salts of a metal ion.
Claim 6
Dependent Claim
28 words
A method according to claim 4 wherein the metal ion is selected from the group comprising chromium, iron, neodrymium, europium, praseodymium, molydbenum, ytterbium, terbium, manganese, tungston and vanadium.
References Cited (Backward Citations)
No citation records indexed.
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