US5347086A
Expired / Lapsed
US
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Coaxial die and substrate bumps
Assignee: Rateze Remote Mgmt LLC
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Filing: 1992-03-24
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Granted: 1994-09-13
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Expires: 2012-03-24
Abstract
Abstract A coaxial bump for connecting a die to a substrate includes a center post and a ground ring surrounding and shielding the center post. The center post may be a center conductor line, and the ground ring may be generally torus-shaped, nearly closed or completely closed. The coaxial bump provides very low crosstalk in chip-to-substrate interconnections and provides a constant impedance with negligible inductive discontinuity.
Inventors
- 👤 Curtis N. Potter
- 👤 David A. Gibson
- 👤 Uttam S. Ghoshal
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:06
CPC Classifications
H; H10; H10W; H10W44/00; H10W44/20; H10W44/203; H10W44/209; H10W44/212; H10W72/00; H10W72/20; H10W72/251; H10W72/90; H10W72/921; H10W72/923; H10W72/951; H10W72/952
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
65 words
A coaxial bump for connecting a die to a substrate, said coaxial bump comprising: a center conductor line; and a ground ring spaced from and surrounding said center conductor line wherein said ground ring provides said center conductor line with electromagnetic shielding from adjacent signal bumps thereby permitting only a very low level of crosstalk between said center conductor line and said adjacent signal bumps.
Claim 2
Dependent Claim
65 words
A coaxial bump for connecting a die to a substrate, said coaxial bump comprising: a center conductor line; and a ground ring spaced from and surrounding said center conductor line wherein said ground ring provides said center conductor line with electromagnetic shielding from adjacent signal bumps thereby permitting only a very low level of crosstalk between said center conductor line and said adjacent signal bumps.
Claim 3
Dependent Claim
17 words
A coaxial bump as recited in claim 1, wherein said ground ring is at least generally torus-shaped.
Claim 4
Dependent Claim
18 words
A coaxial bump as recited in claim 2, wherein said ground ring completely surrounds said center conductor line.
Claim 5
Dependent Claim
18 words
A coaxial bump as recited in claim 3, wherein said bump contains no flux within said ground ring.
Claim 6
Dependent Claim
50 words
A coaxial bump comprising: a dielectric layer; a passivation layer; a ground layer disposed between said dielectric layer and said passivation layer; an inner bump center conductor extending through and electrically isolated from said ground layer; and an outer bump shield mounted atop and electrically connected to said ground layer.
Claim 7
Dependent Claim
50 words
A coaxial bump comprising: a dielectric layer; a passivation layer; a ground layer disposed between said dielectric layer and said passivation layer; an inner bump center conductor extending through and electrically isolated from said ground layer; and an outer bump shield mounted atop and electrically connected to said ground layer.
Claim 8
Dependent Claim
22 words
A coaxial bump as recited in claim 5, wherein said dielectric is selected from the group consisting of silicon dioxide and polyimide.
Claim 9
Dependent Claim
23 words
A coaxial bump as recited in claim 5, wherein said ground layer is selected from the group consisting of niobium, copper and aluminum.
Claim 10
Dependent Claim
30 words
A coaxial bump as recited in claim 5, further comprising a feed within said dielectric layer connected to said inner bump center conductor and electrically isolated from said ground layer.
Claim 11
Dependent Claim
14 words
A coaxial bump as recited in claim 8, further comprising exposed, top stripline pads.
Claim 12
Dependent Claim
20 words
A coaxial bump as recited in claim 9, wherein said exposed, top stripline pads are metallized with a barrier metal.
Claim 13
Dependent Claim
14 words
A coaxial bump as recited in claim 10, wherein said barrier metal is palladium.
Claim 14
Dependent Claim
18 words
A coaxial bump as recited in claim 9, wherein said entire coaxial bump is formed on a wafer.
Claim 15
Dependent Claim
26 words
A coaxial bump as recited in claim 12, wherein said wafer has a surface which is coated with gold so as to provide a plating interconnect.
Claim 16
Dependent Claim
68 words
A coaxial bump for connecting a die to a substrate, said bump comprising: a center conductor line; and a ground ring with at least one gap therein, said ground ring spaced from and partially surrounding said center conductor line wherein said ground ring provides said center conductor line with electromagnetic shielding from adjacent signal bumps thereby reducing crosstalk between said center conductor line and said adjacent signal bumps.
Claim 17
Dependent Claim
68 words
A coaxial bump for connecting a die to a substrate, said bump comprising: a center conductor line; and a ground ring with at least one gap therein, said ground ring spaced from and partially surrounding said center conductor line wherein said ground ring provides said center conductor line with electromagnetic shielding from adjacent signal bumps thereby reducing crosstalk between said center conductor line and said adjacent signal bumps.
Claim 18
Dependent Claim
26 words
A coaxial bump as recited in claim 14, wherein said at least one gap does not significantly decrease the electromagnetic shielding capability of said ground ring.
Claim 19
Dependent Claim
18 words
A coaxial bump as recited in claim 15, wherein said at least one gap permits gas pressure release.
Claim 20
Dependent Claim
17 words
A coaxial bump as recited in claim 15, wherein said die is flip-chip bonded to said substrate.
Claim 21
Dependent Claim
20 words
A coaxial bump as recited in claim 15, wherein said center conductor line is at least partially formed with aluminum.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-09-12 | 1998-03-14 | 1998-09-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-09-12 | 2002-03-14 | 2002-09-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-09-12 | 2006-03-14 | 2006-09-13 | $7700.00 | Window Closed / Lapsed |