US5345639A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device and method for scrubbing and cleaning substrate
Assignee: Tokyo Electron Ltd
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Filing: 1993-05-28
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Granted: 1994-09-13
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Expires: 2013-05-28
Abstract
Abstract A substrate scrubbing and cleaning device comprising a mechanism having an upper and a lower brush members for scrubbing both surfaces of an LCD glass substrate, a mechanism for rotating the upper and lower brush members, a mechanism for supplying pure water to the upper and lower brush members, a mechanism for carrying the substrate between the upper and the lower brush members to reciprocate it relative to the upper and lower brush members in a substrate carrying direction, and a controller for controlling the operation of the substrate carrying mechanism.
Inventors
- 👤 Kouichi Tanoue
- 👤 Shinzi Kitamura
- 👤 Noriyuki Anai
- 👤 Takami Satoh
- 👤 Takayuki Tomoeda
- 👤 Tatsuya Iwasaki
- 👤 Kengo Mizosaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 13:20
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0414; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; H10P72/0412
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
101 words
A substrate scrubbing and cleaning device, comprising: means having upper and lower brush members for scrubbing both surfaces of a substrate, respectively; means for rotating the upper and lower brush members, respectively; means for supplying cleaning solution to the upper and lower brush members, respectively; means having a pair of belt-driven holding arms, for carrying the substrate between the upper and lower brush members and for reciprocating the substrate relative to the upper and lower brush members in a substrate carrying direction, the substrate being held by said holding arms; and means for controlling the operation of the substrate carrying means.
Claim 2
Dependent Claim
101 words
A substrate scrubbing and cleaning device, comprising: means having upper and lower brush members for scrubbing both surfaces of a substrate, respectively; means for rotating the upper and lower brush members, respectively; means for supplying cleaning solution to the upper and lower brush members, respectively; means having a pair of belt-driven holding arms, for carrying the substrate between the upper and lower brush members and for reciprocating the substrate relative to the upper and lower brush members in a substrate carrying direction, the substrate being held by said holding arms; and means for controlling the operation of the substrate carrying means.
Claim 3
Dependent Claim
20 words
The device according to claim 1, further comprising nozzle means through which high pressure water is jetted onto the substrate.
Claim 4
Dependent Claim
26 words
The device according to claim 1, further comprising nozzle means through which spraying water, to which ultrasonic waves have been applied, is sprayed onto the substrate.
Claim 5
Dependent Claim
22 words
The device according to claim 1, further comprising nozzle means through which large amount of rinsing solution is supplied to the substrate.
Claim 6
Dependent Claim
23 words
The device according to claim 1, wherein said cleaning solution supply means includes a passage opening at a center of each brush member.
Claim 7
Dependent Claim
23 words
The device according to claim 1, wherein the upper brush members are off-set from their adjacent lower brush members in a horizontal plane.
Claim 8
Dependent Claim
18 words
The device according to claim 1, further comprising means for holding by suction, lifting and rotating the substrate.
Claim 9
Dependent Claim
134 words
A scrubbing and cleaning device comprising: means having an upper and a lower brush members for scrubbing both surfaces of a substrate, respectively; means for rotating the upper and lower brush members, respectively; means for supplying cleaning solution to the upper and lower brush members, respectively; means having upper rollers each being arranged between the upper brush members and also having lower rollers each being arranged between the lower brush members and serving to carry the substrate between the upper and the lower brush members by the upper and lower rollers; lift holder means for receiving the substrate from the carrying means to hold and lift the substrate; and stage means for receiving the substrate from the lift holder means and for rotating the substrate thereon while applying a rinsing solution to the substrate.
Claim 10
Dependent Claim
134 words
A scrubbing and cleaning device comprising: means having an upper and a lower brush members for scrubbing both surfaces of a substrate, respectively; means for rotating the upper and lower brush members, respectively; means for supplying cleaning solution to the upper and lower brush members, respectively; means having upper rollers each being arranged between the upper brush members and also having lower rollers each being arranged between the lower brush members and serving to carry the substrate between the upper and the lower brush members by the upper and lower rollers; lift holder means for receiving the substrate from the carrying means to hold and lift the substrate; and stage means for receiving the substrate from the lift holder means and for rotating the substrate thereon while applying a rinsing solution to the substrate.
Claim 11
Dependent Claim
23 words
The device according to claim 8, wherein said lift holder means has members for attracting and holding both side portions of the substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-09-12 | 1998-03-14 | 1998-09-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-09-12 | 2002-03-14 | 2002-09-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-09-12 | 2006-03-14 | 2006-09-13 | $7700.00 | Window Closed / Lapsed |