US5343057A
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Thin film, field effect transistor with a controlled energy band
Assignee: Alcatel Lucent SAS
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Filing: 1992-07-02
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Granted: 1994-08-30
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Expires: 2012-07-02
Abstract
Abstract This transistor incorporates at least one first stack of semi-conductor conduction layers and at least one second stack of semiconductor layers with a single, highly doped thin film within the second stack giving it the character of a mobile electric charge donor, superimposed and supported by a substrate as well as at least two potential barriers located in the second stack on either side of the doped thin film in order to reduce the concentration of carriers in said second stack a metal gate resting on the second stack for modifying the concentration of carriers of the charges in the first stack, two ohmic contacts being placed on one of the stacks, on either side of the gate and serving as the source and drain.
Inventors
- 👤 Jean-Michel Gerard
- 👤 Jacques Favre
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 13:57
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/40; H10D30/47; H10D30/471; H10D30/473; H10D30/4732; H10D62/00; H10D62/80; H10D62/82; H10D62/824; H10D62/826; H10D64/00; H10D64/60; H10D64/602
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
341 words
A field effect transistor comprising: a. a semiinsulating substrate, b. at least one first stack (6) of semiconductive conduction layers with a first concentration of carriers, said first stack forming a conduction channel, c. at least one second stack (8) of semiconductive, mobile electric charge donor layers, said second stack having a second concentration of carriers and comprising a single highly doped thin film (18) giving to said second stack a donor character, at least two potential barriers (17, 19) located in said second stack, respectively on either side of the highly doped thin film in order to reduce the second concentration of carriers in said second stack, and other layers (20, 22) in said second stack, each barrier (17, 19) comprising at least one semiconductive monolayer of a material having a forbidden energy band greater than those of the other layers (20, 22) of the second stack, said first and second stacks being superimposed on the substrate (2), d. a metal gate (G) formed on the second stack to modify the first concentration of charge carries in the first stack, e. two ohmic contacts (S, D) placed on one of the stacks, on either side of the gate, and serving respectively as a source and a drain, and f. at least one potential well (12) in said first stack in order to increase the first concentration of carries in the first stack, said well (12) comprising at least one semiconductor monolayer of a material having a forbidden energy band below those of the other layers (14, 16) of the first stack, and wherein the substrate (2) comprises GaAs, said other layers (14, 16) of the first stack (6), other than the potential well (12) comprise In x Ga 1-x As with x≦x≦1, the potential well (12) comprises In xo Ga 1-xo As with x<xo≦1, said other layers (20, 22) of the second stack, other than the potential barriers, comprise Al y Ga 1-y As with 0<y≦1, and the potential barriers (17, 19) comprise Al yo Ga 1-yo As with y<yo≦1.
Claim 2
Dependent Claim
341 words
A field effect transistor comprising: a. a semiinsulating substrate, b. at least one first stack (6) of semiconductive conduction layers with a first concentration of carriers, said first stack forming a conduction channel, c. at least one second stack (8) of semiconductive, mobile electric charge donor layers, said second stack having a second concentration of carriers and comprising a single highly doped thin film (18) giving to said second stack a donor character, at least two potential barriers (17, 19) located in said second stack, respectively on either side of the highly doped thin film in order to reduce the second concentration of carriers in said second stack, and other layers (20, 22) in said second stack, each barrier (17, 19) comprising at least one semiconductive monolayer of a material having a forbidden energy band greater than those of the other layers (20, 22) of the second stack, said first and second stacks being superimposed on the substrate (2), d. a metal gate (G) formed on the second stack to modify the first concentration of charge carries in the first stack, e. two ohmic contacts (S, D) placed on one of the stacks, on either side of the gate, and serving respectively as a source and a drain, and f. at least one potential well (12) in said first stack in order to increase the first concentration of carries in the first stack, said well (12) comprising at least one semiconductor monolayer of a material having a forbidden energy band below those of the other layers (14, 16) of the first stack, and wherein the substrate (2) comprises GaAs, said other layers (14, 16) of the first stack (6), other than the potential well (12) comprise In x Ga 1-x As with x≦x≦1, the potential well (12) comprises In xo Ga 1-xo As with x<xo≦1, said other layers (20, 22) of the second stack, other than the potential barriers, comprise Al y Ga 1-y As with 0<y≦1, and the potential barriers (17, 19) comprise Al yo Ga 1-yo As with y<yo≦1.
Claim 3
Dependent Claim
11 words
A transistor according to claim 1, wherein xo=1; 0.20<y<1; and yo=1.
Claim 4
Dependent Claim
38 words
A transistor according to claim 1, wherein a not intentionally doped, semiconductor buffer layer (4) is provided between the substrate and the first layer stack, and said buffer layer and the substrate are made of a similar material.
Claim 5
Dependent Claim
37 words
A transistor according to claim 1, wherein a highly coped semiconductor material (10) is interposed between the second stack and respectively the source and drain, and said material and the substrate are made of a similar material.
Claim 6
Dependent Claim
338 words
A field effect transistor comprising: a. a semiconductor substrate, b. at least one first stack (6) of semiconductive conduction layers with a first concentration of carriers, said first stack forming a conduction channel, c. at least one second stack (8) of semiconductive mobile electric charge donor layers, said second stack having a second concentration of carriers and comprising a single highly doped thin film (18) giving to said second stack a donor character, at least two potential barriers (17, 19) located in said second stack, respectively on either side of the highly doped thin film in order to reduce the second concentration of carriers in said second stack, and other layers (20, 22) in said second stack, each barrier (17, 19) comprising at least one semiconductive monolayer of a material having a forbidden energy band greater than those of the other layers (20, 22) of the second stack, said first and second stacks being superimposed on the substrate (2), d. a metal gate (G) formed on the second stack to modify the first concentration of charge carriers in the first stack, e. two ohmic contacts (S, D) placed on one of the stacks, on either side of the gate, and serving respectively as a source and a drain, and f. at least one potential well (12) in said first stack in order to increase the first concentration of carriers in the first stack, said well (12) comprising at least one semiconductor monolayer of a material having a forbidden energy band below those of the other layers (14, 16) of the first stack, and wherein the substrate comprises GaAs, the layers (14, 16) of the first stack (6), other than the potential well (12), comprise In x Ga 1-x As with 0≦x<1, the potential well (12) comprises In xo Ga 1-xo As with x-xo≦1, the layers (20, 22) of the second stack, other than the potential barriers, comprise In z Ga 1-z P with 0<z≦0.7 and the potential barriers (17, 19) comprise In zo Ga 1-zo P with 0≦zo≦z.
Claim 7
Dependent Claim
338 words
A field effect transistor comprising: a. a semiconductor substrate, b. at least one first stack (6) of semiconductive conduction layers with a first concentration of carriers, said first stack forming a conduction channel, c. at least one second stack (8) of semiconductive mobile electric charge donor layers, said second stack having a second concentration of carriers and comprising a single highly doped thin film (18) giving to said second stack a donor character, at least two potential barriers (17, 19) located in said second stack, respectively on either side of the highly doped thin film in order to reduce the second concentration of carriers in said second stack, and other layers (20, 22) in said second stack, each barrier (17, 19) comprising at least one semiconductive monolayer of a material having a forbidden energy band greater than those of the other layers (20, 22) of the second stack, said first and second stacks being superimposed on the substrate (2), d. a metal gate (G) formed on the second stack to modify the first concentration of charge carriers in the first stack, e. two ohmic contacts (S, D) placed on one of the stacks, on either side of the gate, and serving respectively as a source and a drain, and f. at least one potential well (12) in said first stack in order to increase the first concentration of carriers in the first stack, said well (12) comprising at least one semiconductor monolayer of a material having a forbidden energy band below those of the other layers (14, 16) of the first stack, and wherein the substrate comprises GaAs, the layers (14, 16) of the first stack (6), other than the potential well (12), comprise In x Ga 1-x As with 0≦x<1, the potential well (12) comprises In xo Ga 1-xo As with x-xo≦1, the layers (20, 22) of the second stack, other than the potential barriers, comprise In z Ga 1-z P with 0<z≦0.7 and the potential barriers (17, 19) comprise In zo Ga 1-zo P with 0≦zo≦z.
Claim 8
Dependent Claim
38 words
A transistor according to claim 5, wherein a not intentionally doped, semiconductor buffer layer (4) is provided between the substrate and the first layer stack, and said buffer layer and the substrate are made of a similar material.
Claim 9
Dependent Claim
38 words
A transistor according to claim 5, wherein a highly doped semiconductor material (10) is interposed between the second layer stack and respectively the source and drain, and said material and the substrate are made of a similar material.
Claim 10
Dependent Claim
328 words
A field effect transistor comprising: a. a semiinsulating substrate, b. at least one first stack (6) of semiconductive conduction layers with a first concentration of carriers, said first stack forming a conduction channel, c. at least one second stack (8) of semiconductive, mobile electric charge donor layers, said second stack having a second concentration of carriers and comprising a single highly doped thin film (18) giving to said second stack a donor character, at least two potential barriers (17, 19) located in said second stack, respectively on either side of the highly doped thin film in order to reduce the second concentration of carriers in said second stack, and other layers (20, 22) in said second stack, each barrier (17, 19) comprising at least one semiconductive monolayer of a material having a forbidden energy band greater than those of the other layers (20, 22) of the second stack, said first and second stacks being superimposed on the substrate (2), d. a metal gate (G) formed on the second stack to modify the first concentration of charge carriers in the first stack, e. two ohmic contacts (S, D) placed on one of the stacks, on either side of the gate, and serving respectively as a source and a drain, and f. at least one potential well (12) in said first stack in order to increase the first concentration of carriers in the first stack, said well (12) comprising at least one semiconductor monolayer of a material having a forbidden energy band below those of the other layers (14, 16) of the first stack, and wherein the substrate (2) comprises InP, said other layers (14, 16) of the first stack, other than the potential well (12), comprise In t Ga 1-t As with 0.3≦u≦1, the layers (20, 22) of the second stack, other than the potential barriers (18), comprise Al u In 1-u As with 0.3≦u≦1 and the potential barriers (17, 19) comprise Al uo In 1-uo As with u<uo≦1.
Claim 11
Dependent Claim
328 words
A field effect transistor comprising: a. a semiinsulating substrate, b. at least one first stack (6) of semiconductive conduction layers with a first concentration of carriers, said first stack forming a conduction channel, c. at least one second stack (8) of semiconductive, mobile electric charge donor layers, said second stack having a second concentration of carriers and comprising a single highly doped thin film (18) giving to said second stack a donor character, at least two potential barriers (17, 19) located in said second stack, respectively on either side of the highly doped thin film in order to reduce the second concentration of carriers in said second stack, and other layers (20, 22) in said second stack, each barrier (17, 19) comprising at least one semiconductive monolayer of a material having a forbidden energy band greater than those of the other layers (20, 22) of the second stack, said first and second stacks being superimposed on the substrate (2), d. a metal gate (G) formed on the second stack to modify the first concentration of charge carriers in the first stack, e. two ohmic contacts (S, D) placed on one of the stacks, on either side of the gate, and serving respectively as a source and a drain, and f. at least one potential well (12) in said first stack in order to increase the first concentration of carriers in the first stack, said well (12) comprising at least one semiconductor monolayer of a material having a forbidden energy band below those of the other layers (14, 16) of the first stack, and wherein the substrate (2) comprises InP, said other layers (14, 16) of the first stack, other than the potential well (12), comprise In t Ga 1-t As with 0.3≦u≦1, the layers (20, 22) of the second stack, other than the potential barriers (18), comprise Al u In 1-u As with 0.3≦u≦1 and the potential barriers (17, 19) comprise Al uo In 1-uo As with u<uo≦1.
Claim 12
Dependent Claim
37 words
A transistor according to 8, wherein a not intentionally doped, semiconductor buffer layer (4) is provided between the substrate and the first layer stack, and said buffer layer and the substrate are made of a similar material.
Claim 13
Dependent Claim
37 words
A transistor according to 8, wherein a not intentionally doped, semiconductor buffer layer (4) is provided between the substrate and the first layer stack, and said buffer layer and the substrate are made of a similar material.
Claim 14
Dependent Claim
38 words
A transistor according to claim 8, wherein a highly doped semiconductor material (10) is interposed between the second layer stack and respectively the source and drain, and said material and the substrate are made of a similar material.
Claim 15
Dependent Claim
338 words
A field effect transistor comprising: a. a semiinsulating substrate, b. at least one first stack (6) of semiconductive conduction layers with the first concentration of carriers, said first stack forming a conduction channel, c. at least one second stack (8) of semiconductive, mobile electric charge donor layers, said second stack having a second concentration of carriers and comprising a single highly doped thin film (18) giving to said second stack a donor character, at least two potential barriers (17, 19) located in said second stack, respectively on either side of the highly doped thin film in order to reduce the second concentration of carriers in said second stack, and other layers (20, 22) in said second stack, each barrier (17, 19) comprising at least one semiconductive monolayer of a material having a forbidden energy band greater than those of the other layers (20, 22) of the second stack, said first and second stacks being superimposed on the substrate (2), d. a metal gate (G) formed on the second stack to modify the first concentration of charge carriers in the first stack, e. two ohmic contacts (S, D) placed on one of the stacks, on either side of the gate, and serving respectively as a source and a drain, and f. at least one potential well (12) in said first stack in order to increase the first concentration of carriers in the first stack, said well (12) comprising at least one semiconductor monolayer of a material having a forbidden energy band below those of the other layers (14, 16) of the first stack, and wherein the substrate comprises GaAs, the layers (14, 16) of the first stack (6), other than the potential well (12), comprise In x Ga 1-x As with 0≦x<1, the potential well (12) comprises In xo Ga 1-xo As with XO=1, the layers (20, 22) of the second stack, other than the potential barriers, comprise In z Ga 1-z P with 0<z≦0.7 and the potential barriers (17, 19) comprise In zo Ga 1-zo P with ZO=0.
Claim 16
Dependent Claim
338 words
A field effect transistor comprising: a. a semiinsulating substrate, b. at least one first stack (6) of semiconductive conduction layers with the first concentration of carriers, said first stack forming a conduction channel, c. at least one second stack (8) of semiconductive, mobile electric charge donor layers, said second stack having a second concentration of carriers and comprising a single highly doped thin film (18) giving to said second stack a donor character, at least two potential barriers (17, 19) located in said second stack, respectively on either side of the highly doped thin film in order to reduce the second concentration of carriers in said second stack, and other layers (20, 22) in said second stack, each barrier (17, 19) comprising at least one semiconductive monolayer of a material having a forbidden energy band greater than those of the other layers (20, 22) of the second stack, said first and second stacks being superimposed on the substrate (2), d. a metal gate (G) formed on the second stack to modify the first concentration of charge carriers in the first stack, e. two ohmic contacts (S, D) placed on one of the stacks, on either side of the gate, and serving respectively as a source and a drain, and f. at least one potential well (12) in said first stack in order to increase the first concentration of carriers in the first stack, said well (12) comprising at least one semiconductor monolayer of a material having a forbidden energy band below those of the other layers (14, 16) of the first stack, and wherein the substrate comprises GaAs, the layers (14, 16) of the first stack (6), other than the potential well (12), comprise In x Ga 1-x As with 0≦x<1, the potential well (12) comprises In xo Ga 1-xo As with XO=1, the layers (20, 22) of the second stack, other than the potential barriers, comprise In z Ga 1-z P with 0<z≦0.7 and the potential barriers (17, 19) comprise In zo Ga 1-zo P with ZO=0.
Claim 17
Dependent Claim
339 words
A field effect transistor comprising: a. semiinsulating substrate, b. at least one first stack (6) of semiconductive conduction layers with a first concentration of carriers, said first stack forming a conduction channel, c. at least one second stack (8) of semiconductive, mobile electric charge donor layers, said second stack having a second concentration of carriers and comprising a single highly doped thin film (18) giving to said second stack a donor character, at least two potential barriers (17, 19) located in said second stack, respectively on either side of the highly doped thin film in order to reduce the second concentration of carriers in said second stack, and other layers (20, 22) in said second stack, each barrier (17, 19) comprising at least one semiconductive monolayer of a material having a forbidden energy band greater than those of the other layers (20, 22) of the second stack, said first and second stacks being superimposed on the substrate (2), d. a metal gate (G) formed on the second stack to modify the first concentration of charge carriers in the first stack, e. two ohmic contacts (S, D) placed on one of the stacks, on either side of the gate, and serving respectively as a source and a drain, and f. at least one potential wall (12) in said first stack in order to increase the first concentration of carriers in the first stack, said well (12) comprising at least one semiconductor monolayer of a material having a forbidden energy band below those of the other layers (14, 16) of the first stack, and wherein the substrate (2) comprises InP, said other layers (14, 16) of the first stack, other than the potential well (12), comprise In t Ga 1-t As with 0.3≦t≦1, the potential well (12) comprises In to Ga 1-to As with to=1, the layers (20, 22) of the second stack, other than the potential barriers (18), comprise Al u In 1-u As with 0.3≦u≦1 and the potential barriers (17, 19) comprise Al uo In 1-uo As with uo=1.
Claim 18
Dependent Claim
339 words
A field effect transistor comprising: a. semiinsulating substrate, b. at least one first stack (6) of semiconductive conduction layers with a first concentration of carriers, said first stack forming a conduction channel, c. at least one second stack (8) of semiconductive, mobile electric charge donor layers, said second stack having a second concentration of carriers and comprising a single highly doped thin film (18) giving to said second stack a donor character, at least two potential barriers (17, 19) located in said second stack, respectively on either side of the highly doped thin film in order to reduce the second concentration of carriers in said second stack, and other layers (20, 22) in said second stack, each barrier (17, 19) comprising at least one semiconductive monolayer of a material having a forbidden energy band greater than those of the other layers (20, 22) of the second stack, said first and second stacks being superimposed on the substrate (2), d. a metal gate (G) formed on the second stack to modify the first concentration of charge carriers in the first stack, e. two ohmic contacts (S, D) placed on one of the stacks, on either side of the gate, and serving respectively as a source and a drain, and f. at least one potential wall (12) in said first stack in order to increase the first concentration of carriers in the first stack, said well (12) comprising at least one semiconductor monolayer of a material having a forbidden energy band below those of the other layers (14, 16) of the first stack, and wherein the substrate (2) comprises InP, said other layers (14, 16) of the first stack, other than the potential well (12), comprise In t Ga 1-t As with 0.3≦t≦1, the potential well (12) comprises In to Ga 1-to As with to=1, the layers (20, 22) of the second stack, other than the potential barriers (18), comprise Al u In 1-u As with 0.3≦u≦1 and the potential barriers (17, 19) comprise Al uo In 1-uo As with uo=1.
References Cited (Backward Citations)
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