US5342648A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for forming amorphous ferroelectric materials
Assignee: University of California
•
Filing: 1992-09-23
•
Granted: 1994-08-30
•
Expires: 2012-09-23
Abstract
Abstract Amorphous ferroelectric materials are formed by a sol-gel type process and the ferroelectric properties stabilized by complete hydrolysis and polycondensation, and extraction of residual organic materials, preferably by heating at temperatures below the temperature at which crystallization may occur. Stable solutions of metal alkoxides are prepared by reacting or dissolving a metal alkoxide in alcohol such as absolute ethanol. The solution may be spincast on essentially any substrate, conductor or nonconductor, crystalline or amorphous, transparent or opaque, and even including plastics. Hydrolysis and polycondensation occur in situ to deposit an amorphous ferroelectric film. Residual alcohol is extracted by heating below the temperature at which crystallization occurs. Such films show P-E hysteresis loops and pyroelectric current. Such ferroelectric thin films are useable in electronic, opto-electronic and optical devices.
Inventors
- 👤 John D. Mackenzie
- 👤 Ren Xu
- 👤 Yuhuan Xu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 01:01
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/622; C04B35/624; H; H10; H10N; H10N15/00; H10N15/10; H10N15/15; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/077; H10N30/078; H10N30/704; H10N30/706
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
111 words
A method for forming an amorphous material having reversible spontaneous electric polarization, the method comprising the steps of: preparing an anhydrous solution containing at least one precursor compound for the material; maintaining the anhydrous solution free of water until the solution is exposed to a substrate; exposing the solution to a substrate in the presence of water vapor and thereby simultaneously depositing a film on the substrate, hydrolyzing the precursor compound, polycondensing the hydrolyzed precursor compound and removing solvent from the anhydrous solution to thereby form condensed amorphous solid material; and heating the condensed amorphous material at a sufficient temperature for stabilizing its amorphous structure and an insufficient temperature for crystallization.
Claim 2
Independent Claim
111 words
A method for forming an amorphous material having reversible spontaneous electric polarization, the method comprising the steps of: preparing an anhydrous solution containing at least one precursor compound for the material; maintaining the anhydrous solution free of water until the solution is exposed to a substrate; exposing the solution to a substrate in the presence of water vapor and thereby simultaneously depositing a film on the substrate, hydrolyzing the precursor compound, polycondensing the hydrolyzed precursor compound and removing solvent from the anhydrous solution to thereby form condensed amorphous solid material; and heating the condensed amorphous material at a sufficient temperature for stabilizing its amorphous structure and an insufficient temperature for crystallization.
Claim 3
Dependent Claim
15 words
A method as recited in claim 1 wherein the precursor compound comprises an organometallic compound.
Claim 4
Dependent Claim
15 words
A method as recited in claim 1 wherein the precursor compound comprises a metal alkoxide.
Claim 5
Dependent Claim
24 words
A method as recited in claim 1 comprising the step of applying an electric field to the condensed amorphous material for poling the material.
Claim 6
Independent Claim
100 words
A method for forming an amorphous ferroelectric material comprising the steps of: forming an anhydrous liquid solution comprising an organic solvent and at least one metal alkoxide; maintaining the anhydrous solution free of water until the solution is exposed to a substrate; simultaneously exposing the solution to a substrate in the presence of water vapor and thereby simultaneously depositing a film on the substrate, hydrolyzing the alkoxide, polycondensing the hydrolyzed alkoxide and removing solvent from the anhydrous solution to thereby form a solid film; and stabilizing the solid film at a temperature less than sufficient to crystallize the solid film.
Claim 7
Independent Claim
100 words
A method for forming an amorphous ferroelectric material comprising the steps of: forming an anhydrous liquid solution comprising an organic solvent and at least one metal alkoxide; maintaining the anhydrous solution free of water until the solution is exposed to a substrate; simultaneously exposing the solution to a substrate in the presence of water vapor and thereby simultaneously depositing a film on the substrate, hydrolyzing the alkoxide, polycondensing the hydrolyzed alkoxide and removing solvent from the anhydrous solution to thereby form a solid film; and stabilizing the solid film at a temperature less than sufficient to crystallize the solid film.
Claim 8
Dependent Claim
17 words
A method as recited in claim 5 comprising forming the solution comprising a plurality of metal alkoxides.
Claim 9
Dependent Claim
85 words
A method as recited in claim 5 wherein the metal alkoxide is a mixed metal alkoxide and wherein the solution contains at least one mixed metal alkoxide selected from the group consisting of Li x Nb.sub.(1-x) O y where x is in the range of from 0 to 0.5 and y=(5-4x)/2, Pb(Zr x Ti.sub.(1-x) O 3 where x is in the range of from 0 to 1, and (Sr x Ba.sub.(1-x))Nb 2 O 6 where x is in the range of from 0.25 to 0.75.
Claim 10
Dependent Claim
22 words
A method as recited in claim 5 wherein the depositing step comprises depositing the solution on an electrically conductive organic polymer substrate.
Claim 11
Independent Claim
107 words
A method for forming an amorphous ferroelectric material comprising the steps of: forming a liquid solution comprising an organic solvent and at least one metal alkoxide which is not hydrolyzed; maintaining the alkoxide in the anhydrous solution free of substantial hydrolysis until the solution is exposed to a substrate; simultaneously exposing the solution to a substrate in the presence of water vapor and thereby simultaneously depositing a film on the substrate, hydrolyzing the alkoxide, polycondensing the hydrolyzed alkoxide and removing solvent from the anhydrous solution to thereby form a solid film; and stabilizing the solid film at a temperature less than sufficient to crystallize the solid film.
Claim 12
Independent Claim
107 words
A method for forming an amorphous ferroelectric material comprising the steps of: forming a liquid solution comprising an organic solvent and at least one metal alkoxide which is not hydrolyzed; maintaining the alkoxide in the anhydrous solution free of substantial hydrolysis until the solution is exposed to a substrate; simultaneously exposing the solution to a substrate in the presence of water vapor and thereby simultaneously depositing a film on the substrate, hydrolyzing the alkoxide, polycondensing the hydrolyzed alkoxide and removing solvent from the anhydrous solution to thereby form a solid film; and stabilizing the solid film at a temperature less than sufficient to crystallize the solid film.
Claim 13
Dependent Claim
17 words
A method as recited in claim 9 comprising forming the solution comprising a plurality of metal alkoxides.
Claim 14
Dependent Claim
85 words
A method as recited in claim 9 wherein the metal alkoxide is a mixed metal alkoxide and wherein the solution contains at least one mixed metal alkoxide selected from the group consisting of Li x Nb.sub.(1-x) O y where x is in the range of from 0 to 0.5 and y=(5-4x)/2, Pb(Zr x Ti.sub.(1-x)) O 3 where x is in the range of from 0 to 1, and (Sr x Ba.sub.(1-x))Nb 2 O 6 where x is in the range of from 0.25 to 0.75.
Claim 15
Independent Claim
84 words
A method for forming an amorphous ferroelectric material, the method comprising the following steps: preparing an anhydrous solution containing at least one precursor compound for the material; maintaining the solution such that the precursor compound is free of hydrolysis prior to exposing a substrate to the solution; applying a film of the solution to a substrate such that simultaneously, the precursor compound is hydrolyzed, the hydrolyzed precursor compound is polycondensed and solvent is removed from the solution; and stabilizing the resulting material by heating.
Claim 16
Independent Claim
84 words
A method for forming an amorphous ferroelectric material, the method comprising the following steps: preparing an anhydrous solution containing at least one precursor compound for the material; maintaining the solution such that the precursor compound is free of hydrolysis prior to exposing a substrate to the solution; applying a film of the solution to a substrate such that simultaneously, the precursor compound is hydrolyzed, the hydrolyzed precursor compound is polycondensed and solvent is removed from the solution; and stabilizing the resulting material by heating.
Claim 17
Independent Claim
97 words
A method for forming an amorphous material having reversible spontaneous electric polarization, the method comprising the steps of: preparing an anhydrous solution containing at least one precursor compound for the material; maintaining the anhydrous solution free of water until the solution is exposed to a substrate; exposing the solution to a substrate in the presence of water vapor and thereby simultaneously depositing a film on the substrate, hydrolyzing the precursor compound, polycondensing the hydrolyzed precursor compound and removing solvent from the anhydrous solution to thereby form condensed amorphous solid material; and stabilizing the resulting material by heating.
Claim 18
Independent Claim
97 words
A method for forming an amorphous material having reversible spontaneous electric polarization, the method comprising the steps of: preparing an anhydrous solution containing at least one precursor compound for the material; maintaining the anhydrous solution free of water until the solution is exposed to a substrate; exposing the solution to a substrate in the presence of water vapor and thereby simultaneously depositing a film on the substrate, hydrolyzing the precursor compound, polycondensing the hydrolyzed precursor compound and removing solvent from the anhydrous solution to thereby form condensed amorphous solid material; and stabilizing the resulting material by heating.
Claim 19
Dependent Claim
33 words
The method of claim 13 further including the step of heating the condensed amorphous material at a sufficient temperature for stabilizing its polarization properties and an insufficient temperature for crystallizing the amorphous material.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-29 | 1998-02-28 | 1998-08-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-29 | 2002-02-28 | 2002-08-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-29 | 2006-02-28 | 2006-08-30 | $7700.00 | Window Closed / Lapsed |