Polarizing device with optically contacted thin film interface for high power density ultraviolet light

Claim 2

In an optical device for use at a design wavelength of approximately 308 nanometers, a first piece of glass having a first mating surface, a second piece of glass having a second mating surface for mating with the mating surface of the first piece of glass, said first and second mating surface having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating disposed between the mating surfaces of the first and second pieces of glass, said mating surfaces and said thin film coating forming a physical bond therebetween to provide a monolith without the use of a cement or intervening fluid.

Claim 3

In an optical device for use at a design wavelength of approximately 308 nanometers, a first piece of glass having a mating surface, a second piece of glass having a mating surface for mating with the mating surface of the first piece of glass, said mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating disposed between the mating surfaces of the first and second pieces of glass, said mating surfaces and said thin film coating forming a physical bond therebetween to provide a monolith without the use of a cement or intervening fluid, said pieces of glass being in the form of Littrow prisms.

Claim 4

In an optical device for use at a design wavelength of approximately 308 nanometers, a first piece of glass having a mating surface, a second piece of glass having a mating surface for mating with the mating surface of the first piece of glass, said mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating disposed between the mating surfaces of the first and second pieces of glass, said mating surfaces and said thin film coating forming a physical bond therebetween to provide a monolith without the use of a cement or intervening fluid, said pieces of glass being in the form of Littrow prisms.

Claim 5

A device as in claim 1 wherein said pieces of glass are in the form of a 45° degree prisms.

Claim 6

A device as in claim 1 wherein said glass and said thin film coating are transparent at the design wavelength.

Claim 7

A device as in claim 1, wherein said glass is fused silica.

Claim 8

A device as in claim 1, wherein said thin film optical coating is comprised of dielectric materials.

Claim 9

A device as in claim 1 wherein said monolith is a parallelepiped.

Claim 10

A device as in claim 1 wherein said monolith is a cylinder.

Claim 11

In an optical device for use at a laser design wavelength of approximately 308 nanometers, a first piece of glass having a first mating surface, a second piece of glass having a second mating surface for mating with the mating surface of the first piece of glass, said first and second mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating disposed between the mating surfaces of the first and second pieces of glass, said mating surfaces and said thin film coating forming a physical bond therebetween to provide a monolith without the use of a cement or an intervening fluid to thereby permit the optical device to withstand laser energy passing therethrough.

Claim 12

In an optical device for use at a laser design wavelength of approximately 308 nanometers, a first piece of glass having a first mating surface, a second piece of glass having a second mating surface for mating with the mating surface of the first piece of glass, said first and second mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating disposed between the mating surfaces of the first and second pieces of glass, said mating surfaces and said thin film coating forming a physical bond therebetween to provide a monolith without the use of a cement or an intervening fluid to thereby permit the optical device to withstand laser energy passing therethrough.

Claim 13

In an optical device for use at a design wavelength of approximately 308 nanometers a first piece of glass having a mating surface, a second piece of glass having a mating surface for mating with the mating surface of the first piece of glass, said mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating disposed between the mating surfaces of the first and second pieces of glass, said mating surfaces and said thin film coating forming a physical bond therebetween to provide a monolith without the use of a cement or an intervening fluid to thereby permit the optical device to withstand laser energy passing therethrough, said pieces of glass being in the form of Littrow prisms.

Claim 14

In an optical device for use at a design wavelength of approximately 308 nanometers a first piece of glass having a mating surface, a second piece of glass having a mating surface for mating with the mating surface of the first piece of glass, said mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating disposed between the mating surfaces of the first and second pieces of glass, said mating surfaces and said thin film coating forming a physical bond therebetween to provide a monolith without the use of a cement or an intervening fluid to thereby permit the optical device to withstand laser energy passing therethrough, said pieces of glass being in the form of Littrow prisms.

Claim 15

A device as in claim 9 wherein said pieces of glass are in the form of 45° degree prisms.

Claim 16

A device as in claim 9 wherein said glass and said thin film coating are transparent at the design wavelength.

Claim 17

A device as in claim 9 wherein said thin film coating is comprised of a plurality of periods, each of said periods consisting of a layer of high refractive index material having an optical thickness of 1/4 of the design wavelength and a layer of low refractive index material having an optical thickness of 1/4 of the design wavelength.

Claim 18

A device as in claim 13, wherein at least six periods are provided.

Claim 19

A device as in claim 13 wherein said high refractive index material has an index of refraction ranging from 2.05 to 2.15 and wherein said low refractive index material has an index of refraction ranging from 1.3 to 1.75.

Claim 20

A device as in claim 15 wherein said high refractive index material is hafnium oxide and wherein said low refractive index material is silicon dioxide.

Claim 21

In an optical device for use at a design wavelength of approximately 308 nanometers, a first piece of glass having a mating surface, a second piece of glass having a mating surface for mating with the mating surface of the first piece of glass, said mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating disposed between the mating surfaces of the first and second pieces of glass, said mating surfaces and said thin film coating forming a physical bond therebetween to provide a monolith without the use of a cement or an intervening fluid to thereby permit the optical device to withstand laser energy passing therethrough, said first and second pieces of glass being in the form of Littrow prisms having hypotenuses which serve as mating surfaces.

Claim 22

In an optical device for use at a design wavelength of approximately 308 nanometers, a first piece of glass having a mating surface, a second piece of glass having a mating surface for mating with the mating surface of the first piece of glass, said mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating disposed between the mating surfaces of the first and second pieces of glass, said mating surfaces and said thin film coating forming a physical bond therebetween to provide a monolith without the use of a cement or an intervening fluid to thereby permit the optical device to withstand laser energy passing therethrough, said first and second pieces of glass being in the form of Littrow prisms having hypotenuses which serve as mating surfaces.

Claim 23

In an optical device for use at a design wavelength, a first piece of glass having a mating surface, a second piece of glass having a mating surface for mating with the mating surface of the first piece of glass, said mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating disposed between the mating surfaces of the first and second pieces of glass, said mating surfaces and said thin film coating forming a physical bond therebetween to provide a monolith without the use of a cement or an intervening fluid to thereby permit the optical device to withstand laser energy passing therethrough, the design wavelength being 308 nanometers.

Claim 24

In an optical device for use at a design wavelength, a first piece of glass having a mating surface, a second piece of glass having a mating surface for mating with the mating surface of the first piece of glass, said mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating disposed between the mating surfaces of the first and second pieces of glass, said mating surfaces and said thin film coating forming a physical bond therebetween to provide a monolith without the use of a cement or an intervening fluid to thereby permit the optical device to withstand laser energy passing therethrough, the design wavelength being 308 nanometers.

Claim 25

A device as in claim 17 wherein said monolith has entrance and exit surfaces together with an antireflection coating disposed on the entrance and exits surfaces.

Claim 26

A device as in claim 19 wherein at the design wavelength, the P-polarization state of incident light is transmitted with high efficiency at an angle with respect to the optical axis through the entrance surface.

Claim 27

In an ultraviolet polarizing attenuator, a first Littrow prism of low refractive index material having first and second surfaces extending at right angles to each other and a mating surface extending between the first and second surfaces forming a hypotenuse, a second Littrow prism of low refractive index material having first and second surfaces extending at right angles to each other and a mating surface extending between the first and second surfaces and forming a hypotenuse, said mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating formed of low and high refractive index dielectric materials having a design wavelength of 308 nanometers disposed between the mating surfaces of the first and second prisms, said mating surfaces and said thin film optical coating forming a physical bond therebetween without the use of a cement or an intervening fluid.

Claim 28

In an ultraviolet polarizing attenuator, a first Littrow prism of low refractive index material having first and second surfaces extending at right angles to each other and a mating surface extending between the first and second surfaces forming a hypotenuse, a second Littrow prism of low refractive index material having first and second surfaces extending at right angles to each other and a mating surface extending between the first and second surfaces and forming a hypotenuse, said mating surfaces having a minimum surface smoothness of λ/10 to λ/20 and a multilayer thin film optical coating formed of low and high refractive index dielectric materials having a design wavelength of 308 nanometers disposed between the mating surfaces of the first and second prisms, said mating surfaces and said thin film optical coating forming a physical bond therebetween without the use of a cement or an intervening fluid.

Claim 29

An attenuator as in claim 21 wherein said thin film optical coating is an optical stack comprised of a plurality of periods, each period consisting of a layer of high refractive index material having an optical thickness of 1/4 of the design wavelength and a layer of low refractive index material having an optical thickness of 1/4 of the design wavelength.

Claim 30

An attenuator as in claim 22 wherein said stack includes an additional 1/4 wavelength layer of high refractive index material so that there is provided a layer of high refractive index material on each end of the stack to provide matching layers to match the low indices of the material of first and second prisms.

Claim 31

An attenuator as in claim 23 wherein said thin film optical coating includes an overcoat disposed over the additional one quarter wavelength layer of high refractive index material.

Claim 32

An attenuator as in claim 24 wherein said overcoat is comprised of layer of a low refractive index material having a thickness of approximately one wavelength at the design wavelength.

Claim 33

An attenuator as in claim 22 in which the thin film optical coating has the stack (HL) 6 HL 4 .