US5338630A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photolithography control system and method using latent image measurements
Assignee: National Semiconductor Corp
•
Filing: 1993-11-18
•
Granted: 1994-08-16
•
Expires: 2013-11-18
Abstract
Abstract A method of and apparatus for processing semiconductor wafers which include observing optical characteristics of exposed undeveloped photoresist, without removing the wafers from the stepper is disclosed. The present invention includes the steps of loading a wafer having a layer of photoresist into a photolithography system, exposing the photoresist in accordance with an initial set of control parameters including exposure time, position of the wafer within the photolithography system, and/or focus change. Prior to developing the photoresist, optical characteristics of the exposed photoresist are observed using a phase contrast microscope which detects latent images. Then, according to the observations of the latent image, the initial set of control parameters are adjusted to generate a second set of control parameters.
Inventors
- 👤 Euisik Yoon
- 👤 Robert W. Allison, Jr.
- 👤 Ronald P. Kovacs
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:46
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70591; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/308; G01R31/311; G03F7/20; G03F7/70605; G03F7/70616; G03F7/70641; G03F7/70653; G03F7/70675; G03F9/00; H; H10; H10P; H10P72/00; H10P72/50; H10P72/57; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/949
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
101 words
A photolithography system for processing at least one semiconductor wafer having a photoresist layer thereon, said system having a set of control parameters, said system comprising: positioning means for positioning said wafers within said system; exposing means for exposing said photoresist to light and printing at least one mask pattern on said photoresist; a phase contrast microscope positioned to measure linewidth characteristics of latent images of said at least one mask pattern on said photoresist of said wafer prior to developing said photoresist; and adjustment means for adjusting said control parameters according to said measured linewidth characteristics of said latent images.
Claim 2
Dependent Claim
101 words
A photolithography system for processing at least one semiconductor wafer having a photoresist layer thereon, said system having a set of control parameters, said system comprising: positioning means for positioning said wafers within said system; exposing means for exposing said photoresist to light and printing at least one mask pattern on said photoresist; a phase contrast microscope positioned to measure linewidth characteristics of latent images of said at least one mask pattern on said photoresist of said wafer prior to developing said photoresist; and adjustment means for adjusting said control parameters according to said measured linewidth characteristics of said latent images.
Claim 3
Dependent Claim
16 words
A system as recited in claim 1 further comprising development means for developing said photoresist layer.
Claim 4
Dependent Claim
26 words
A system as recited in claim 1 wherein said initial set of control parameters includes exposure time and wherein said adjusting means changes said exposure time.
Claim 5
Dependent Claim
35 words
A system as recited in claim 1 wherein said initial set of control parameters includes the position of said wafer within said photolithography system and wherein said adjusting means changes said position of said wafer.
Claim 6
Dependent Claim
33 words
A method as recited in claim 1 wherein said initial set of control parameters includes the defocus of said photolithography system and wherein said adjusting means changes said defocus of said photolithography system.
Claim 7
Dependent Claim
35 words
A method as recited in claim 1 wherein said initial set of control parameters includes the numerical aperture of said photolithography system and wherein said adjusting means changes said numerical aperture of said photolithography system.
Claim 8
Dependent Claim
35 words
A method as recited in claim 1 wherein said initial set of control parameters includes the illumination coherence of said photolithography system and wherein said adjusting means changes said illumination coherence of said photolithography system.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-15 | 1998-02-14 | 1998-08-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-15 | 2002-02-14 | 2002-08-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-15 | 2006-02-14 | 2006-08-16 | $7700.00 | Window Closed / Lapsed |