US5336324A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for depositing a coating on a substrate
Assignee: Veeco Instruments Inc
•
Filing: 1991-12-04
•
Granted: 1994-08-09
•
Expires: 2011-12-04
Abstract
Abstract An apparatus for depositing a coating on a substrate substantially eliminates the occurrence of oval defects by creating a heated tortuous path through which the source material vapors must travel before depositing on the substrate. In addition, shut-off valves for each of the source materials are positioned in the reaction chamber in close proximity to the substrate, thereby enabling layers of different compositions to be deposited with sharp transitions between adjacent layers. The apparatus may be used to efficiently coat large areas uniformly, and works equally well with either elemental or chemical source materials, or certain combinations of both. The features of the coating apparatus may be embodied in replacement source cells for retrofitting in conventional molecular beam and chemical beam epitaxy units.
Inventors
- 👤 Richard A. Stall
- 👤 Gary S. Tompa
- 👤 Alexander Gurary
- 👤 Craig R. Nelson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:33
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45512; C23C14/00; C23C14/22; C23C14/24; C23C14/243; C23C16/45502; C23C16/4551; C23C16/45587; C23C16/45591; C30; C30B; C30B25/00; C30B25/02; C30B25/14
Claims Analysis
Total Claims: 70
Claim 1
Independent Claim
84 words
A vapor supply device for use in a coating deposition apparatus having a chamber, comprising at least one inlet for a vapor, restriction means in said at least one inlet for supplying said vapor from said inlet under molecular flow conditions, an outlet for said vapor, means for defining a tortuous path between said at least one vapor inlet and said vapor outlet, heating means for heating said tortuous path, and mounting means for mounting said device at a preselected position in said chamber.
Claim 2
Dependent Claim
84 words
A vapor supply device for use in a coating deposition apparatus having a chamber, comprising at least one inlet for a vapor, restriction means in said at least one inlet for supplying said vapor from said inlet under molecular flow conditions, an outlet for said vapor, means for defining a tortuous path between said at least one vapor inlet and said vapor outlet, heating means for heating said tortuous path, and mounting means for mounting said device at a preselected position in said chamber.
Claim 3
Dependent Claim
63 words
The device as claimed in claim 1 wherein said means for defining said tortuous path comprises a plurality of superposed members spaced apart from one another, each of said members having a plurality of apertures arranged in a predetermined pattern, said apertures in at least one of said members being out of alignment with said apertures in an adjacent one of said members.
Claim 4
Dependent Claim
29 words
The device as claimed in claim 2 wherein said apertures in each one of said members are out of alignment with said apertures in adjacent ones of said members.
Claim 5
Dependent Claim
19 words
The device as claimed in claim 2 wherein one of said plurality of superposed members defines said vapor outlet.
Claim 6
Dependent Claim
73 words
The device as claimed in claim 1 further comprising a body defining a cavity, said at least one vapor inlet including a first inlet extending through said body and communicating with said cavity for supplying said vapor to said cavity, said vapor outlet communicating with said cavity for enabling said vapor to exit said cavity, and valve means disposed within said body for controlling the flow of said vapor through said first inlet.
Claim 7
Dependent Claim
63 words
The device as claimed in claim 5 wherein said valve means comprises a valve element moveable with respect to said body between a first position in which said valve element occludes said first inlet and a second position in which said valve element does not occlude said first inlet, said valve element variably occluding said first inlet between said first and second positions.
Claim 8
Dependent Claim
78 words
The device as claimed in claim 5 further comprising a first exhaust outlet extending through said body between said cavity and said chamber, wherein said valve means comprises a valve element moveable with respect to said body between a run position and a vent position, said valve element in said run position directing said vapor through said first inlet into said cavity, and said valve element in said vent position directing said vapor through said first exhaust outlet.
Claim 9
Dependent Claim
46 words
The device as claimed in claim 7 further comprising an inlet for a carrier gas, wherein said valve element is moveable with respect to said body to a purge position for terminating the flow of said vapor and for directing said carrier gas toward said cavity.
Claim 10
Dependent Claim
19 words
The device as claimed in claim 5 wherein said heating means comprises a heating element disposed in said cavity.
Claim 11
Dependent Claim
52 words
The device as claimed in claim 5 wherein said body is formed from a first material having a coefficient of thermal expansion and said valve means is formed from a second material having a coefficient of thermal expansion which is substantially similar to the coefficient of thermal expansion of said first material.
Claim 12
Dependent Claim
42 words
The device as claimed in claim 5 wherein said body and said valve means are formed from a first material and one of said body and said valve means includes a surface coating of a second material different from said first material.
Claim 13
Dependent Claim
95 words
The device as claimed in claim 5 wherein said at least one inlet comprises a plurality of inlets extending through said body and communicating with said cavity for supplying a plurality of vapors to said cavity, at least one of said plurality of inlets including restriction means for supplying at least one of said plurality of vapors from said at least one inlet under molecular flow conditions, and wherein said device further comprises valve means disposed within said body for controlling the flow of each of said plurality of vapors through said plurality of inlets.
Claim 14
Dependent Claim
85 words
The device as claimed in claim 12 wherein said valve means comprises a valve element disposed in each of said plurality of inlets, each said valve element being moveable with respect to said body between a first position in which said valve element occludes a corresponding one of said inlets and a second position in which said valve element does not occlude said corresponding one of said inlets, said valve element variably occluding said corresponding one of said inlets between said first and second positions.
Claim 15
Dependent Claim
196 words
The device as claimed in claim 5 wherein said at least one vapor inlet comprises a plurality of inlets extending through said body and communicating with said cavity for supplying a plurality of vapors to said cavity, at least one of said plurality of inlets including restriction means for supplying at least one of said plurality of vapors from said at least one inlet under molecular flow conditions, and wherein said device further comprises a plurality of exhaust outlets extending through said body between said cavity and said chamber, and valve means disposed within said body for controlling the flow of each of said plurality of vapors through said plurality of inlets, said valve means comprising a valve element disposed in each of said plurality of inlets, each said valve element being moveable with respect to said body between a run position and a vent position, each said valve element in said run position directing one of said plurality of vapors through a corresponding one of said inlets into said cavity and each said valve element in said vent position directing said one of said plurality of vapors through a corresponding one of said exhaust outlets.
Claim 16
Dependent Claim
55 words
The device as claimed in claim 14 further comprising a plurality of inlets for a carrier gas, wherein each said valve element is moveable with respect to said body to a purge position for terminating the flow of said corresponding one of said plurality of vapors and for directing said carrier gas toward said cavity.
Claim 17
Dependent Claim
63 words
The device as claimed in claim 12 wherein said means for defining a tortuous path comprises a plurality of superposed members spaced apart from one another, each of said members having a plurality of apertures arranged in a predetermined pattern, said apertures in at least one of said members being out of alignment with said apertures in an adjacent one of said members.
Claim 18
Dependent Claim
29 words
The device as claimed in claim 16 wherein said apertures in each one of said members are out of alignment with said apertures in adjacent ones of said members.
Claim 19
Dependent Claim
19 words
The device as claimed in claim 16 wherein one of said plurality of superposed members defines said vapor outlet.
Claim 20
Dependent Claim
140 words
The device as claimed in claim 5 wherein said vapor outlet comprises a planar member having a plurality of apertures disposed in a predetermined arrangement, said device further comprising a valve member rotatably connected in surface contact with said planar member, said valve member having a plurality of apertures disposed in said predetermined arrangement and being moveable with respect to said planar member between a closed position in which said plurality of apertures in said valve member are located between said plurality of apertures in said planar member to occlude said vapor outlet and an open position in which said plurality of apertures in said valve member are located in alignment with said plurality of apertures in said planar member to not occlude said vapor outlet, said valve member variably occluding said vapor outlet between said closed and open positions.
Claim 21
Dependent Claim
77 words
The device as claimed in claim 5 wherein said means for defining a tortuous path comprises a plurality of superposed members spaced apart from one another, each of said members having a plurality of apertures arranged in a predetermined pattern, said apertures in at least one of said members being out of alignment with said apertures in an adjacent one of said members, and an outermost one of said members defining a shell extending around said body.
Claim 22
Dependent Claim
78 words
The device as claimed in claim 20 wherein said valve means comprises a valve element moveable with respect to said body between a first position in which said valve element occludes said first inlet and a second position in which said valve element does not occlude said first inlet, said valve element variably occluding said first inlet between said first and second positions, and a shaft extending from said valve element for supporting said body and said shell.
Claim 23
Dependent Claim
44 words
The device as claimed in claim 20 wherein said plurality of members define a plurality of concentric cylinders extending around said body, wherein an outermost one of said concentric cylinders holds said body, said valve means and said plurality of members in assembled position.
Claim 24
Dependent Claim
77 words
The device as claimed in claim 1 further comprising exhaust outlet means defining a vapor flow path leading in a direction away from said vapor outlet, and valve means disposed within said body and moveable between a run position and a vent position, said valve means in said run position directing said vapor toward said tortuous path and said vapor outlet, and said valve means in said vent position directing said vapor toward said exhaust outlet means.
Claim 25
Dependent Claim
63 words
The device as claimed in claim 23 wherein said means for defining a tortuous path comprises a plurality of superposed members spaced apart from one another, each of said members having a plurality of apertures arranged in a predetermined pattern, said apertures in at least one of said members being out of alignment with said apertures in an adjacent one of said members.
Claim 26
Dependent Claim
44 words
The device as claimed in claim 23 further comprising a carrier gas inlet, wherein said valve means is moveable to a purge position for terminating the flow of said vapor and for directing said carrier gas toward said tortuous path and said vapor outlet.
Claim 27
Dependent Claim
48 words
The device as claimed in claim 23, further comprising receptacle means within said chamber for containing a source material, vaporizing means for creating said vapor from said source material, and means defining a passage for conducting said vapor from said receptacle means to said at least one inlet.
Claim 28
Dependent Claim
44 words
The device as claimed in claim 26, further comprising a carrier gas inlet, wherein said valve means is moveable to a purge position for terminating the flow of said vapor and for directing said carrier gas to said tortuous path and said vapor outlet.
Claim 29
Dependent Claim
63 words
The device as claimed in claim 27 wherein said means for defining a tortuous path comprises a plurality of superposed members spaced apart from one another, each of said members having a plurality of apertures arranged in a predetermined pattern, said apertures in at least one of said members being out of alignment with said apertures in an adjacent one of said members.
Claim 30
Dependent Claim
29 words
The device as claimed in claim 28 wherein said apertures in each one of said members are out of alignment with said apertures in adjacent ones of said members.
Claim 31
Dependent Claim
19 words
The device as claimed in claim 28 wherein one of said plurality of superposed members defines said vapor outlet.
Claim 32
Dependent Claim
53 words
The device as claimed in claim 23 wherein said valve means comprises valve seat means defining said run position and said vent position, a valve element rotatably mounted with respect to said valve seat means, and a hollow shaft connected for rotation with said valve element and defining said at least one inlet.
Claim 33
Dependent Claim
120 words
A vapor supply device for use in a coating deposition apparatus having a chamber, comprising a body defining a cavity, at least one inlet for a vapor extending through said body and communicating with said cavity for supplying said vapor to said cavity, restriction means in said at least one inlet for supplying said vapor to said cavity under molecular flow conditions, an outlet for said vapor communicating with said cavity for enabling said vapor to exit said cavity, valve means disposed within said body for controlling the flow of said vapor through said at least one vapor inlet, and means for mounting said body within said chamber so that said valve means is adjacent a substrate to be coated.
Claim 34
Dependent Claim
120 words
A vapor supply device for use in a coating deposition apparatus having a chamber, comprising a body defining a cavity, at least one inlet for a vapor extending through said body and communicating with said cavity for supplying said vapor to said cavity, restriction means in said at least one inlet for supplying said vapor to said cavity under molecular flow conditions, an outlet for said vapor communicating with said cavity for enabling said vapor to exit said cavity, valve means disposed within said body for controlling the flow of said vapor through said at least one vapor inlet, and means for mounting said body within said chamber so that said valve means is adjacent a substrate to be coated.
Claim 35
Dependent Claim
63 words
The device as claimed in claim 32 wherein said valve means comprises a valve element moveable with respect to said body between a first position in which said valve element occludes said first inlet and a second position in which said valve element does not occlude said first inlet, said valve element variably occluding said first inlet between said first and second positions.
Claim 36
Dependent Claim
52 words
The device as claimed in claim 32 wherein said body is formed from a first material having a coefficient of thermal expansion and said valve means is formed from a second material having a coefficient of thermal expansion which is substantially similar to the coefficient of thermal expansion of said first material.
Claim 37
Dependent Claim
42 words
The device as claimed in claim 32 wherein said body and said valve means are formed from a first material and one of said body and said valve means includes a surface coating of a second material different from said first material.
Claim 38
Dependent Claim
140 words
The device as claimed in claim 32 wherein said vapor outlet comprises a planar member having a plurality of apertures disposed in a predetermined arrangement, said device further comprising a valve member rotatably connected in surface contact with said planar member, said valve member having a plurality of apertures disposed in said predetermined arrangement, and being moveable with respect to said planar member between a closed position in which said plurality of apertures in said valve member are located between said plurality of apertures in said planar member to occlude said vapor outlet and an open position in which said plurality of apertures in said valve member are located in alignment with said plurality of apertures in said planar member to not occlude said vapor outlet, said valve member variably occluding said vapor outlet between said closed and open positions.
Claim 39
Dependent Claim
73 words
The device as claimed in claim 32 further comprising exhaust outlet means defining a vapor flow path leading in a direction away from said vapor outlet, and valve means disposed in said body and moveable between a run position and a vent position, said valve means in said run position directing said vapor toward said vapor outlet, and said valve means in said vent position directing said vapor toward said exhaust outlet means.
Claim 40
Dependent Claim
40 words
The device as claimed in claim 37 further comprising a carrier gas inlet, wherein said valve means is moveable to a purge position for terminating the flow of said vapor and for directing said carrier gas toward said vapor outlet.
Claim 41
Dependent Claim
48 words
The device as claimed in claim 37, further comprising receptacle means within said chamber for containing a source material, vaporizing means for creating said vapor from said source material, and means defining a passage for conducting said vapor from said receptacle means to said at least one inlet.
Claim 42
Dependent Claim
40 words
The device as claimed in claim 39 further comprising a carrier gas inlet, wherein said valve means is moveable to a purge position for terminating the flow of said vapor and for directing said carrier gas toward said vapor outlet.
Claim 43
Dependent Claim
53 words
The device as claimed in claim 37 wherein said valve means comprises valve seat means defining said run position and said vent position, a valve element rotatably mounted with respect to said valve seat means, and a hollow shaft connected for rotation with said valve element and defining said at least one inlet.
Claim 44
Dependent Claim
74 words
An apparatus for depositing a coating on a substrate, comprising a housing, exhaust means for evacuating said housing, substrate support means arranged within said housing for supporting said substrate at a predetermined position, a vapor supply device as claimed in claim 32, and vapor supply means for supplying said vapor to said at least one vapor inlet, wherein said body is mounted so that said outlet and said valve means lie adjacent said substrate.
Claim 45
Independent Claim
111 words
An apparatus for depositing a coating on a substrate, comprising a housing, exhaust means for evacuating said housing, substrate support means arranged within said housing for supporting said substrate at a predetermined position, at least one inlet for a vapor, vapor supply means for supplying said vapor to said at least one vapor inlet, restriction means in said at least one vapor inlet for supplying said vapor from said inlet under molecular flow conditions, an outlet for said vapor within said housing and adjacent said substrate, means for defining a tortuous path between said at least one vapor inlet and said vapor outlet, and heating means for heating said tortuous path.
Claim 46
Independent Claim
111 words
An apparatus for depositing a coating on a substrate, comprising a housing, exhaust means for evacuating said housing, substrate support means arranged within said housing for supporting said substrate at a predetermined position, at least one inlet for a vapor, vapor supply means for supplying said vapor to said at least one vapor inlet, restriction means in said at least one vapor inlet for supplying said vapor from said inlet under molecular flow conditions, an outlet for said vapor within said housing and adjacent said substrate, means for defining a tortuous path between said at least one vapor inlet and said vapor outlet, and heating means for heating said tortuous path.
Claim 47
Dependent Claim
140 words
The device as claimed in claim 43 wherein said vapor outlet comprises a planar member having a plurality of apertures disposed in a predetermined arrangement, said device further comprising a valve member rotatably connected in surface contact with said planar member, said valve member having a plurality of apertures disposed in said predetermined arrangement and being moveable with respect to said planar member between a closed position in which said plurality of apertures in said valve member are located between said plurality of apertures in said planar member to occlude said vapor outlet and an open position in which said plurality of apertures in said valve member are located in alignment with said plurality of apertures in said planar member to not occlude said vapor outlet, said valve member variably occluding said vapor outlet between said closed and open positions.
Claim 48
Dependent Claim
63 words
The apparatus as claimed in claim 43 wherein said means for defining said tortuous path comprises a plurality of superposed members spaced apart from one another, each of said members having a plurality of apertures arranged in a predetermined pattern, said apertures in at least one of said members being out of alignment with said apertures in an adjacent one of said members.
Claim 49
Dependent Claim
29 words
The device as claimed in claim 45 wherein said apertures in each one of said members are out of alignment with said apertures in adjacent ones of said members.
Claim 50
Dependent Claim
19 words
The apparatus as claimed in claim 45 wherein one of said plurality of superposed members defines said vapor outlet.
Claim 51
Dependent Claim
29 words
The apparatus as claimed in claim 43 further comprising valve means disposed within said housing for controlling the flow of said vapor through said at least one vapor inlet.
Claim 52
Dependent Claim
70 words
The apparatus as claimed in claim 43 further comprising a body disposed within said housing at a spaced distance from said predetermined position, said body defining a cavity, said at least one vapor inlet including a first inlet extending through said body and communicating with said cavity for supplying said vapor to said cavity, and said vapor outlet communicating with said cavity for enabling said vapor to exit said cavity.
Claim 53
Dependent Claim
19 words
The apparatus as claimed in claim 49 wherein said heating means comprises a heating element disposed in said cavity.
Claim 54
Dependent Claim
26 words
The apparatus as claimed in claim 49 further comprising valve means disposed within said body for controlling the flow of said vapor through said first inlet.
Claim 55
Dependent Claim
63 words
The apparatus as claimed in claim 51 wherein said valve means comprises a valve element moveable with respect to said body between a first position in which said valve element occludes said first inlet and a second position in which said valve element does not occlude said first inlet, said valve element variably occluding said first inlet between said first and second positions.
Claim 56
Dependent Claim
90 words
The apparatus as claimed in claim 49 wherein said at least one inlet comprises a plurality of inlets extending through said body and communicating with said cavity for supplying a plurality of vapors to said cavity, at least one of said plurality of inlets including restriction means for supplying at least one of said vapors to said cavity under molecular flow conditions, and wherein said apparatus further comprises valve means disposed within said body for controlling the flow of each of said plurality of vapors through said plurality of inlets.
Claim 57
Dependent Claim
85 words
The apparatus as claimed in claim 53 wherein said valve means comprises a valve element disposed in each of said plurality of inlets, each said valve element being moveable with respect to said body between a first position in which said valve element occludes a corresponding one of said inlets and a second position in which said valve element does not occlude said corresponding one of said inlets, said valve element variably occluding said corresponding one of said inlets between said first and second positions.
Claim 58
Dependent Claim
63 words
The apparatus as claimed in claim 53 wherein said means for defining a tortuous path comprises a plurality of superposed members spaced apart from one another, each of said members having a plurality of apertures arranged in a predetermined pattern, said apertures in at least one of said members being out of alignment with said apertures in an adjacent one of said members.
Claim 59
Dependent Claim
29 words
The apparatus as claimed in claim 55 wherein said apertures in each one of said members are out of alignment with said apertures in adjacent ones of said members.
Claim 60
Dependent Claim
19 words
The apparatus as claimed in claim 55 wherein one of said plurality of superposed members defines said vapor outlet.
Claim 61
Dependent Claim
61 words
The apparatus as claimed in claim 43, further comprising valve means disposed in said at least one inlet and moveable between a run position and a vent position, said valve means in said run position directing said vapor toward said tortuous path and said vapor outlet, and said valve means in said vent position directing said vapor toward said exhaust means.
Claim 62
Dependent Claim
63 words
The apparatus as claimed in claim 58 wherein said means for defining said tortuous path comprises a plurality of superposed members spaced apart from one another, each of said members having a plurality of apertures arranged in a predetermined pattern, said apertures in at least one of said members being out of alignment with said apertures in an adjacent one of said members.
Claim 63
Dependent Claim
44 words
The apparatus as claimed in claim 58 further comprising a carrier gas inlet, wherein said valve means is moveable to a purge position for terminating the flow of said vapor and for directing said carrier gas toward said tortuous path and said vapor outlet.
Claim 64
Dependent Claim
55 words
The apparatus as claimed in claim 43 wherein said vapor supply means comprises receptacle means for holding a source material, vaporizing means for creating said vapor from a source material disposed in said receptacle means, and means defining a passage for conducting said vapor from said receptacle means to said at least one vapor inlet.
Claim 65
Dependent Claim
16 words
The apparatus as claimed in claim 61 wherein said receptacle means is disposed within said housing.
Claim 66
Dependent Claim
38 words
The apparatus as claimed in claim 62 further comprising flow control means disposed between said receptacle means and said at least one vapor inlet for controlling the flow of said vapor to said at least one vapor inlet.
Claim 67
Dependent Claim
17 words
The apparatus as claimed in claim 61 wherein said receptacle means is disposed exterior of said housing.
Claim 68
Dependent Claim
38 words
The apparatus as claimed in claim 64 further comprising flow control means disposed between said receptacle means and said at least one vapor inlet for controlling the flow of said vapor to said at least one vapor inlet.
Claim 69
Dependent Claim
42 words
The apparatus as claimed in claim 64 further comprising vapor heating means associated with said means defining a passage for maintaining a portion of said source material in a vaporized state between said receptacle means and said at least one vapor inlet.
Claim 70
Dependent Claim
53 words
The apparatus as claimed in claim 58 wherein said valve means comprises valve seat means defining said run position and said vent position, a valve element rotatably mounted with respect to said valve seat means, and a hollow shaft connected for rotation with said valve element and defining said at least one inlet.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-08 | 1998-02-07 | 1998-08-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-08 | 2002-02-07 | 2002-08-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-08 | 2006-02-07 | 2006-08-09 | $7700.00 | Window Closed / Lapsed |