Patent US4167597A successfully refreshed from Google Patents.
← Back to Patent Explorer
US5334237A Expired / Lapsed US ⏱️ 0.0 years remaining

Method and apparatus for predicting end-of-life of a consumable in a fluid purification system

Assignee: Entegris GP Inc
•
Filing: 1993-02-26
•
Granted: 1994-08-02
•
Expires: 2013-02-26
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract A method for predicting end-of-life of a system consumable in a fluid purification system characterized by the steps of (a) coupling a model consumable to the fluid purification system which has comparable characteristics but substantially less time capacity than the system consumable; (b) diverting a portion of an unpurified fluid which could otherwise flow into the system consumable into the model consumable; and (c) analyzing the model consumable to predict the end-of-life of the system consumable. Preferably, the time capacity of the model consumable to remove impurities from the fluid is a small fraction, e.g. 25%-50%, of the capacity of the system consumable. A fluid purification system of the present invention is characterized by an inlet, an outlet, a system consumable coupled between the inlet and the outlet, a model consumable having comparable characteristics but substantially less time capacity than the system consumable, and a diverting mechanism coupled between the inlet and the model consumable for diverting a portion of an unpurified fluid to model consumable. The diverting mechanism preferably includes a mass flow meter (MFM) coupled in-line with the system consumable which is coupled to and controls a mass flow controller (MFC) which is coupled in-line with the model consumable. The model consumable is analyzed to predict the end-of-life of the system consumable.

Inventors

  • 👤 D'Arcy H. Lorimer

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 16:55
CPC Classifications
G; G01; G01N; G01N33/00; B; B01; B01D; B01D53/00; B01D53/30; B01D53/02; B01D53/04; B01D53/0454

Claims Analysis

Total Claims: 40
Claim 1
Independent Claim 97 words
A method for predicting the end-of-life of a system consumable in a system for purifying an unpurified fluid, the method comprising the steps of: coupling a model consumable to a fluid purification system which has comparable characteristics but substantially less capacity than a system consumable in said fluid purification system; diverting a portion of the unpurified fluid which could otherwise flow into said system consumable into said model consumable, the mass flow rate of the diverted portion being controlled by a mass flow controller; and analyzing said model consumable to predict the end-of-life of said system consumable.
Claim 2
Independent Claim 97 words
A method for predicting the end-of-life of a system consumable in a system for purifying an unpurified fluid, the method comprising the steps of: coupling a model consumable to a fluid purification system which has comparable characteristics but substantially less capacity than a system consumable in said fluid purification system; diverting a portion of the unpurified fluid which could otherwise flow into said system consumable into said model consumable, the mass flow rate of the diverted portion being controlled by a mass flow controller; and analyzing said model consumable to predict the end-of-life of said system consumable.
Claim 3
Dependent Claim 41 words
A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 1 wherein said fluid purification system comprises a gas purification system, and wherein said system consumable and said model consumable comprise getter material.
Claim 4
Dependent Claim 55 words
A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 1 wherein said step of diverting a portion of an unpurified fluid comprises diverting a portion of unpurified fluid into said model consumable which is quantitatively related to the flow of unpurified fluid into said system consumable.
Claim 5
Dependent Claim 42 words
A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 1 wherein said step of analyzing said model consumable comprises removing said model consumable from said fluid purification system and analyzing said model consumable.
Claim 6
Dependent Claim 31 words
A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 4 further comprising replacing said removed model consumable with a replacement model consumable.
Claim 7
Dependent Claim 31 words
A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 4 wherein said removed model consumable is analyzed by a destructive chemical analysis.
Claim 8
Dependent Claim 38 words
A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 1 wherein said step of analyzing said model consumable comprises monitoring the resistance of consumable material within said model consumable.
Claim 9
Dependent Claim 36 words
A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 1 wherein said step of analyzing said model consumable comprises monitoring fluid flowing out of said model consumable.
Claim 10
Independent Claim 118 words
A method for predicting the end-of-life of a system consumable held in a system column of a system for purifying an unpurified fluid, the method comprising the steps of: coupling a model consumable in a model column to a fluid purification system, the model consumable having comparable characteristics but substantially less capacity than a system consumable in said fluid purification system, the model column having substantially the same geometry as the system column and having a diameter and length scaled with those of the system column; diverting a portion of the unpurified fluid which could otherwise flow into said system consumable into said model consumable; and analyzing said model consumable to predict the end-of-life of said system consumable.
Claim 11
Independent Claim 118 words
A method for predicting the end-of-life of a system consumable held in a system column of a system for purifying an unpurified fluid, the method comprising the steps of: coupling a model consumable in a model column to a fluid purification system, the model consumable having comparable characteristics but substantially less capacity than a system consumable in said fluid purification system, the model column having substantially the same geometry as the system column and having a diameter and length scaled with those of the system column; diverting a portion of the unpurified fluid which could otherwise flow into said system consumable into said model consumable; and analyzing said model consumable to predict the end-of-life of said system consumable.
Claim 12
Dependent Claim 36 words
A method for predicting end-of-life of a system consumable as recited in claim 9 wherein said fluid purification system comprises a gas purification system, and wherein said system consumable and said model consumable comprise getter material.
Claim 13
Dependent Claim 37 words
A method for predicting end-of-life of a system consumable as recited in claim 9 wherein said step of analyzing said model consumable comprises removing said model consumable from said fluid purification system and analyzing said model consumable.
Claim 14
Dependent Claim 33 words
A method for predicting end-of-life of a system consumable as recited in claim 9 wherein said step of analyzing said model consumable comprises monitoring the resistance of consumable material within said model consumable.
Claim 15
Dependent Claim 31 words
A method for predicting end-of-life of a system consumable as recited in claim 9 wherein said step of analyzing said model consumable comprises monitoring fluid flowing out of said model consumable.
Claim 16
Independent Claim 221 words
A method for monitoring a getter purification system comprising the steps of: coupling an inlet of a system getter column to a source of unpurified gas, said system getter column containing a first quantity of getter material; coupling an inlet of a model getter column to said source of unpurified gas in parallel with said system getter column, said model getter column containing a second quantity of getter material which is substantially less in quantity than said first quantity of getter material within said system getter column; heating said first quantity of getter material within said system getter column with a first heater to a system getter operating temperature which is substantially greater than room temperature; heating said second quantity of getter material within said model getter column with a second heater to a model getter operating temperature which is substantially greater than room temperature; flowing unpurified gas into said system getter column having said heated first quantity of getter material and into said model getter column having said heated second quantity of getter material such that substantially more unpurified gas flows into said system getter column than said model getter column; and analyzing said second quantity of getter material within said model getter column to predict an end-of-life of said first quantity of getter material with said system getter column.
Claim 17
Independent Claim 221 words
A method for monitoring a getter purification system comprising the steps of: coupling an inlet of a system getter column to a source of unpurified gas, said system getter column containing a first quantity of getter material; coupling an inlet of a model getter column to said source of unpurified gas in parallel with said system getter column, said model getter column containing a second quantity of getter material which is substantially less in quantity than said first quantity of getter material within said system getter column; heating said first quantity of getter material within said system getter column with a first heater to a system getter operating temperature which is substantially greater than room temperature; heating said second quantity of getter material within said model getter column with a second heater to a model getter operating temperature which is substantially greater than room temperature; flowing unpurified gas into said system getter column having said heated first quantity of getter material and into said model getter column having said heated second quantity of getter material such that substantially more unpurified gas flows into said system getter column than said model getter column; and analyzing said second quantity of getter material within said model getter column to predict an end-of-life of said first quantity of getter material with said system getter column.
Claim 18
Dependent Claim 47 words
A method for monitoring a getter purification system as recited in claim 14 wherein said step of flowing unpurified gas includes a step of passing the gas through a mass flow controller coupled between said inlet of the system getter column to said source of unpurified gas.
Claim 19
Dependent Claim 47 words
A method for monitoring a getter purification system as recited in claim 14 wherein said step of flowing unpurified gas includes a step of passing the gas through a mass flow controller coupled between said inlet of the model getter column to said source of unpurified gas.
Claim 20
Dependent Claim 115 words
A fluid purification system comprising: an inlet adapted to be coupled to a source of unpurified fluid; an outlet; a system consumable coupled between said inlet and said outlet such that unpurified fluid flowing through said system consumable is purified by said system consumable; a model consumable having comparable characteristics but substantially less capacity than said system consumable; and diverting means coupled between said inlet and said model consumable for diverting a portion of said unpurified fluid which could otherwise flow through said system consumable into said model consumable, wherein said means for diverting a portion of said unpurified fluid further comprises a mass flow controller (MFC) coupled between said inlet and said model consumable.
Claim 21
Dependent Claim 115 words
A fluid purification system comprising: an inlet adapted to be coupled to a source of unpurified fluid; an outlet; a system consumable coupled between said inlet and said outlet such that unpurified fluid flowing through said system consumable is purified by said system consumable; a model consumable having comparable characteristics but substantially less capacity than said system consumable; and diverting means coupled between said inlet and said model consumable for diverting a portion of said unpurified fluid which could otherwise flow through said system consumable into said model consumable, wherein said means for diverting a portion of said unpurified fluid further comprises a mass flow controller (MFC) coupled between said inlet and said model consumable.
Claim 22
Dependent Claim 35 words
A fluid purification system as recited in claim 17 wherein said means for diverting a portion of said unpurified fluid further comprises a mass flow meter (MFM) coupled between said inlet and said system consumable.
Claim 23
Dependent Claim 44 words
A fluid purification system as recited in claim 18 wherein said MFM is coupled to said MFC such that the rate of flow of unpurified fluid into said model consumable is controlled by the rate of flow of unpurified fluid into said system consumable.
Claim 24
Dependent Claim 23 words
A fluid purification system as recited in claim 19 wherein said MFM is coupled to said MFC by an apparatus employing digital logic.
Claim 25
Dependent Claim 23 words
A fluid purification system as recited in claim 17 further comprising coupling means for releasably coupling said model consumable to said diverting means.
Claim 26
Dependent Claim 32 words
A fluid purification system as recited in claim 17 further comprising fluid analysis means coupled to an outlet of said model consumable for detecting impurity levels in fluids exiting said model consumable.
Claim 27
Dependent Claim 30 words
A fluid purification system as recited in claim 17 further comprising end-of-life detection means adapted to measure the resistance of said model consumable, wherein said model consumable comprises getter material.
Claim 28
Dependent Claim 43 words
A fluid purification system as recited in claim 17 wherein said model consumable has a time capacity to remove impurities from said fluid which is less than or equal to about 50% of the time capacity to remove impurities of said system consumable.
Claim 29
Dependent Claim 43 words
A fluid purification system as recited in claim 24 wherein said model consumable has a time capacity to remove impurities from said fluid which is less than or equal to about 25% of the time capacity to remove impurities of said system consumable.
Claim 30
Dependent Claim 124 words
A fluid purification system comprising: an inlet adapted to be coupled to a source of unpurified fluid; an outlet; a system consumable held in a system column coupled between said inlet and said outlet such that unpurified fluid flowing through said system consumable is purified by said system consumable; a model consumable held in a model column having substantially the same geometry as the system column and having a length and diameter scaled with those of the system column, the model consumable having comparable characteristics but substantially less capacity than said system consumable; and diverting means coupled between said inlet and said model consumable for diverting a portion of said unpurified fluid which could otherwise flow through said system consumable into said model consumable.
Claim 31
Dependent Claim 124 words
A fluid purification system comprising: an inlet adapted to be coupled to a source of unpurified fluid; an outlet; a system consumable held in a system column coupled between said inlet and said outlet such that unpurified fluid flowing through said system consumable is purified by said system consumable; a model consumable held in a model column having substantially the same geometry as the system column and having a length and diameter scaled with those of the system column, the model consumable having comparable characteristics but substantially less capacity than said system consumable; and diverting means coupled between said inlet and said model consumable for diverting a portion of said unpurified fluid which could otherwise flow through said system consumable into said model consumable.
Claim 32
Dependent Claim 30 words
A fluid purification system as recited in claim 26 wherein said system consumable and said model consumable comprise getter material, and wherein said unpurified fluid comprises a mixture of gasses.
Claim 33
Dependent Claim 26 words
A fluid purification system as recited in claim 27 further comprising end-of-life detection means adapted to measure the resistance of getter material within said model consumable.
Claim 34
Dependent Claim 83 words
A fluid purification system as recited in claim 26 wherein said means for diverting a portion of said unpurified fluid further comprises a mass flow controller (MFC) coupled between said inlet and said model consumable, a mass flow meter (MFM) coupled between said inlet and said system consumable, wherein said MFM is coupled to said MFC such that the rate of flow of unpurified fluid into said model consumable is controlled by the rate of flow of unpurified fluid into said system consumable.
Claim 35
Dependent Claim 176 words
A getter purification system comprising: a system getter column coupled to a source of unpurified gas, said system getter column containing a first quantity of getter material; a model getter column containing a second quantity of getter material which is substantially less in quantity than said first quantity of getter material within said system getter column; coupling means coupling said model getter column to said source of unpurified gas such that substantially less gas flows into said model getter column than said system getter column; a first heater coupled to said system getter column to heat said first quantity of getter material to a system getter operating temperature which is substantially greater than room temperature; a second heater coupled to said model getter column to heat said second quantity of getter material to a model getter operating temperature which is substantially greater than room temperature; analyzing means for analyzing said second quantity of getter material within said model getter column to predict an end-of-life of said first quantity of getter material with said system getter column.
Claim 36
Dependent Claim 176 words
A getter purification system comprising: a system getter column coupled to a source of unpurified gas, said system getter column containing a first quantity of getter material; a model getter column containing a second quantity of getter material which is substantially less in quantity than said first quantity of getter material within said system getter column; coupling means coupling said model getter column to said source of unpurified gas such that substantially less gas flows into said model getter column than said system getter column; a first heater coupled to said system getter column to heat said first quantity of getter material to a system getter operating temperature which is substantially greater than room temperature; a second heater coupled to said model getter column to heat said second quantity of getter material to a model getter operating temperature which is substantially greater than room temperature; analyzing means for analyzing said second quantity of getter material within said model getter column to predict an end-of-life of said first quantity of getter material with said system getter column.
Claim 37
Dependent Claim 30 words
A getter purification system as recited in claim 30 wherein said coupling means comprises a mass flow controller coupled between said source of unpurified gas and said model getter column.
Claim 38
Dependent Claim 30 words
A getter purification system as recited in claims 31 wherein said coupling means comprises a mass flow meter coupled between said source of unpurified gas and said system getter column.
Claim 39
Dependent Claim 27 words
A getter purification system as recited in claim 30 wherein said model getter column has a length and diameter scaled with those of the system getter column.
Claim 40
Dependent Claim 33 words
A getter purification system as recited in claim 30 wherein the operating temperatures of said system and model getter columns are held at about the same value by said first and second heaters.

References Cited (Backward Citations)

US2951156A Cited
US3961920A Cited
US4095965A Cited
US4133651A Cited
US4197098A Cited
DE2718218A1 Cited
DE3817503A1 Cited
EP0438036A2 Cited
US5172066A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-08-01 1998-01-31 1998-08-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-08-01 2002-01-31 2002-08-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-08-01 2006-01-31 2006-08-02 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag