Displacement magnifier for piezoelectric element

Claim 2

A displacement magnifying device for magnifying the displacement of a piezoelectric element according to an applied voltage and transmitting it to a displacement transmitting member, comprising: a supporting member for supporting one end of the piezoelectric element, a first elastic sealing member which moves together with the other end of the piezoelectric element, a second elastic sealing member connected to said displacement transmitting member, and a sealed chamber sealed by said first and second elastic sealing members and containing a non-compressible fluid, said chamber including a first sub-chamber sealed by said first elastic sealing member and a second sub-chamber sealed by said second elastic sealing member, said first and second sub-chambers being communicated with each other and said first sub-chamber having a larger cross-sectional area perpendicular to the direction of said displacement than said second sub-chamber.

Claim 3

A displacement magnifying device as defined in claim 1 wherein said first elastic sealing member is a diaphragm, and said second elastic sealing member is a bellows.

Claim 4

A displacement magnifying device as defined in claim 1 further comprising a member which prevents said supporting member from approaching said displacement transmitting member closer than a predetermined distance.

Claim 5

A displacement magnifying device for magnifying the displacement of a piezoelectric element according to an applied voltage and transmitting it to a displacement transmitting member, comprising: a supporting member for supporting one end of the piezoelectric element, a first elastic sealing member which moves together with the other end of the piezoelectric element, a second elastic sealing member connected to said displacement transmitting member, a wall member facing said first elastic sealing member, a chamber sealed by said first and second elastic sealing members and said wall member and containing a non-compressible fluid, said chamber including a first sub-chamber sealed by said first elastic sealing member and a second sub-chamber sealed by said second elastic sealing member, said first and second sub-chambers being communicated with each other and said first sub-chamber having a larger cross-sectional area perpendicular to the direction of said displacement than said second sub-chamber, and a temperature compensator which varies the distance between said wall member and said supporting member depending on the temperature.

Claim 6

A displacement magnifying device for magnifying the displacement of a piezoelectric element according to an applied voltage and transmitting it to a displacement transmitting member, comprising: a supporting member for supporting one end of the piezoelectric element, a first elastic sealing member which moves together with the other end of the piezoelectric element, a second elastic sealing member connected to said displacement transmitting member, a wall member facing said first elastic sealing member, a chamber sealed by said first and second elastic sealing members and said wall member and containing a non-compressible fluid, said chamber including a first sub-chamber sealed by said first elastic sealing member and a second sub-chamber sealed by said second elastic sealing member, said first and second sub-chambers being communicated with each other and said first sub-chamber having a larger cross-sectional area perpendicular to the direction of said displacement than said second sub-chamber, and a temperature compensator which varies the distance between said wall member and said supporting member depending on the temperature.

Claim 7

A displacement magnifying device as defined in claim 4 wherein said temperature compensator comprises a laminate of shape-memorizing alloy having a thermal expansion coefficient which compensates for the thermal expansion of said fluid and for the thermal contraction of said piezoelectric element.

Claim 8

A displacement magnifying device for magnifying the displacement of a piezoelectric element according to an applied voltage and transmitting it to a displacement transmitting member, comprising: a supporting member for supporting one end of the piezoelectric element, a first elastic sealing member which moves together with the other end of the piezoelectric element, a second elastic sealing member connected to said displacement transmitting member, a sealed chamber sealed by said first and second elastic sealing members and containing a non-compressible fluid, said chamber including a first sub-chamber sealed by said first elastic sealing member and a second sub-chamber sealed by said second elastic sealing member, said first and second sub-chambers being communicated with each other and said first sub-chamber having a larger cross-sectional area perpendicular to the direction of said displacement than said second sub-chamber, and an elastic member supporting said displacement transmitting member on said supporting member outside said chamber.

Claim 9

A displacement magnifying device for magnifying the displacement of a piezoelectric element according to an applied voltage and transmitting it to a displacement transmitting member, comprising: a supporting member for supporting one end of the piezoelectric element, a first elastic sealing member which moves together with the other end of the piezoelectric element, a second elastic sealing member connected to said displacement transmitting member, a sealed chamber sealed by said first and second elastic sealing members and containing a non-compressible fluid, said chamber including a first sub-chamber sealed by said first elastic sealing member and a second sub-chamber sealed by said second elastic sealing member, said first and second sub-chambers being communicated with each other and said first sub-chamber having a larger cross-sectional area perpendicular to the direction of said displacement than said second sub-chamber, and an elastic member supporting said displacement transmitting member on said supporting member outside said chamber.