US5328554A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fabrication process for narrow groove
Assignee: BAE Systems Electronics Ltd
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Filing: 1992-11-24
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Granted: 1994-07-12
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Expires: 2012-11-24
Abstract
Abstract In a process for producing a narrow groove in a layer of, for example, silicon nitride, a wide groove is first formed in the layer. A layer of a metal, for example aluminium, is evaporated on to one side of the wide groove. The remainder of the wide groove is then filled with a material such a silicon nitride. The metal layer is then etched away, leaving a narrow groove in the silicon nitride equal to the thickness of the metal layer.
Inventors
- 👤 Simon G. Ingram
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:29
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/69; H10P50/691; H10P50/693; H10P50/695; H10P76/00; H10P76/40; H10P76/408; H10P76/4085; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/947
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
109 words
A process for producing a narrow groove in a layer of a first material, the process comprising the steps of: forming a relatively wide groove in said layer of first material; depositing on a side wall of said relatively wide groove a layer of aluminum, the thickness of said layer of aluminum being equal to the required narrow groove width; filling the remainder of the relatively wide groove with a third material which is the same as or different from said first material; and selectively removing said aluminum to produce said narrow groove in the layer of first and third materials without significantly removing said first and third materials.
Claim 2
Dependent Claim
109 words
A process for producing a narrow groove in a layer of a first material, the process comprising the steps of: forming a relatively wide groove in said layer of first material; depositing on a side wall of said relatively wide groove a layer of aluminum, the thickness of said layer of aluminum being equal to the required narrow groove width; filling the remainder of the relatively wide groove with a third material which is the same as or different from said first material; and selectively removing said aluminum to produce said narrow groove in the layer of first and third materials without significantly removing said first and third materials.
Claim 3
Dependent Claim
45 words
A process as claimed in claim 1, wherein the layer of aluminum is deposited over a major surface of the layer of first material and on to said side wall, but leaving all other surfaces of the relatively wide groove substantially free of said aluminum.
Claim 4
Dependent Claim
60 words
A process as claimed in claim 2, wherein the layer of aluminum is deposited by evaporating the aluminum at an oblique angle to said major surface; and wherein the width of said relatively wide groove is selected, in combination with said angle, to ensure that said other surfaces of the relatively wide groove are left substantially free of said aluminum.
Claim 5
Dependent Claim
143 words
A process for producing a narrow groove in a layer of a first material, the process comprising the steps of: forming a relatively wide groove in said layer of first material; depositing over a major surface of said layer of first material and on to a side wall of said relatively wide groove a layer of a second material by evaporating said second material at an oblique angle to said major surface such that the other surfaces of said relatively wide groove are left substantially free of said second material, the thickness of said layer of second material being equal to the required narrow groove width; filling the remainder of the relatively wide groove with a third material; and selectively removing said second material to produce said narrow groove between said first and third materials without significantly removing said first and third materials.
Claim 6
Dependent Claim
143 words
A process for producing a narrow groove in a layer of a first material, the process comprising the steps of: forming a relatively wide groove in said layer of first material; depositing over a major surface of said layer of first material and on to a side wall of said relatively wide groove a layer of a second material by evaporating said second material at an oblique angle to said major surface such that the other surfaces of said relatively wide groove are left substantially free of said second material, the thickness of said layer of second material being equal to the required narrow groove width; filling the remainder of the relatively wide groove with a third material; and selectively removing said second material to produce said narrow groove between said first and third materials without significantly removing said first and third materials.
Claim 7
Dependent Claim
48 words
A process as claimed in claim 4, wherein said layer of first material is provided on a substrate; and wherein said layer of second material extends over the whole depth of said side wall, whereby said narrow groove extends through said layer of first material to the substrate.
Claim 8
Dependent Claim
34 words
A process as claimed in claim 5, including a further step of etching the substrate through said narrow groove in the layer of first material to produce a corresponding narrow groove in the substrate.
Claim 9
Dependent Claim
29 words
A process as claimed in claim 6, wherein after production of said narrow groove in the substrate the layer of first and third materials is removed from the substrate.
Claim 10
Dependent Claim
14 words
A process as claimed in claim 4, wherein said first material is silicon nitride.
Claim 11
Dependent Claim
22 words
A process as claimed in claim 8, wherein said third material filling the remainder of the relatively wide groove is silicon nitride.
Claim 12
Dependent Claim
13 words
A process as claimed in claim 4, wherein said second material is aluminum.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-11 | 1998-01-10 | 1998-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-11 | 2002-01-10 | 2002-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-11 | 2006-01-10 | 2006-07-12 | $7700.00 | Window Closed / Lapsed |