Bimetallic alkoxide reagents and method of making the same

Abstract

Abstract Bimetallic alkoxide compounds useful as source reagents for chemical vapor deposition of ferroelectric ceramics such as lead titanate and lead zirconate, and lead zirconate titanate (PZT). The novel bimetallic alkoxide compounds of the present invention have the formula R 1 x PbM(OR 2 ) y (OR 3 ) z (1) or R 1 x PbOM(OR 2 ) y (OR 3 ) z (2), wherein M is a Group IVB metal, especially titanium or zirconium, and R 1 , R 2 , and R 3 are independently selected hydrocarbyls, especially C1-C6 alkyls. In these compounds, lead may be present in the +2 or +4 oxidation states. For compound 1, when lead is in the +2 oxidation state, x may be 0, 1 or 2, y and z range from 0 to 4, and x+y+z=6. When lead is present in the +4 oxidation state, x may range from 0 to 3, y and z range from 0 to 6, and x+y+z=8. For compound 2, when lead is in the +2 oxidation state, x may be 0, 1 or 2, y and z range from 0 to 4, and x+y+z=4. When lead is present in the +4 oxidation state, x may range from 0 to 3, y and z range from 0 to 4, and x+y+z=6. For 1 and 2, R 1 , R 2 , and R 3 are hydrocarbyl groups such as alkyl, cycloalkyl, alkenyl or aryl. R 1 is preferably methyl, ethyl, propyl, cyclopentadienyl, or methylcyclopentadienyl, and most preferably methyl or ethyl. R 2 and R 3 are preferably t-butyl, s-butyl, i-propyl, cyclohexyl, or neopentyl, and most preferably t-butyl or s-butyl.

Inventors

• 👤 Brian A. Vaartstra

Bibliographic Details