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US5324964A Expired / Lapsed US ⏱️ 0.0 years remaining

Superluminescent surface light emitting device

Assignee: Motorola Solutions Inc
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Filing: 1991-10-04
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Granted: 1994-06-28
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Expires: 2011-10-04
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Abstract

Abstract A superluminescent surface light emitting device comprising a mirror layer (19) formed on a surface of a semiconductor substrate (22). Above the mirror (19) is a light emitting region (16). A second mirror (12) is located in a plane above the light emitting region (16). The combined reflectivities of the mirrors (19,12) are selected such that light is emitted in the superluminescent operating mode in a direction perpendicular to the surface of the device. An implanted region (14) may be used to improve superluminescent operation.

Inventors

  • 👤 Donald E. Ackley
  • 👤 Michael S. Lebby

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 19:23
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/814; H10H20/8142; H10H20/042

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 105 words
A superluminescent surface light emitting device, comprising: a semiconductor substrate; a first reflector formed above a surface of said semiconductor substrate; at least one light emitting region, which emits light when a bias current is applied, formed in a plane above said first reflector; a contact means whereby said bias current may be applied to said light emitting region; and a second reflector located in a plane above said light emitting region and wherein said combined reflectivities of said first and second reflectors are selected such that said surface light emitting device will emit light while operating in a superluminescent mode in a vertical direction.
Claim 2
Dependent Claim 105 words
A superluminescent surface light emitting device, comprising: a semiconductor substrate; a first reflector formed above a surface of said semiconductor substrate; at least one light emitting region, which emits light when a bias current is applied, formed in a plane above said first reflector; a contact means whereby said bias current may be applied to said light emitting region; and a second reflector located in a plane above said light emitting region and wherein said combined reflectivities of said first and second reflectors are selected such that said surface light emitting device will emit light while operating in a superluminescent mode in a vertical direction.
Claim 3
Dependent Claim 46 words
The superluminescent surface light emitting device of claim 1 wherein said combined reflectivities of said first and second reflectors, plus said output of said light emitting region are selected to provide a total cavity gain which is greater than zero, but less than a lasing threshold.
Claim 4
Dependent Claim 33 words
The superluminescent surface light emitting device of claim 1 wherein said first and second reflectors comprise a superlattice structure in which alternating layers of AlAs and AlGaAs are formed having matching crystal alignments.
Claim 5
Dependent Claim 31 words
The superluminescent surface light emitting device of claim 3 wherein said combined reflectivities of said first and second reflectors are adjusted by adding or subtracting reflective layers within their respective structures.
Claim 6
Dependent Claim 25 words
The superluminescent surface light emitting device of claim 4 wherein said first reflector comprises sixteen reflective layers and said second reflector comprises nine reflective layers.
Claim 7
Dependent Claim 19 words
The superluminescent surface light emitting device of claim 1 wherein said second reflector is comprised of a dielectric material.
Claim 8
Dependent Claim 21 words
The superluminescent surface light emitting device of claim 6 wherein said second reflector is comprised of a Si/SiO 2 dielectric material.
Claim 9
Dependent Claim 24 words
The superluminescent surface light emitting device of claim 1 further comprising: a means for suppressing an undesired superluminescence which is parallel to said surface.
Claim 10
Dependent Claim 39 words
The superluminescent surface light emitting device of claim 8 further comprising: a means whereby said reflectivities at said edges of said superluminescent region are reduced to suppress undesired superluminescence which is parallel to said surface of said semiconductor substrate.
Claim 11
Dependent Claim 47 words
The superluminescent surface light emitting device of claim 9 wherein oxygen ions are implanted at said edges of said emitting region to reduce said reflectivities at said edges of said superluminescent region and to confine said applied bias current to a predetermined region in said horizontal direction.
Claim 12
Dependent Claim 21 words
The superluminescent surface light emitting device of claim 1 wherein said semiconductor substrate is fabricated from a p type GaAs material.
Claim 13
Independent Claim 125 words
A method for fabricating a semiconductor light emitting device for superluminescent light emission perpendicular to said surface, comprising: providing a semiconductor substrate; forming a first mirror above a surface of said semiconductor substrate; forming at least one light emitting region in a plane above said first mirror, which includes at least one active layer which emits light when impressed with a bias current; forming a second mirror above said light emitting region; adjusting said combined reflectivities of said first and second mirrors such that said surface light emitting device operates in a superluminescent mode in a direction perpendicular to said semiconductor substrate; and reducing said reflectivities at said edges of said superluminescent region to suppress undesired superluminescence in a direction parallel to said semiconductor substrate.
Claim 14
Independent Claim 125 words
A method for fabricating a semiconductor light emitting device for superluminescent light emission perpendicular to said surface, comprising: providing a semiconductor substrate; forming a first mirror above a surface of said semiconductor substrate; forming at least one light emitting region in a plane above said first mirror, which includes at least one active layer which emits light when impressed with a bias current; forming a second mirror above said light emitting region; adjusting said combined reflectivities of said first and second mirrors such that said surface light emitting device operates in a superluminescent mode in a direction perpendicular to said semiconductor substrate; and reducing said reflectivities at said edges of said superluminescent region to suppress undesired superluminescence in a direction parallel to said semiconductor substrate.
Claim 15
Dependent Claim 253 words
A superluminescent surface light emitting device, comprising, an n type GaAs substrate; an n type buffer layer serving to smooth a top surface of said n type GaAs substrate; a first superlattice reflector, doped n type, formed on said top surface of said n type GaAs buffer; at least one multiple quantum well, which emits light when a bias current is applied, formed in a plane above said first superlattice reflector; a bottom spacer having a narrow bandgap formed between said first reflector and said multiple quantum well which serves to confine holes and electrons within said multiple quantum well; a top spacer having a narrow bandgap on said multiple quantum well which serves to confine holes and electrons within said multiple quantum well; a top contact and a bottom contact whereby a bias current may be applied to said light emitting region; a second superlattice reflector, doped p type, located in a plane above said light emitting region, wherein said combined reflectivities of said first and second superlattice reflectors are selected such that said surface light emitting device operates in a superluminescent mode in a direction perpendicular to said n type GaAs substrate; and at least one region located at said edges of said emitting region where oxygen ions are implanted to reduce said reflectivities at said edges of said superluminescent region and to confine said applied bias current to a predetermined region in said horizontal direction so as to suppress undesired superluminescence which is parallel to said n type GaAs substrate.
Claim 16
Dependent Claim 253 words
A superluminescent surface light emitting device, comprising, an n type GaAs substrate; an n type buffer layer serving to smooth a top surface of said n type GaAs substrate; a first superlattice reflector, doped n type, formed on said top surface of said n type GaAs buffer; at least one multiple quantum well, which emits light when a bias current is applied, formed in a plane above said first superlattice reflector; a bottom spacer having a narrow bandgap formed between said first reflector and said multiple quantum well which serves to confine holes and electrons within said multiple quantum well; a top spacer having a narrow bandgap on said multiple quantum well which serves to confine holes and electrons within said multiple quantum well; a top contact and a bottom contact whereby a bias current may be applied to said light emitting region; a second superlattice reflector, doped p type, located in a plane above said light emitting region, wherein said combined reflectivities of said first and second superlattice reflectors are selected such that said surface light emitting device operates in a superluminescent mode in a direction perpendicular to said n type GaAs substrate; and at least one region located at said edges of said emitting region where oxygen ions are implanted to reduce said reflectivities at said edges of said superluminescent region and to confine said applied bias current to a predetermined region in said horizontal direction so as to suppress undesired superluminescence which is parallel to said n type GaAs substrate.

References Cited (Backward Citations)

US5052008A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-06-27 1997-12-27 1998-06-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-06-27 2001-12-27 2002-06-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-06-27 2005-12-27 2006-06-28 $7700.00 Window Closed / Lapsed

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