US5319960A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning force microscope
Assignee: PARKER SCIENTIFIC INSTRUMENTS Corp
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Filing: 1992-03-06
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Granted: 1994-06-14
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Expires: 2012-03-06
Abstract
Abstract The scanning force microscope is an improved free standing type scanning force microscope with integrated scanning drivers for examination of a wide range of sizes and weights of stationary specimens, with the capability of scanning a sample in contact with a fluid. The scanning force microscope also includes motorized driver legs for operating the approach of the optical lever arm and sensor head to the sample, to allow for automation of the approach of the sensor head to the specimen.
Inventors
- 👤 Ronald C. Gamble
- 👤 Paul E. West
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 07:39
CPC Classifications
G; G01; G01Q; G01Q30/00; G01Q30/08; B; B82; B82Y; B82Y35/00; G01Q20/00; G01Q20/02; G01Q30/12; G01Q30/14; G01Q70/00; G01Q70/02; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/868; Y10S977/87
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
254 words
A scanning force microscope for examining surface contours of a specimen, comprising: a) a housing having a base adapted to be positioned on a substrate with respect to said specimen, said housing including a magnetic sensor mounting portion and a sealed viewing tube having a transparent viewing window for viewing a stationary specimen in a liquid; b) sensor means for measuring surface contours of said specimen, said sensor means being mounted to said housing for movement relative thereto, said sensor means including an optical lever arm having a reflective surface and a probe tip, said optical lever arm being removably magnetically secured to said magnetic sensor mounting portion, said probe tip extending from said optical lever arm to contact and follow the surface contours of the specimen with a substantially constant amount of force; c) laser light source means mounted to said housing for producing a focused laser beam directed at and deflected by said optical lever arm means through said viewing tube; d) photodetector means for receiving said laser beam deflected by said optical lever arm through said viewing tube and generating an output indicative of a degree of deflection of said laser beam by said optical lever arm, said photodetector means being mounted in said housing; e) scanning means mounted to said housing for moving said sensor means with respect to said specimen in three degrees of freedom relative to said housing; and f) control means for maintaining a constant force of said probe tip against said surface contours of said specimen.
Claim 2
Dependent Claim
254 words
A scanning force microscope for examining surface contours of a specimen, comprising: a) a housing having a base adapted to be positioned on a substrate with respect to said specimen, said housing including a magnetic sensor mounting portion and a sealed viewing tube having a transparent viewing window for viewing a stationary specimen in a liquid; b) sensor means for measuring surface contours of said specimen, said sensor means being mounted to said housing for movement relative thereto, said sensor means including an optical lever arm having a reflective surface and a probe tip, said optical lever arm being removably magnetically secured to said magnetic sensor mounting portion, said probe tip extending from said optical lever arm to contact and follow the surface contours of the specimen with a substantially constant amount of force; c) laser light source means mounted to said housing for producing a focused laser beam directed at and deflected by said optical lever arm means through said viewing tube; d) photodetector means for receiving said laser beam deflected by said optical lever arm through said viewing tube and generating an output indicative of a degree of deflection of said laser beam by said optical lever arm, said photodetector means being mounted in said housing; e) scanning means mounted to said housing for moving said sensor means with respect to said specimen in three degrees of freedom relative to said housing; and f) control means for maintaining a constant force of said probe tip against said surface contours of said specimen.
Claim 3
Dependent Claim
20 words
The scanning force microscope of claim 1, wherein said optical lever arm comprises a cantilever arm having a free end.
Claim 4
Dependent Claim
21 words
The scanning force microscope of claim 2, wherein said probe tip is mounted to said free end of said cantilever arm.
Claim 5
Dependent Claim
35 words
The scanning force microscope of claim 2, wherein said optical lever arm includes a magnetic steel member removably magnetically secured to said magnetic portion, and said cantilever arm is mounted to said magnetic steel member.
Claim 6
Dependent Claim
31 words
The scanning force microscope of claim 1, wherein said optical lever arm includes a free end, and said probe tip is mounted to said free end of said optical lever arm.
Claim 7
Dependent Claim
40 words
The scanning force microscope of claim 1, wherein said photodetector means includes a photodetector mounted to said housing, and further including reflecting means mounted within said housing to deflect said laser beam from said optical lever arm to said photodetector.
Claim 8
Dependent Claim
55 words
The scanning force microscope of claim 1, wherein said scanning means includes a plurality of piezoelectric drive members disposed adjacent said housing and operatively connected to said control means to move said optical lever arm means and said probe tip secured thereto in three degrees of freedom relative to said surface contours of said specimen.
Claim 9
Dependent Claim
22 words
The scanning force microscope of claim 1, wherein said housing includes means for adjusting distance of said base portion from said substrate.
Claim 10
Dependent Claim
70 words
The scanning force microscope of claim 8, wherein said means for adjusting distance comprises a plurality of adjustable foot members mounted to said base and adapted to contact said substrate, and foot member drive means connected to said foot members and said housing for individually extending and retracting said plurality of foot members with respect to said base, said foot member drive means being operatively connected to said control means.
Claim 11
Dependent Claim
101 words
The scanning force microscope of claim 9, wherein said adjustable foot member drive means comprises a plurality of corresponding optically encoded screw drive motors associated with said foot members and mounted to said base for driving said foot members to raise and lower said microscope, said drive motors being adapted to generate a position signal indicative of a position of the associated foot members, said control means being connected to said plurality of drive motors to receive said position signal and to control the operation of said drive motors for uniformly raising and lowering said microscope with respect to said substrate.
Claim 12
Dependent Claim
111 words
The scanning force microscope of claim 1, wherein said control means comprises means connected to said photodetector means for receiving said output signal indicative of deflection of said laser beam from said optical lever arm means, means for generating an error signal indicative of a variance from said constant amount of force of said probe tip against said specimen surface, and electrical drive means responsive to said error signal for raising and lowering said specimen with respect to said probe tip for increasing or decreasing the force of said probe tip against said specimen surface to maintain said substantially constant amount of force of said probe tip against said specimen surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-06-13 | 1997-12-13 | 1998-06-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-13 | 2001-12-13 | 2002-06-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-13 | 2005-12-13 | 2006-06-14 | $7700.00 | Window Closed / Lapsed |