US5318676A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photolithographic fabrication of luminescent images on porous silicon structures
Assignee: University of California, San Diego
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Filing: 1992-06-22
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Granted: 1994-06-07
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Expires: 2012-06-22
Abstract
Abstract A polished wafer of single-crystal silicon (Si) is ohmically contacted on its backside to a copper wire to provide a working electrode. The wafer and a counterelectrode are immersed in a solution of aqueous HF and ethanol within an optical quality cuvette. Lithographic images are projected onto the silicon wafer within the solution, and the wafer is etched galvanostatically at a low current density until a predetermined charge density is attained. The areas of an n-type silicon wafer exposed to the light during the etch will exhibit visible luminescence when the wafer is illuminated with an ultraviolet (UV) lamp or other short wavelength visible light. The areas of the wafer that were not exposed to the pattern during etch will not luminesce.
Inventors
- 👤 Michael J. Sailor
- 👤 Vincent V. Doan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 12:04
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/822; H10H20/826; H10H20/8264; C; C25; C25F; C25F3/00; C25F3/02; C25F3/12
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
118 words
A method for generating a luminescent image on a silicon substrate which comprises: selecting a substrate having a silicon surface; affixing a first electrical conductor for carrying a first charge to a backside of said substrate; selecting a second electrical conductor for carrying a second charge opposite said first charge; immersing said substrate and said second electrical conductor into a hydrofluoric acid-containing solution; projecting an image onto said silicon surface; applying a current to said first conductor and said second conductor until an appropriate charge density is attained; and removing said substrate from said solution; wherein illumination of said silicon surface with short wavelength light causes said silicon surface to luminesce in a pattern corresponding to said image.
Claim 2
Independent Claim
118 words
A method for generating a luminescent image on a silicon substrate which comprises: selecting a substrate having a silicon surface; affixing a first electrical conductor for carrying a first charge to a backside of said substrate; selecting a second electrical conductor for carrying a second charge opposite said first charge; immersing said substrate and said second electrical conductor into a hydrofluoric acid-containing solution; projecting an image onto said silicon surface; applying a current to said first conductor and said second conductor until an appropriate charge density is attained; and removing said substrate from said solution; wherein illumination of said silicon surface with short wavelength light causes said silicon surface to luminesce in a pattern corresponding to said image.
Claim 3
Dependent Claim
18 words
A method as in claim 1 wherein the step of selecting said substrate comprises selecting doped single-crystal silicon.
Claim 4
Dependent Claim
11 words
A method as in claim 2 wherein said silicon is n-type.
Claim 5
Dependent Claim
17 words
A method as in claim 3 wherein said appropriate charge density is approximately 1.0 coulomb/cm 2 .
Claim 6
Dependent Claim
11 words
A method as in claim 2 wherein said silicon is p-type.
Claim 7
Dependent Claim
17 words
A method as in claim 5 wherein said appropriate charge density is approximately 10 coulombs/cm 2 .
Claim 8
Dependent Claim
26 words
A method as in claim 1 wherein the step of selecting said substrate comprises selecting an insulating substrate upon which a layer of silicon is formed.
Claim 9
Dependent Claim
14 words
A method as in claim 1 wherein said hydrofluoric acid-containing solution further contains ethanol.
Claim 10
Dependent Claim
28 words
A method as in claim 1 wherein the step of projecting an image comprises: selecting an exposure source according to a desired level of resolution of said image.
Claim 11
Dependent Claim
23 words
A method as in claim 1 wherein the step of projecting an image comprises projecting an exposure light through a high contrast pattern.
Claim 12
Dependent Claim
25 words
A method as in claim 1 wherein the step of projecting an image comprises projecting an exposure light through a poly-contrast or gray scale image.
Claim 13
Dependent Claim
24 words
A method as in claim 1 wherein the step of projecting an image comprises projecting an exposure light through a plurality of interference fringes.
Claim 14
Independent Claim
107 words
A method for integrating optical elements on a silicon wafer which comprises: selecting a single-crystal silicon wafer; placing said silicon wafer in an optically-transmissive acid-resistant container; modulating intensity of an exposure light by projecting said exposure light through a patterned mask onto at least a portion of said silicon wafer; electrochemically etching said silicon wafer in an HF-containing solution wherein an etch rate corresponds to said intensity of exposure light; and forming at least one area of porous silicon on said silicon wafer wherein porosity of said at least one area is modulated corresponding to said patterned mask and said at least one area luminesces when illuminated.
Claim 15
Independent Claim
107 words
A method for integrating optical elements on a silicon wafer which comprises: selecting a single-crystal silicon wafer; placing said silicon wafer in an optically-transmissive acid-resistant container; modulating intensity of an exposure light by projecting said exposure light through a patterned mask onto at least a portion of said silicon wafer; electrochemically etching said silicon wafer in an HF-containing solution wherein an etch rate corresponds to said intensity of exposure light; and forming at least one area of porous silicon on said silicon wafer wherein porosity of said at least one area is modulated corresponding to said patterned mask and said at least one area luminesces when illuminated.
Claim 16
Dependent Claim
33 words
A method as in claim 13 wherein the step of selecting said silicon wafer comprises selecting n-type silicon wherein said at least one area corresponds to a positive image of said patterned mask.
Claim 17
Dependent Claim
33 words
A method as in claim 13 wherein the step of selecting said silicon wafer comprises selecting p-type silicon wherein said at least one area corresponds to a negative image of said patterned mask.
Claim 18
Dependent Claim
20 words
A method as in claim 13 wherein the step of electrochemically etching comprises selecting an HF-containing solution further containing ethanol.
Claim 19
Dependent Claim
14 words
A method as in claim 13 wherein said predetermined pattern comprises a high-contrast image.
Claim 20
Dependent Claim
17 words
A method as in claim 13 wherein said predetermined pattern comprises a poly-contrast or gray scale image.
Claim 21
Dependent Claim
16 words
A method as in claim 13 wherein said patterned mask comprises a plurality of interference fringes.
Claim 22
Dependent Claim
23 words
A method as in claim 13 wherein the step of electrochemically etching said silicon wafer is terminated upon achieving an appropriate charge density.
Claim 23
Dependent Claim
18 words
A method as in claim 20 wherein said appropriate charge density is 1 coulomb/cm 2 for n-type silicon.
Claim 24
Dependent Claim
18 words
A method as in claim 20 wherein said appropriate charge density is 10 coulombs/cm 2 for p-type silicon.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-06-06 | 1997-12-06 | 1998-06-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-06 | 2001-12-06 | 2002-06-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-06 | 2005-12-06 | 2006-06-07 | $7700.00 | Window Closed / Lapsed |