US5317656A
Expired / Lapsed
US
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Fiber optic network for multi-point emissivity-compensated semiconductor wafer pyrometry
Assignee: Texas Instruments Inc
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Filing: 1993-02-11
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Granted: 1994-05-31
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Expires: 2013-02-11
Abstract
Abstract A fiber-optic network for communicating non-invasive, real-time, in-situ semiconductor wafer radiance and emissivity measurements. The fiber-optic network includes a plurality of optical fibers, a plurality of fiber-optic bundles, and a chopper multiplexer. The fiber-optic bundle provides for the simultaneous transmission and receipt of coherent infrared light energy and radiant heat energy from a semiconductor wafer within a fabrication reactor. The fiber-optic bundles are designed to be sufficiently small to fit within hollow light pipe in a lamp module that directs optical heating energy to the wafer. This substantially eliminates measurement error that the lamp module generates in known measurement devices. Use of optical fibers for transmitting and receiving laser energy and wafer radiance permits precision placement of the fiber-optic bundles to measure multiple temperatures on the semiconductor wafer surface.
Inventors
- 👤 Mehrdad M. Moslehi
- 👤 Habib N. Najm
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:48
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/0003; G01J5/0007; G01J5/02; G01J5/08; G01J5/0801; G01J5/0802; G01J5/0803; G01J5/0805; G01J5/0806; G01J5/0818; G01J5/0821; G01J5/0868; G01J5/0896; G01J5/06; G01J5/061; G01J5/80; G01J5/802
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
119 words
A fiber-optic network for communicating multi-point, non-invasive, in-situ, pyrometry-based, emissivity-compensated temperature measurements of a semiconductor wafer in a fabrication reactor, comprising: a plurality of optical fibers for transmitting electromagnetic energy, said optical fibers comprising a set of incident beam optical fibers and a set of received beam optical fibers; and a fiber-optic bundle associated with each said optical fiber to receive said optical fibers, each of said bundles associated with the incident beam optical fibers for directing a plurality of incident beams to the semiconductor wafer, and each of said bundles associated with the set of received beam optical fibers for receiving a plurality of reflected beams and a plurality of radiant heat energy signals from the semiconductor wafer.
Claim 2
Dependent Claim
119 words
A fiber-optic network for communicating multi-point, non-invasive, in-situ, pyrometry-based, emissivity-compensated temperature measurements of a semiconductor wafer in a fabrication reactor, comprising: a plurality of optical fibers for transmitting electromagnetic energy, said optical fibers comprising a set of incident beam optical fibers and a set of received beam optical fibers; and a fiber-optic bundle associated with each said optical fiber to receive said optical fibers, each of said bundles associated with the incident beam optical fibers for directing a plurality of incident beams to the semiconductor wafer, and each of said bundles associated with the set of received beam optical fibers for receiving a plurality of reflected beams and a plurality of radiant heat energy signals from the semiconductor wafer.
Claim 3
Dependent Claim
31 words
The apparatus of claim 1 further comprising a multiplexer for combining said plurality of reflected beams and said plurality of radiant heat energy signals into a single time-division multiplexed output signal.
Claim 4
Dependent Claim
17 words
The apparatus of claim 1, wherein said fiber-optic bundle comprises a bundle jacket for providing structural support.
Claim 5
Dependent Claim
19 words
The apparatus of claim 1, wherein said fiber-optic bundle further comprises a collimating lens for collimating said incident beam.
Claim 6
Dependent Claim
31 words
The apparatus of claim 1, wherein said fiber-optic bundles are sufficiently small to fit within light pipe holes in a lamp module that directs optical heating energy to the semiconductor wafer.
Claim 7
Dependent Claim
47 words
The apparatus of claim 1, wherein the fabrication reactor comprises a lamp module for transmitting optical heating energy and said fiber-optic bundle sends said incident coherent beams and receives said reflected coherent beams and said radiant heat energy along paths essentially perpendicular to the semiconductor wafer surface.
Claim 8
Dependent Claim
15 words
The apparatus of claim 1, wherein said optical fibers transmit beams of infrared electromagnetic energy.
Claim 9
Dependent Claim
22 words
The apparatus of claim 6, wherein said infrared electromagnetic energy beam comprises a laser beam having a wavelength of approximately 5.4 microns.
Claim 10
Dependent Claim
18 words
The apparatus of claim 6, wherein said infrared electromagnetic energy beam comprises a chopped beam of electromagnetic energy.
Claim 11
Dependent Claim
24 words
The apparatus of claim 5, wherein said chopped beam has a chopping frequency that relates to the rates of real-time emissivity and temperature measurements.
Claim 12
Dependent Claim
68 words
The apparatus of claim 1, further comprising a circuitry for associating each of said plurality of incident coherent beams with the corresponding reflected coherent beam to yield a beam pair, and further associating each beam pair with the radiant heat energy collected from the point of incidence and reflection from the semiconductor wafer to yield a single temperature value for each respective probed point of the semiconductor wafer.
Claim 13
Dependent Claim
55 words
The apparatus in claim 1, wherein the semiconductor wafer resides within a semiconductor wafer fabrication reactor having a lamp module for heating the semiconductor wafer and wherein said incident coherent beam collecting circuitry and said reflected coherent beam and radiant heat energy collecting circuitry operate in realtime as said lamp module heats the semiconductor wafer.
Claim 14
Dependent Claim
43 words
The apparatus of claim 1, wherein the semiconductor wafer resides within a semiconductor wafer fabrication reactor comprising a multi-zone lamp module, said multi-zone lamp module comprising a plurality of controllable lamp heating zones and further comprising circuitry for uniformly heating the semiconductor wafer.
Claim 15
Dependent Claim
39 words
The apparatus of claim 12, further comprising circuitry for associating each of said fiber-optic bundles with at least one of said controllable lamp heating zones and controlling said lamp heating zones in response to said associated measured temperature values.
Claim 16
Dependent Claim
31 words
The apparatus of claim 1, further comprising a Brewster window associated with said fiber-optic bundle for permitting bi-directional flow of electromagnetic energy beams within optical fibers associated with said fiber-optic bundles.
Claim 17
Dependent Claim
20 words
The apparatus of claim 2, wherein said multiplexer comprises a fiber adapter module for receiving a plurality of optical fibers.
Claim 18
Dependent Claim
22 words
The apparatus of claim 16, wherein said multiplexer further comprises a chopper wheel for sequentially controlling the time-division multiplexing of output signals.
Claim 19
Independent Claim
143 words
A method for communicating, pyrometry-based, emissivity-compensated temperature measurements of a semiconductor wafer in a fabrication reactor, comprising: transmitting electromagnetic energy over a plurality of optical fibers, said optical fibers comprising a set of incident beam optical fibers and a set of received beam optical fibers; directing a plurality of incident beams to the semiconductor wafer using a plurality of optic fiber bundles, each of said bundles being associated with one of the set of incident beam optical fibers and receiving a plurality of reflected beams and a plurality of radiant heat energy signals from the semiconductor wafer using a plurality of fiber optic bundles, each of said plurality being associated with one of the set of received beam fibers; and combining said plurality of reflected beams and said plurality of radiant heat energy signals into shared output signal channels using a time-division multiplexer.
Claim 20
Independent Claim
143 words
A method for communicating, pyrometry-based, emissivity-compensated temperature measurements of a semiconductor wafer in a fabrication reactor, comprising: transmitting electromagnetic energy over a plurality of optical fibers, said optical fibers comprising a set of incident beam optical fibers and a set of received beam optical fibers; directing a plurality of incident beams to the semiconductor wafer using a plurality of optic fiber bundles, each of said bundles being associated with one of the set of incident beam optical fibers and receiving a plurality of reflected beams and a plurality of radiant heat energy signals from the semiconductor wafer using a plurality of fiber optic bundles, each of said plurality being associated with one of the set of received beam fibers; and combining said plurality of reflected beams and said plurality of radiant heat energy signals into shared output signal channels using a time-division multiplexer.
Claim 21
Dependent Claim
26 words
The method of claim 18, further comprising the step of encasing said fiber-optic bundles within bundle jackets for providing structural support and insulating said fiber-optic bundles.
Claim 22
Dependent Claim
19 words
The method of claim 18, wherein said directing step further comprises the step of collimating said incident coherent beams.
Claim 23
Dependent Claim
27 words
The method of claim 18, further comprising the step of placing said fiber-optic bundles within a lamp module that directs optical heating energy to the semiconductor wafer.
Claim 24
Dependent Claim
35 words
The method of claim 18, wherein the fabrication reactor comprises a lamp module for transmitting optical heating energy and said directing and receiving steps take place along paths essentially perpendicular to the semiconductor wafer surface.
Claim 25
Dependent Claim
15 words
The method of claim 18, wherein said optical fibers transmit beams of infrared electromagnetic energy.
Claim 26
Dependent Claim
22 words
The method of claim 23, wherein said infrared electromagnetic energy beam comprises a laser beam having a wavelength of approximately 5.4 microns.
Claim 27
Dependent Claim
18 words
The method of claim 23, wherein said infrared electromagnetic energy beam comprises a chopped beam of electromagnetic energy.
Claim 28
Dependent Claim
24 words
The method of claim 25, wherein said chopped beam has a chopping frequency that relates to the rates of real-time emissivity and temperature measurements.
Claim 29
Dependent Claim
63 words
The method of claim 18, further comprising the step of associating each of said plurality of incident beams with the reflected beam to yield a beam pair, and further associating each beam pair with the radiant heat energy collected from the point of incidence and reflection from the semiconductor wafer to yield a temperature value for each respective point of the semiconductor wafer.
Claim 30
Dependent Claim
56 words
The method in claim 18, wherein the semiconductor wafer resides within a semiconductor wafer fabrication reactor having a lamp module for heating the semiconductor wafer and wherein said incident coherent beam collecting circuitry and said reflected coherent beam and radiant heat energy collecting steps take place in real-time as said lamp module heats the semiconductor wafer.
Claim 31
Dependent Claim
45 words
The method of claim 18, wherein the semiconductor wafer resides within a semiconductor wafer fabrication reactor comprising a multi-zone lamp module, said zone multi-zone lamp module comprising a plurality of controllable lamp heating zones, and further comprising the step of uniformly heating the semiconductor wafer.
Claim 32
Dependent Claim
42 words
The method of claim 29, further comprising the step of associating each of said fiber-optic bundles with at least one of said independently controllable point source heat lamps, and controlling said point heat lamps in response to said associated measured temperature values.
Claim 33
Dependent Claim
34 words
The method of claim 18, further comprising the step of associating a Brewster window with said fiber-optic bundle for permitting bi-directional flow of electromagnetic energy beams within optical fibers associated with said fiber-optic bundles.
Claim 34
Dependent Claim
21 words
The method of claim 18, wherein said multiplexer comprises a fiber adapter module for receiving a plurality of optic fiber bundle.
Claim 35
Dependent Claim
22 words
The method of claim 32, wherein said multiplexer further comprises a chopper wheel for sequentially controlling the time-division multiplexing of output signals.
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