US5316620A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and an apparatus for polishing wafer chamfers
Assignee: Shin-Etsu Handotai Co Ltd
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Filing: 1993-01-22
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Granted: 1994-05-31
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Expires: 2013-01-22
Abstract
Abstract A method for polishing peripheral chamfers of a semiconductor wafer comprising steps of: (a) turning a cylindrical cup-like rotatory buff having an internal polish groove formed in the inner wall surface thereof, the groove having a profile complementary to the profile of the chamfered wafer edge to be polished; (b) disposing the wafer inside the turning buff; (c) turning the wafer at a relatively low rate; and (d) pressing the wafer edge into the running internal polish groove with an appropriate pressure; furthermore there is proposed an apparatus for this novel method including the cylindrical cup-like rotatory buff as described above.
Inventors
- 👤 Fumihiko Hasegawa
- 👤 Tatsuo Ohtani
- 👤 Hiroshi Kawano
- 👤 Masayuki Yamada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:31
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/12; H10P90/128; B; B24; B24B; B24B9/00; B24B9/02; B24B9/06; B24B9/065; Y; Y10; Y10S; Y10S438/00; Y10S438/959
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
130 words
A method for polishing peripheral chamfers of a semiconductor wafer comprising steps of: (a) turning about its axis of rotation at a relatively high rate a cylindrical cup-shaped rotatory buff having an internal polish groove formed in the inner wall surface thereof, said groove describing a circle normal to the axis of rotation of said cylindrical buff and having a profile complementary to the profile of the chamfered wafer edge; (b) disposing the wafer inside the turning cylindrical buff in a manner such that the wafer lies in the plane defined by the circle of said internal polish groove; (c) turning said wafer circumferentially at a relatively low rate; and (d) moving said wafer radially to press the wafer edge into the running internal polish groove with an appropriate pressure.
Claim 2
Independent Claim
130 words
A method for polishing peripheral chamfers of a semiconductor wafer comprising steps of: (a) turning about its axis of rotation at a relatively high rate a cylindrical cup-shaped rotatory buff having an internal polish groove formed in the inner wall surface thereof, said groove describing a circle normal to the axis of rotation of said cylindrical buff and having a profile complementary to the profile of the chamfered wafer edge; (b) disposing the wafer inside the turning cylindrical buff in a manner such that the wafer lies in the plane defined by the circle of said internal polish groove; (c) turning said wafer circumferentially at a relatively low rate; and (d) moving said wafer radially to press the wafer edge into the running internal polish groove with an appropriate pressure.
Claim 3
Dependent Claim
184 words
The method as claimed in claim 1 wherein the wafer is one that has a straight-line orientation flat edge and said cylindrical rotatory buff has an external polish groove formed in the outer wall surface thereof describing a circle normal to the axis of rotation of said cylindrical buff and having a profile complementary to the profile of the chamfered wafer edge, the method further comprising steps of: (i) disposing said wafer outside said cylindrical rotatory buff in a manner such that the wafer lies in the plane defined by the circle of said external polish groove; (ii) moving said wafer toward the buff in a manner such that the orientation flat edge of the wafer is contacted by the turning buff in a way that the the orientation flat edge is orthogonally bisected by the line that connects the centers of the wafer and the circle described by said external polish groove, to press the orientation flat edge into the external polish groove with an appropriate pressure; and (iii) stroking said orientation flat edge of the wafer on the running external polish groove.
Claim 4
Dependent Claim
43 words
The method as claimed in claim 2 wherein at step (iii) the wafer is swung circumferentially at a relatively low rate through the angle included between the radii connecting the center of the wafer with the end points of the orientation flat edge.
Claim 5
Dependent Claim
51 words
The method as claimed in claim 2 wherein at step (iii) the wafer is reciprocated repeatedly in a manner such that the entire orientation flat edge is slid on the running external polish groove in a direction generally tangential to the circle of the external polish groove at the contact point.
Claim 6
Independent Claim
269 words
A method for polishing peripheral chamfers of a semiconductor wafer having a straight-line orientation flat edge, making use of a cylindrical cup-shaped rotatory buff having an internal polish groove formed in the inner wall surface thereof and an external polish groove formed in the outer wall surface thereof, said grooves describing circles normal to the axis of rotation of said cylindrical buff and having a profile complementary to the profile of the chamfered wafer edge, comprising stages of: (1) picking up one wafer from a plurality of wafers set in a loader assembly and orienting the wafer with respect to its orientation flat edge; (2) polishing the chamfers of the orientation flat edge of said wafer by: disposing the wafer outside said buff, which is being turned about its axis of rotation at a relatively high rate, in a manner such that the wafer lies in the plane defined by the circle of said external polish groove; moving said wafer radially to press the orientation flat edge into the running external polish groove with an appropriate pressure; and stroking the orientation flat edge in the external polish groove; (3) polishing the chamfers of the circular circumference edge of each wafer by: disposing the wafer inside the turning cup-like buff in a manner such that the wafer lies in the plane defined by the circle of said internal polish groove; turning said wafer circumferentially at a relatively low rate; and moving said wafer radially to press the wafer edge into the running internal polish groove with an appropriate pressure; and (4) transporting the wafer after polish to an unloader assembly.
Claim 7
Independent Claim
269 words
A method for polishing peripheral chamfers of a semiconductor wafer having a straight-line orientation flat edge, making use of a cylindrical cup-shaped rotatory buff having an internal polish groove formed in the inner wall surface thereof and an external polish groove formed in the outer wall surface thereof, said grooves describing circles normal to the axis of rotation of said cylindrical buff and having a profile complementary to the profile of the chamfered wafer edge, comprising stages of: (1) picking up one wafer from a plurality of wafers set in a loader assembly and orienting the wafer with respect to its orientation flat edge; (2) polishing the chamfers of the orientation flat edge of said wafer by: disposing the wafer outside said buff, which is being turned about its axis of rotation at a relatively high rate, in a manner such that the wafer lies in the plane defined by the circle of said external polish groove; moving said wafer radially to press the orientation flat edge into the running external polish groove with an appropriate pressure; and stroking the orientation flat edge in the external polish groove; (3) polishing the chamfers of the circular circumference edge of each wafer by: disposing the wafer inside the turning cup-like buff in a manner such that the wafer lies in the plane defined by the circle of said internal polish groove; turning said wafer circumferentially at a relatively low rate; and moving said wafer radially to press the wafer edge into the running internal polish groove with an appropriate pressure; and (4) transporting the wafer after polish to an unloader assembly.
Claim 8
Dependent Claim
63 words
A buff for polishing peripheral chamfers of a semiconductor wafer, consisting of a cylindrical cup-shaped rotatory body of a resilient material having an internal polish groove formed in the inner wall surface thereof, said internal polish groove describing a circle normal to the axis of rotation of said cylindrical body and having a profile complementary to the profile of the chamfered wafer edge.
Claim 9
Dependent Claim
63 words
A buff for polishing peripheral chamfers of a semiconductor wafer, consisting of a cylindrical cup-shaped rotatory body of a resilient material having an internal polish groove formed in the inner wall surface thereof, said internal polish groove describing a circle normal to the axis of rotation of said cylindrical body and having a profile complementary to the profile of the chamfered wafer edge.
Claim 10
Dependent Claim
56 words
A buff as claimed in claim 6 which further has an external polish groove formed in the outer wall surface of the cylindrical cup-shaped rotatory body, said external polish groove describing a circle normal to the axis of rotation of said cylindrical body and having a profile complementary to the profile of the chamfered wafer edge.
Claim 11
Dependent Claim
31 words
A buff as claimed in claim 7 wherein the circle described by said external polish groove lies substantially in the same plane as the circle described by said internal polish groove.
Claim 12
Independent Claim
93 words
An apparatus for polishing peripheral chamfers of a semiconductor wafer, comprising: a cylindrical cup-shaped rotatory buff having an internal polish groove formed in the inner wall surface thereof, said internal polish groove describing a circle normal to the axis of rotation of said cylindrical buff and having a profile complementary to the profile of the chamfered wafer edge; a drive means for turning said buff about its axis of rotation; and a wafer holder means for holding the wafer and turning it circumferentially and pressing the wafer edge into the internal polish groove.
Claim 13
Independent Claim
93 words
An apparatus for polishing peripheral chamfers of a semiconductor wafer, comprising: a cylindrical cup-shaped rotatory buff having an internal polish groove formed in the inner wall surface thereof, said internal polish groove describing a circle normal to the axis of rotation of said cylindrical buff and having a profile complementary to the profile of the chamfered wafer edge; a drive means for turning said buff about its axis of rotation; and a wafer holder means for holding the wafer and turning it circumferentially and pressing the wafer edge into the internal polish groove.
Claim 14
Independent Claim
141 words
An apparatus for polishing peripheral chamfers of a semiconductor wafer having a straight-line orientation flat edge, comprising: a cylindrical cup-shaped rotatory buff having an internal polish groove formed in the inner wall surface thereof and an external polish groove formed in the outer wall surface thereof, said polish grooves describing circles normal to the axis of rotation of said cylindrical buff and having a profile complementary to the profile of the chamfered wafer edge; a drive means for turning said buff about its axis of rotation; a first wafer holder means for holding the wafer and pressing the orientation flat edge into the external polish groove and stroking the orientation flat edge on the external polish groove; and a second wafer holder means for holding the wafer and turning it circumferentially and pressing the wafer edge into the internal polish groove.
Claim 15
Independent Claim
141 words
An apparatus for polishing peripheral chamfers of a semiconductor wafer having a straight-line orientation flat edge, comprising: a cylindrical cup-shaped rotatory buff having an internal polish groove formed in the inner wall surface thereof and an external polish groove formed in the outer wall surface thereof, said polish grooves describing circles normal to the axis of rotation of said cylindrical buff and having a profile complementary to the profile of the chamfered wafer edge; a drive means for turning said buff about its axis of rotation; a first wafer holder means for holding the wafer and pressing the orientation flat edge into the external polish groove and stroking the orientation flat edge on the external polish groove; and a second wafer holder means for holding the wafer and turning it circumferentially and pressing the wafer edge into the internal polish groove.
Claim 16
Dependent Claim
31 words
An apparatus as claimed in claim 10 wherein the circle described by said external polish groove lies substantially in the same plane as the circle described by said internal polish groove.
Claim 17
Dependent Claim
47 words
An apparatus as claimed in claim 10 wherein said first wafer holder means is adapted to swing the wafer circumferentially at a relatively low rate through the angle included between the radii connecting the center of the wafer with the end points of the orientation flat edge.
Claim 18
Dependent Claim
55 words
An apparatus as claimed in claim 10 wherein said first wafer holder means is adapted to reciprocate the wafer repeatedly in a manner such that the entire orientation flat edge is slidden on the running external polish groove in a direction generally tangential to the circle of the external polish groove at the contact point.
Claim 19
Dependent Claim
102 words
An apparatus as claimed in claim 10, which further comprises: a loader assembly for housing a plurality of wafers; an orienting means for orienting the wafer with respect to its orientation flat edge; a wafer conveyor means for picking up one wafer at a time from the wafers housed in said loader assembly and conveying the wafer to said orienting means; an unloader assembly for housing wafers after chamfer polish; a plurality of transportation means for transporting one wafer at a time from the orienting means to said wafer holder means, and from said second wafer holder means to said unloader assembly.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-30 | 1997-11-29 | 1998-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-30 | 2001-11-29 | 2002-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-30 | 2005-11-29 | 2006-05-31 | $7700.00 | Window Closed / Lapsed |