US5314574A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface treatment method and apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1993-06-25
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Granted: 1994-05-24
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Expires: 2013-06-25
Abstract
Abstract In order to remove oxides produced as a result of natural oxidation, from a semiconductor wafer, the semiconductor wafer is transported into a preparatory chamber filled with an inert gas via a loading/unloading passage and held by open/close pins of a loading platform atop an intermediate cover lowered in the preparatory chamber; the intermediate cover then raises, the preparatory chamber and an intermediate chamber located immediately above the preparatory chamber are isolated; and the loading platform and the semiconductor wafer thereon are positioned in the intermediate chamber. Thereafter, a closed open/close cover located at the upper part of the intermediate chamber opens upward; a treatment gas from a treatment gas atmosphere chamber located immediately above the intermediate chamber flows into the intermediate chamber; and a process is performed for removing oxidation film from the semiconductor wafer surface. Then, the open/close cover lowers to isolate the treatment gas atmosphere chamber from the intermediate chamber, and by supplying an inert gas, treatment gas in the intermediate chamber is exhausted, and afterwards, the intermediate cover lowers, and the treated object is transported via the loading/unloading passage from the preparatory chamber to a load lock chamber. Thus, leakage of the treatment gas to the outside is prevented.
Inventors
- 👤 Nobuaki Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 05:53
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/33; H10P72/3306; H10P70/00; H10P70/10; H10P70/12; H10P70/125; H10P72/04; H10P72/0441; H10P72/0451; H10P72/0462; H10P72/3308; H10P72/3312; H10P72/70; H10P72/76; H10P72/7604; H10P72/7608; H10P72/7626; Y; Y10; Y10S; Y10S414/00; Y10S414/135
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
238 words
A method for surface treating of a treatment object comprising the steps of: transporting a treatment object into a preparatory chamber filled with an inert gas and holding the treatment object on a loading platform atop an intermediate cover in the preparatory chamber; closing the preparatory chamber with respect to the exterior; moving said intermediate cover toward an intermediate chamber located adjacent to and communicating with said preparatory chamber, so as to position the loading platform atop the intermediate cover and the treatment object held thereon in said intermediate chamber and to hermetically isolate said preparatory chamber and said intermediate chamber by said intermediate cover; opening an open/close cover, capable of communicating said intermediate chamber with a treatment gas atmosphere chamber adjacent thereto, to cause a treatment gas in said treatment gas atmosphere chamber to flow into the intermediate chamber and to cause the treatment gas to act on the treatment object; closing said open/close cover to isolate the treatment gas atmosphere chamber and the intermediate chamber; introducing an inert gas into said intermediate chamber to purge the treatment gas in the intermediate chamber to the exterior; moving said intermediate cover away from the intermediate chamber to communicate the intermediate chamber and the preparatory chamber and to cause the treatment object on the loading platform to be positioned in the preparatory chamber; and opening the preparatory chamber to the exterior to transport the treatment object to the exterior.
Claim 2
Independent Claim
238 words
A method for surface treating of a treatment object comprising the steps of: transporting a treatment object into a preparatory chamber filled with an inert gas and holding the treatment object on a loading platform atop an intermediate cover in the preparatory chamber; closing the preparatory chamber with respect to the exterior; moving said intermediate cover toward an intermediate chamber located adjacent to and communicating with said preparatory chamber, so as to position the loading platform atop the intermediate cover and the treatment object held thereon in said intermediate chamber and to hermetically isolate said preparatory chamber and said intermediate chamber by said intermediate cover; opening an open/close cover, capable of communicating said intermediate chamber with a treatment gas atmosphere chamber adjacent thereto, to cause a treatment gas in said treatment gas atmosphere chamber to flow into the intermediate chamber and to cause the treatment gas to act on the treatment object; closing said open/close cover to isolate the treatment gas atmosphere chamber and the intermediate chamber; introducing an inert gas into said intermediate chamber to purge the treatment gas in the intermediate chamber to the exterior; moving said intermediate cover away from the intermediate chamber to communicate the intermediate chamber and the preparatory chamber and to cause the treatment object on the loading platform to be positioned in the preparatory chamber; and opening the preparatory chamber to the exterior to transport the treatment object to the exterior.
Claim 3
Dependent Claim
39 words
A method for surface treating in accordance with claim 1, further comprising the step of rotating the loading platform and the treatment object held thereby during the step of causing the treatment gas to act on the treatment object.
Claim 4
Dependent Claim
249 words
A surface treatment apparatus for a treatment object comprising: a container; preparatory chamber means formed in said container for receiving the treatment object; loading/unloading passage means provided in the container for transporting the treatment object into and removing the treatment object from said preparatory chamber; intermediate chamber means formed in said container adjacent to said preparatory chamber means; treatment gas atmosphere chamber means including a treatment gas therein and positioned in said container adjacent to said intermediate chamber means; an intermediate cover positioned within said intermediate chamber means and having a loading platform for receiving and holding thereon the treatment object, said intermediate cover being movable between a rearward position allowing transporting the treatment object via said loading/unloading passage means to and from said loading platform and a forward position for positioning the treatment object held on the loading platform in said intermediate chamber means so as to mutually and hermetically seal the preparatory chamber means and the intermediate chamber means; drive means for shifting said intermediate cover between said rearward position and said forward position; an open/close cover positioned between said intermediate chamber means and said treatment gas atmosphere chamber for mutually and hermetically sealing both the chamber means; and drive means for moving said open/close cover when said intermediate cover is at said forward position, so as to expose the treatment object on the loading platform in the intermediate chamber means to the treatment gas and to communicate the intermediate chamber with the treatment gas atmosphere chamber.
Claim 5
Dependent Claim
249 words
A surface treatment apparatus for a treatment object comprising: a container; preparatory chamber means formed in said container for receiving the treatment object; loading/unloading passage means provided in the container for transporting the treatment object into and removing the treatment object from said preparatory chamber; intermediate chamber means formed in said container adjacent to said preparatory chamber means; treatment gas atmosphere chamber means including a treatment gas therein and positioned in said container adjacent to said intermediate chamber means; an intermediate cover positioned within said intermediate chamber means and having a loading platform for receiving and holding thereon the treatment object, said intermediate cover being movable between a rearward position allowing transporting the treatment object via said loading/unloading passage means to and from said loading platform and a forward position for positioning the treatment object held on the loading platform in said intermediate chamber means so as to mutually and hermetically seal the preparatory chamber means and the intermediate chamber means; drive means for shifting said intermediate cover between said rearward position and said forward position; an open/close cover positioned between said intermediate chamber means and said treatment gas atmosphere chamber for mutually and hermetically sealing both the chamber means; and drive means for moving said open/close cover when said intermediate cover is at said forward position, so as to expose the treatment object on the loading platform in the intermediate chamber means to the treatment gas and to communicate the intermediate chamber with the treatment gas atmosphere chamber.
Claim 6
Dependent Claim
31 words
A surface treatment apparatus in accordance with claim 3, further comprising means for supplying an inert gas to said preparatory chamber means, and exhausting a gas from the preparatory chamber means.
Claim 7
Dependent Claim
31 words
A surface treatment apparatus in accordance with claim 3, further comprising means for supplying an inert gas to said intermediate chamber means and exhausting a gas from the intermediate chamber means.
Claim 8
Dependent Claim
45 words
A surface treatment apparatus in accordance with claim 3, wherein said preparatory chamber means is arranged at a low position, said intermediate chamber means is arranged atop the preparatory chamber means, and said treatment gas atmosphere chamber means is arranged atop the intermediate chamber means.
Claim 9
Dependent Claim
44 words
A surface treatment apparatus in accordance with claim 6, wherein said container is provided with an annular shoulder protruding to the inner side at an upper section of said preparatory chamber means, and at said forward position, said intermediate cover hermetically contacts said shoulder.
Claim 10
Dependent Claim
36 words
A surface treatment apparatus in accordance with claim 7, wherein said intermediate chamber is positioned at the inner side of said shoulder, and said loading platform is supported at the upper face of said intermediate cover.
Claim 11
Dependent Claim
47 words
A surface treatment apparatus in accordance with claim 7, wherein at an upper part of said shoulder, a rising inner circumference wall is provided so as to define said intermediate chamber, and at an upper face of said inner circumference wall, said open/close cover is hermetically contacted.
Claim 12
Dependent Claim
33 words
A surface treatment apparatus in accordance with claim 9, wherein an annular liquid containing chamber is provided around said inner circumference wall, to form a portion of said treatment gas atmosphere chamber means.
Claim 13
Dependent Claim
35 words
A surface treatment apparatus in accordance with claim 3, wherein said loading platform is supported on said intermediate cover in a manner that allows rotation, and drive means is provided for rotating the loading platform.
Claim 14
Dependent Claim
306 words
A treatment object film forming apparatus comprising robot chamber means, treatment object transporting means within the robot chamber means, treatment object loading/unloading chamber means connected via a gate valve to said robot chamber, and treatment chamber means for forming a film on the treatment object, connected via a gate valve to said robot chamber means; said apparatus further comprising a preparatory surface treatment apparatus which comprises: a container; preparatory chamber means formed in said container for receiving the treatment object; loading/unloading passage means provided in the container for transporting the treatment object into and removing the treatment object from said preparatory chamber; intermediate chamber means formed in said container adjacent to said preparatory chamber means; treatment gas atmosphere chamber means including a treatment gas therein and positioned in said container adjacent to said intermediate chamber means; an intermediate cover positioned within said intermediate chamber means and having a loading platform for receiving and holding thereon the treatment object, said intermediate cover being movable between a rearward position allowing transporting the treatment object via said loading/unloading passage means to and from said loading platform and a forward position for positioning the treatment object held on the loading platform in said intermediate chamber means so as to mutually and hermetically seal the preparatory chamber means and the intermediate chamber means; drive means for shifting said intermediate cover between said rearward position and said forward position; an open/close cover positioned between said intermediate chamber means and said treatment gas atmosphere chamber for mutually and hermetically sealing both the chamber means; and drive means for moving said open/close cover when said intermediate cover is at said forward position, so as to expose the treatment object on the loading platform in the intermediate chamber means to the treatment gas and to communicate the intermediate chamber with the treatment gas atmosphere chamber.
Claim 15
Dependent Claim
306 words
A treatment object film forming apparatus comprising robot chamber means, treatment object transporting means within the robot chamber means, treatment object loading/unloading chamber means connected via a gate valve to said robot chamber, and treatment chamber means for forming a film on the treatment object, connected via a gate valve to said robot chamber means; said apparatus further comprising a preparatory surface treatment apparatus which comprises: a container; preparatory chamber means formed in said container for receiving the treatment object; loading/unloading passage means provided in the container for transporting the treatment object into and removing the treatment object from said preparatory chamber; intermediate chamber means formed in said container adjacent to said preparatory chamber means; treatment gas atmosphere chamber means including a treatment gas therein and positioned in said container adjacent to said intermediate chamber means; an intermediate cover positioned within said intermediate chamber means and having a loading platform for receiving and holding thereon the treatment object, said intermediate cover being movable between a rearward position allowing transporting the treatment object via said loading/unloading passage means to and from said loading platform and a forward position for positioning the treatment object held on the loading platform in said intermediate chamber means so as to mutually and hermetically seal the preparatory chamber means and the intermediate chamber means; drive means for shifting said intermediate cover between said rearward position and said forward position; an open/close cover positioned between said intermediate chamber means and said treatment gas atmosphere chamber for mutually and hermetically sealing both the chamber means; and drive means for moving said open/close cover when said intermediate cover is at said forward position, so as to expose the treatment object on the loading platform in the intermediate chamber means to the treatment gas and to communicate the intermediate chamber with the treatment gas atmosphere chamber.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-23 | 1997-11-22 | 1998-05-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-23 | 2001-11-22 | 2002-05-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-23 | 2005-11-22 | 2006-05-24 | $7700.00 | Window Closed / Lapsed |