US5314540A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for forming diamond film
Assignee: Denso Corp
•
Filing: 1992-03-23
•
Granted: 1994-05-24
•
Expires: 2012-03-23
Abstract
Abstract Apparatus and process for synthesizing a diamond film of high purity at a high rate. Mixture gas of hydrocarbon gas and hydrogen gas is introduced into an arc discharge to produce a gas plasma. This gas plasma is blown against a substrate to deposit diamond. A plasma current power supply is connected with a third electrode disposed above the substrate to place the third electrode at a positive potential. An electrical current is supplied into the gas plasma from the third electrode. Flow of the electrical current through the plasma promotes the decomposition of the hydrogen and hydrocarbon. A diamond film of high purity can be deposited at a high rate. The invention is characterized in that the substrate is placed at a lower potential than the third electrode or the direction of the electrical current intersects the flow of the gas plasma although the electrical current is passed through the plasma. Therefore, it is unlikely that the accelerated electrons reach the substrate, elevating its temperature. Hence, diamond of high quality can be synthesized.
Inventors
- 👤 Satoshi Nakamura
- 👤 Minoru Yamamoto
- 👤 Nobuei Ito
- 👤 Tadasi Hattori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:48
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/276; C23C16/44; C23C16/50; C23C16/513; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32055; H01J37/32431; H01J37/32532; H01J37/32587
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
171 words
An apparatus for forming a diamond film, comprising: a vacuum vessel the inside of which is maintained at a given degree of vacuum; a positive electrode and a negative electrode which are disposed opposite to each other inside the vacuum vessel; an arc discharge power supply which is electrically connected with the positive and negative electrodes to supply a given electric power into the space between the positive and negative electrodes to produce an arc discharge in the space; a gas supply means which supplies raw material gases including hydrogen and carbon containing gas into the arc discharge to produce a gas plasma and which blows this gas plasma against a substrate located downstream of the gas plasma; a third electrode disposed between the substrate and the region in which the gas plasma is produced; a plasma current power supply for passing an electrical current from the third electrode into the gas plasma; and an inhibiting means which inhibits flow of positive electrical current from the substrate to the third electrode.
Claim 2
Independent Claim
171 words
An apparatus for forming a diamond film, comprising: a vacuum vessel the inside of which is maintained at a given degree of vacuum; a positive electrode and a negative electrode which are disposed opposite to each other inside the vacuum vessel; an arc discharge power supply which is electrically connected with the positive and negative electrodes to supply a given electric power into the space between the positive and negative electrodes to produce an arc discharge in the space; a gas supply means which supplies raw material gases including hydrogen and carbon containing gas into the arc discharge to produce a gas plasma and which blows this gas plasma against a substrate located downstream of the gas plasma; a third electrode disposed between the substrate and the region in which the gas plasma is produced; a plasma current power supply for passing an electrical current from the third electrode into the gas plasma; and an inhibiting means which inhibits flow of positive electrical current from the substrate to the third electrode.
Claim 3
Dependent Claim
77 words
An apparatus for forming a diamond film as set forth in claim 1, wherein the direction of the flow of electrical current from the third electrode into the gas plasma is substantially parallel to the flow of the gas plasma, and wherein said inhibiting means is a substrate potential-setting means which sets the potential of the substrate in such a way that the flow of positive electrical current from the substrate to the third electrode is inhibited.
Claim 4
Dependent Claim
29 words
An apparatus for forming a diamond film as set forth in claim 2, wherein said substrate potential-setting means places the substrate at the same potential as the third electrode.
Claim 5
Dependent Claim
29 words
An apparatus for forming a diamond film as set forth in claim 2, wherein said substrate potential-setting means places the substrate at a lower potential than the third electrode.
Claim 6
Dependent Claim
24 words
An apparatus for forming a diamond film as set forth in claim 4, wherein said substrate potential-setting means places the substrate at ground potential.
Claim 7
Dependent Claim
71 words
An apparatus for forming a diamond film as set forth in claim 1, wherein said inhibiting means is a fourth electrode which is in opposed facing relation to the third electrode, said fourth electrode being disposed such that and connected with the plasma current power supply such that the direction of the flow of electrical current from the third electrode into the gas plasma intersects the flow of the gas plasma.
Claim 8
Independent Claim
210 words
An apparatus for forming a diamond film, comprising: a vacuum vessel the inside of which is maintained at a given degree of vacuum; a positive electrode and a negative electrode which are disposed opposite to each other inside the vacuum vessel; an arc discharge power supply which is electrically connected with the positive and negative electrodes to supply a given electric power into the space between the positive and negative electrodes to produce an arc discharge in the space; a gas supply means which supplies raw material gases including hydrogen and carbon containing gas into the arc discharge to produce a gas plasma and which blows this gas plasma against a substrate located downstream of the gas plasma; a third electrode disposed between the substrate and the region in which the gas plasma is produced; a plasma current power supply for passing an electrical current from the third electrode to the positive or negative electrode via the gas plasma; and a substrate potential-setting means which sets the potential of the substrate in such a way that the third electrode is placed at the same potential as the substrate or at a higher potential than the substrate, to inhibit flow of positive electrical current from the substrate to the third electrode.
Claim 9
Independent Claim
210 words
An apparatus for forming a diamond film, comprising: a vacuum vessel the inside of which is maintained at a given degree of vacuum; a positive electrode and a negative electrode which are disposed opposite to each other inside the vacuum vessel; an arc discharge power supply which is electrically connected with the positive and negative electrodes to supply a given electric power into the space between the positive and negative electrodes to produce an arc discharge in the space; a gas supply means which supplies raw material gases including hydrogen and carbon containing gas into the arc discharge to produce a gas plasma and which blows this gas plasma against a substrate located downstream of the gas plasma; a third electrode disposed between the substrate and the region in which the gas plasma is produced; a plasma current power supply for passing an electrical current from the third electrode to the positive or negative electrode via the gas plasma; and a substrate potential-setting means which sets the potential of the substrate in such a way that the third electrode is placed at the same potential as the substrate or at a higher potential than the substrate, to inhibit flow of positive electrical current from the substrate to the third electrode.
Claim 10
Dependent Claim
39 words
An apparatus for forming a diamond film as set forth in claim 7, wherein said third electrode is annular, and wherein said gas plasma containing a carbon source gas is blown against the substrate through the annular third electrode.
Claim 11
Dependent Claim
56 words
An apparatus for forming a diamond film as set forth in claim 8, wherein an insulator is disposed between the positive or negative electrode and the third electrode around the flow of the gas plasma so that an electrical current may flow from the third electrode to the positive or negative electrode via the gas plasma.
Claim 12
Dependent Claim
69 words
An apparatus for forming a diamond film as set forth in claim 8, wherein the distance of the third electrode from the substrate is so set that increase in the temperature of the substrate due to the electrical current passed through the gas plasma is prevented, and wherein the electrical current passed through the gas plasma by the plasma current power supply is set larger than about 20 A.
Claim 13
Dependent Claim
69 words
An apparatus for forming a diamond film as set forth in claim 7, wherein the distance of the third electrode from the substrate is so set that increase in the temperature of the substrate due to the electrical current passed through the gas plasma is prevented, and wherein the electrical current passed through the gas plasma by the plasma current power supply is set larger than about 20 A.
Claim 14
Independent Claim
286 words
An apparatus for forming a diamond film, comprising: a vacuum vessel the inside of which is maintained at a given degree of vacuum; a positive electrode and a negative electrode which are disposed opposite to each other inside the vacuum vessel; an arc discharge power supply which is electrically connected with the positive and negative electrodes to supply a given electric power into the space between the positive and negative electrodes to produce an arc discharge in the space; a gas supply means which supplies raw material gases including hydrogen and carbon containing gas into the arc discharge to produce a gas plasma; a gas plasma ejection means which narrows down the flow of the gas plasma and blows the gas plasma as a plasma jet against a substrate located downstream of the gas plasma; an annular positive electrode through which the plasma jet passes and which is disposed at or near the position where the plasma jet assumes its maximum diameter between the substrate and the region in which the gas plasma is produced, the inside diameter A of the annular positive electrode being so set that the relation A≦5B holds, where B is the diameter of the restrictor of the gas plasma ejection means; a plasma current power supply for passing an electrical current from the annular positive electrode into the plasma jet to promote decomposition of the raw material gases; and a substrate potential-setting means which sets the potential of the substrate in such a way that the annular positive electrode is placed at the same potential as the substrate or at a higher potential than the substrate, to inhibit flow of positive electrical current from the substrate to the annular positive electrode.
Claim 15
Independent Claim
286 words
An apparatus for forming a diamond film, comprising: a vacuum vessel the inside of which is maintained at a given degree of vacuum; a positive electrode and a negative electrode which are disposed opposite to each other inside the vacuum vessel; an arc discharge power supply which is electrically connected with the positive and negative electrodes to supply a given electric power into the space between the positive and negative electrodes to produce an arc discharge in the space; a gas supply means which supplies raw material gases including hydrogen and carbon containing gas into the arc discharge to produce a gas plasma; a gas plasma ejection means which narrows down the flow of the gas plasma and blows the gas plasma as a plasma jet against a substrate located downstream of the gas plasma; an annular positive electrode through which the plasma jet passes and which is disposed at or near the position where the plasma jet assumes its maximum diameter between the substrate and the region in which the gas plasma is produced, the inside diameter A of the annular positive electrode being so set that the relation A≦5B holds, where B is the diameter of the restrictor of the gas plasma ejection means; a plasma current power supply for passing an electrical current from the annular positive electrode into the plasma jet to promote decomposition of the raw material gases; and a substrate potential-setting means which sets the potential of the substrate in such a way that the annular positive electrode is placed at the same potential as the substrate or at a higher potential than the substrate, to inhibit flow of positive electrical current from the substrate to the annular positive electrode.
Claim 16
Dependent Claim
74 words
An apparatus for forming a diamond film as set forth in claim 12, wherein the distance of the annular positive electrode from the substrate is so set that increase in the substrate temperature due to the electrical current passed through the gas plasma by the plasma current power supply is prevented, and wherein the electrical current passed through the gas plasma by the plasma current power supply is set larger than about 20 A.
Claim 17
Independent Claim
186 words
An apparatus for forming a diamond film, comprising: a vacuum vessel the inside of which is maintained at a given degree of vacuum; a positive and a negative electrodes which are disposed opposite to each other inside the vacuum vessel; an arc discharge power supply which is electrically connected with the positive and negative electrodes to supply a given electric power into the space between the positive and negative electrodes to produce an arc discharge in the space; a gas supply means which supplies raw material gases including hydrogen and carbon containing gas into the arc discharge to produce a gas plasma and which blows this gas plasma against a substrate located downstream of the gas plasma; at least one, pair of opposite electrodes disposed on opposite sides of the flow of the gas plasma directed toward the substrate between the substrate and the region in which the gas plasma is produced; and a plasma current power supply which applies an electric field between the opposite electrodes to pass an electrical current through the gas plasma in a direction intersecting the flow of the gas plasma.
Claim 18
Independent Claim
186 words
An apparatus for forming a diamond film, comprising: a vacuum vessel the inside of which is maintained at a given degree of vacuum; a positive and a negative electrodes which are disposed opposite to each other inside the vacuum vessel; an arc discharge power supply which is electrically connected with the positive and negative electrodes to supply a given electric power into the space between the positive and negative electrodes to produce an arc discharge in the space; a gas supply means which supplies raw material gases including hydrogen and carbon containing gas into the arc discharge to produce a gas plasma and which blows this gas plasma against a substrate located downstream of the gas plasma; at least one, pair of opposite electrodes disposed on opposite sides of the flow of the gas plasma directed toward the substrate between the substrate and the region in which the gas plasma is produced; and a plasma current power supply which applies an electric field between the opposite electrodes to pass an electrical current through the gas plasma in a direction intersecting the flow of the gas plasma.
Claim 19
Dependent Claim
31 words
An apparatus for forming a diamond film as set forth in claim 14, wherein said opposite electrodes can be moved relative to the substrate around the flow of the gas plasma.
Claim 20
Dependent Claim
31 words
An apparatus for forming a diamond film as set forth in claim 14, wherein the electrode surf aces of the opposite electrodes are exposed to the flow of the gas plasma.
Claim 21
Dependent Claim
34 words
An apparatus for forming a diamond film as set forth in claim 14, wherein said plasma current power supply is a DC power supply which applies a DC electric field between the opposite electrodes.
Claim 22
Dependent Claim
34 words
An apparatus for forming a diamond film as set forth in claim 14, wherein said plasma current power supply is an AC power supply which applies an alternating electric field between the opposite electrodes.
References Cited (Backward Citations)
JPS60127292A
Cited
US4767608A
Cited
US4851254A
Cited
US4830702A
Cited
JPH01164796A
Cited
JPH02160696A
Cited
JPH02217396A
Cited
JPH0388799A
Cited
US5094878A
Cited
JPH03131598A
Cited
US5099788A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-23 | 1997-11-22 | 1998-05-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-23 | 2001-11-22 | 2002-05-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-23 | 2005-11-22 | 2006-05-24 | $7700.00 | Window Closed / Lapsed |