Integrated monolithic gyroscopes/accelerometers with logic circuits

Claim 2

An inertial guidance system comprising gyroscopic apparatus providing three gyroscopic outputs, each of the three gyroscopic outputs being indicative of rotational movement of the system about a different one of three mutually orthogonal axes, the apparatus being formed on a semiconductor substrate, and control circuitry formed on the same semiconductor substrate and electrically connected to the gyroscopic apparatus for controlling the gyroscopic apparatus and receiving the three gyroscopic outputs.

Claim 3

An inertial guidance system as claimed in claim 1 including in addition accelerometer apparatus formed on the single substrate and providing three acceleration outputs, each of the three acceleration outputs being indicative of acceleration along a different one of three mutually orthogonal axes.

Claim 4

An inertial guidance system as claimed in claim 2 including in addition control apparatus electrically connected to the accelerometer apparatus and formed on the single semiconductor substrate.

Claim 5

An inertial guidance system as claimed in claim 2 wherein the accelerometer apparatus is a single three axis accelerometer.

Claim 6

An inertial guidance system as claimed in claim 2 wherein the three mutually orthogonal axes along which the accelerometer apparatus provides acceleration outputs are the same three mutually orthogonal axes about which the gyroscopic apparatus provides gyroscopic outputs.

Claim 7

An inertial guidance system comprising: a semiconductor substrate; rotational vibration gyroscope apparatus formed on the substrate and providing gyroscopic outputs about three mutually orthogonal axes, the gyroscopic apparatus including a single, substantially centrally located mounting post fixedly attached to a base and defining a first axis, a mass positioned in and defining a plane perpendicular to the post, helical springs affixed at one end to the post and at another end to the mass, and mounting the mass for oscillatory rotary movement about the post, oscillatory motion driving apparatus mounted adjacent to the mass for causing the mass to move in an oscillatory rotary motion about the first axis, and sensing apparatus, positioned adjacent to the mass and defining second and third axes mutually perpendicular to each other and to the first axis, for sensing movement of the mass about the third axis in response to movement of the gyroscope about the second axis and for sensing movement of the mass about the second axis in response to movement of the gyroscope about the third axis; and control circuitry formed on the same semiconductor substrate and electrically connected to the gyroscopic apparatus for controlling the gyroscopic apparatus and receiving the gyroscopic outputs.

Claim 8

An inertial guidance system comprising: a semiconductor substrate; rotational vibration gyroscope apparatus formed on the substrate and providing gyroscopic outputs about three mutually orthogonal axes, the gyroscopic apparatus including a single, substantially centrally located mounting post fixedly attached to a base and defining a first axis, a mass positioned in and defining a plane perpendicular to the post, helical springs affixed at one end to the post and at another end to the mass, and mounting the mass for oscillatory rotary movement about the post, oscillatory motion driving apparatus mounted adjacent to the mass for causing the mass to move in an oscillatory rotary motion about the first axis, and sensing apparatus, positioned adjacent to the mass and defining second and third axes mutually perpendicular to each other and to the first axis, for sensing movement of the mass about the third axis in response to movement of the gyroscope about the second axis and for sensing movement of the mass about the second axis in response to movement of the gyroscope about the third axis; and control circuitry formed on the same semiconductor substrate and electrically connected to the gyroscopic apparatus for controlling the gyroscopic apparatus and receiving the gyroscopic outputs.

Claim 9

An inertial guidance system as claimed in claim 6 wherein the base includes a substrate with a generally planar upper surface and the mass is a generally disk shaped layer of semiconductor material lying in and defining the plane, the plane further being parallel to and spaced from the planar upper surface of the substrate.

Claim 10

An inertial guidance system as claimed in claim 7 wherein the sensing apparatus includes first plates positioned in parallel to and adjacent the mass for sensing movement about the third axis in response to movement of the gyroscope about the second axis and second plates positioned in parallel to and adjacent the mass for sensing movement about the second axis in response to movement of the gyroscope about the third axis.

Claim 11

An inertial guidance system comprising: a semiconductor substrate; a three axis accelerometer formed on the substrate and including a plurality of layers of conductive material each generally defining a plane and each mounted so the defined planes are parallel with and in spaced relation to each other, a first of the layers being fixedly mounted and with a second layer being mounted for limited movement relative to the first layer, the first and second layers forming a first capacitance varying in accordance with acceleration of the accelerometer along a first axis defined by the first and second layers, first and second structures formed as a portion of the first and the second layers, respectively, and positioned in parallel juxtaposition, the second structures being moveable with the second layer and relative to the first layer, the first and second structures being further formed to define second and third axes mutually orthogonal with each other and the first axis, and variable capacitances being formed between the first and second structures, which capacitances vary in accordance with acceleration in the second and third axes, respectively; and control electronics formed on the substrate and connected to the three axis accelerometer for control and operation thereof.

Claim 12

An inertial guidance system comprising: a semiconductor substrate; a three axis accelerometer formed on the substrate and including a plurality of layers of conductive material each generally defining a plane and each mounted so the defined planes are parallel with and in spaced relation to each other, a first of the layers being fixedly mounted and with a second layer being mounted for limited movement relative to the first layer, the first and second layers forming a first capacitance varying in accordance with acceleration of the accelerometer along a first axis defined by the first and second layers, first and second structures formed as a portion of the first and the second layers, respectively, and positioned in parallel juxtaposition, the second structures being moveable with the second layer and relative to the first layer, the first and second structures being further formed to define second and third axes mutually orthogonal with each other and the first axis, and variable capacitances being formed between the first and second structures, which capacitances vary in accordance with acceleration in the second and third axes, respectively; and control electronics formed on the substrate and connected to the three axis accelerometer for control and operation thereof.

Claim 13

An inertial guidance system comprising gyroscopic apparatus providing gyroscopic outputs about three mutually orthogonal axes and acceleration sensing apparatus providing acceleration outputs along three mutually orthogonal axes, the gyroscopic and acceleration sensing apparatus being formed on a single semiconductor substrate, and control circuitry formed on the same semiconductor substrate and electrically connected to the gyroscopic and acceleration sensing apparatus for controlling the gyroscopic and acceleration sensing apparatus and receiving the gyroscopic and acceleration outputs.

Claim 14

An inertial guidance system comprising gyroscopic apparatus providing gyroscopic outputs about three mutually orthogonal axes and acceleration sensing apparatus providing acceleration outputs along three mutually orthogonal axes, the gyroscopic and acceleration sensing apparatus being formed on a single semiconductor substrate, and control circuitry formed on the same semiconductor substrate and electrically connected to the gyroscopic and acceleration sensing apparatus for controlling the gyroscopic and acceleration sensing apparatus and receiving the gyroscopic and acceleration outputs.

Claim 15

An inertial guidance system as claimed in claim 10 wherein the control circuitry includes temperature measuring apparatus and circuitry coupled to the gyroscopic apparatus and the acceleration sensing apparatus for temperature calibration of substantially all functions of the gyroscopic apparatus and the acceleration sensing apparatus.