US5308222A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Noncentering specimen prealigner
Assignee: KENSINGTON LABORATORIES LLC
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Filing: 1991-05-17
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Granted: 1994-05-03
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Expires: 2011-05-17
Abstract
Abstract A prealigner (10) employs an X-Y stage (20) and a rotary stage (26) to position and orient a specimen (12) without centering it on the prealigner. In a preferred embodiment, the rotary stage is mounted on the X-Y stage and receives a semiconductor (12) in a substantially arbitrary position and orientation. The prealigner employs the rotary stage and translation in only an X-axis direction to scan the peripheral edge (76) of the wafer across an optical scanning assembly (36) to form a polar coordinate map of the wafer. A microprocessor (162) determines the location and orientation of the wafer from the map and cooperates with a motor drive controller (122) to generate control signals for positioning and orienting the wafer in the preselected alignment without changing the location at which the wafer is held.
Inventors
- 👤 Paul E. Bacchi
- 👤 Paul S. Filipski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 07:01
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/53; B; B65; B65G; B65G47/00; B65G47/22; B65G47/24; B65G2203/00; B65G2203/04; B65G2203/042; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
209 words
A specimen prealigner for positioning in a preselected alignment a specimen having a peripheral edge with plural contours having contour transitions between them, the preselected alignment including a selected position and a selected orientation, comprising: holding means for releasibly holding the specimen at a first specimen location; edge detecting means for detecting the peripheral edge of the specimen and forming a map of the specimen, the edge detecting means including first and second light emitters that direct light beams toward the peripheral edge of the specimen and first and second light detectors that receive the light beams after they strike the specimen, the first light emitter and first light detector cooperating to detect the peripheral edge of the specimen and the second light emitter and the second light detector cooperating to detect the contour transitions before they are scanned by the first light emitter and first light detector, thereby to allow the contours and contour transitions to be scanned at respective first and second scan rates; and positioning means coupled to the specimen holding means and responsive to the map formed by the edge detecting means for positioning the specimen in the preselected alignment without changing the first specimen location at which the holding means releasibly holds the specimen.
Claim 2
Dependent Claim
209 words
A specimen prealigner for positioning in a preselected alignment a specimen having a peripheral edge with plural contours having contour transitions between them, the preselected alignment including a selected position and a selected orientation, comprising: holding means for releasibly holding the specimen at a first specimen location; edge detecting means for detecting the peripheral edge of the specimen and forming a map of the specimen, the edge detecting means including first and second light emitters that direct light beams toward the peripheral edge of the specimen and first and second light detectors that receive the light beams after they strike the specimen, the first light emitter and first light detector cooperating to detect the peripheral edge of the specimen and the second light emitter and the second light detector cooperating to detect the contour transitions before they are scanned by the first light emitter and first light detector, thereby to allow the contours and contour transitions to be scanned at respective first and second scan rates; and positioning means coupled to the specimen holding means and responsive to the map formed by the edge detecting means for positioning the specimen in the preselected alignment without changing the first specimen location at which the holding means releasibly holds the specimen.
Claim 3
Dependent Claim
64 words
The prealigner of claim 1 in which the peripheral edge of the specimen lies substantially in a plane and in which the positioning means includes rotation means for rotating the specimen about a rotational axis that is perpendicular to the plane of the specimen and translating means for translating the specimen in first and second transverse directions that are substantially parallel to the plane.
Claim 4
Dependent Claim
19 words
The prealigner of claim 2 in which the first and second transverse directions are substantially perpendicular to each other.
Claim 5
Dependent Claim
14 words
The prealigner of claim 2 in which the translating means carries the rotation means.
Claim 6
Dependent Claim
36 words
The prealigner of claim 2 in which the positioning means cooperates with the edge detecting means to move the peripheral edge of the specimen past the edge detecting means to form the map of the specimen.
Claim 7
Dependent Claim
31 words
The prealigner of claim 5 in which the positioning means employs the rotation means and translation in only the first direction to move the peripheral edge past the edge detecting means.
Claim 8
Dependent Claim
38 words
The prealigner of claim 5 in which the edge detecting means includes an edge detecting element having a fixed position that is collinear with the rotational axis along a line that is substantially parallel to the first direction.
Claim 9
Dependent Claim
39 words
The prealigner of claim 1 in which the light beam striking the specimen is substantially reflected by it and in which the light detector is positioned adjacent the light emitter to receive the light beam after it is reflected.
Claim 10
Dependent Claim
98 words
The prealigner of claim 1 in which the peripheral edge of the specimen includes adjacent edge segments of first and second contours with a contour transition between them, the first and second contours are scanned at a first scan rate and the contour transition is scanned at a second scan rate, and the prealigner further comprises contour predicting means for predicting whether the edge detecting means will scan the contour transition and for generating a corresponding contour prediction signal, the positioning means scanning the contour transition at the second scan rate in response to the contour prediction signal.
Claim 11
Dependent Claim
59 words
The prealigner of claim 9 in which the positioning means is capable of moving the peripheral edge of the specimen past the edge detecting means selectively in first and second directions, and in which the contour predicting means is capable of predicting a contour transition whenever the peripheral edge is moved in either of the first and second directions.
Claim 12
Dependent Claim
207 words
A specimen prealigner for positioning in a preselected alignment a specimen having a peripheral edge that includes adjacent edge segments of first and second contours with a contour transition between them, comprising: edge detecting means for detecting the peripheral edge of the specimen, the edge detecting means including a first light emitter that directs a light beam toward the peripheral edge of the specimen and a corresponding light detector that receives the light beam after it strikes the specimen; scanning means for scanning the first and second contours of the peripheral edge past the edge detecting means at a first scan rate and for scanning the contour transition past the edge detecting means at a second scan rate; and contour predicting means for predicting whether the edge detecting means will scan the contour transition and for generating a corresponding contour prediction signal, the scanning means including a second light emitter that directs a light beam toward the peripheral edge of the specimen and a corresponding light detector that receives the light beam after it strikes the specimen, and the scanning means being responsive to the contour prediction signal to scan the peripheral edge with the edge detecting means along the contour transition at the second scan rate.
Claim 13
Dependent Claim
207 words
A specimen prealigner for positioning in a preselected alignment a specimen having a peripheral edge that includes adjacent edge segments of first and second contours with a contour transition between them, comprising: edge detecting means for detecting the peripheral edge of the specimen, the edge detecting means including a first light emitter that directs a light beam toward the peripheral edge of the specimen and a corresponding light detector that receives the light beam after it strikes the specimen; scanning means for scanning the first and second contours of the peripheral edge past the edge detecting means at a first scan rate and for scanning the contour transition past the edge detecting means at a second scan rate; and contour predicting means for predicting whether the edge detecting means will scan the contour transition and for generating a corresponding contour prediction signal, the scanning means including a second light emitter that directs a light beam toward the peripheral edge of the specimen and a corresponding light detector that receives the light beam after it strikes the specimen, and the scanning means being responsive to the contour prediction signal to scan the peripheral edge with the edge detecting means along the contour transition at the second scan rate.
Claim 14
Dependent Claim
48 words
The prealigner of claim 11 in which the specimen includes a bar code symbol positioned at a preselected location on the specimen and in which the edge detecting means cooperates with the scanning means to form a specimen mapping that identifies the position of the bar code symbol.
Claim 15
Dependent Claim
71 words
The prealigner of claim 12 in which the specimen substantially reflects the light beam directed from the light emitter of the edge detecting means, the light detector of the edge detecting means is positioned adjacent its corresponding light emitter to receive the light beam directed therefrom and reflected by the specimen, and the scanning means scans the edge detecting means across the bar code symbol to read the bar code symbol.
Claim 16
Dependent Claim
85 words
The prealigner of claim 13 in which the specimen substantially reflects the light beam directed from the light emitter of the contour predicting means, the light detector of the contour predicting means is positioned adjacent its corresponding light emitter to receive the light beam directed therefrom and reflected by the specimen, and the contour predicting means measures the reflectance characteristics of the bar code symbol and generates a corresponding reflectance signal to which the edge detecting means is responsive for reading the bar code symbol.
Claim 17
Dependent Claim
45 words
The prealigner of claim 13 in which the scanning means scans the edge detecting means across the bar code symbol along an arcuate scan path and in which the prealigner further comprises computing means responsive to the reflectance signal for reading the bar code symbol.
Claim 18
Dependent Claim
24 words
The prealigner of claim 13 in which the scanning means scans the edge detecting means across the bar code symbol along a straight-line path.
Claim 19
Dependent Claim
52 words
The prealigner of claim 11 in which the scanning mean is capable of scanning the peripheral edge of the specimen selectively in first and second directions and the contour predicting means is capable of predicting a contour transition whenever the peripheral edge is scanned in either of the first and second directions.
Claim 20
Independent Claim
115 words
A method of positioning in a preselected alignment a specimen having a peripheral edge that includes adjacent edge segments of first and second contours with a contour transition between them, comprising: releasibly holding the specimen at a first specimen location; detecting the peripheral edge of the specimen at plural scan rates, the contour transition being detected at a first scan rate and the first and second contours each being detected at a greater scan rate; forming a map of the specimen from the detecting of the peripheral edge; and in accordance with the map, positioning the specimen for processing in the preselected alignment without changing the first specimen location at which the specimen is held.
Claim 21
Independent Claim
115 words
A method of positioning in a preselected alignment a specimen having a peripheral edge that includes adjacent edge segments of first and second contours with a contour transition between them, comprising: releasibly holding the specimen at a first specimen location; detecting the peripheral edge of the specimen at plural scan rates, the contour transition being detected at a first scan rate and the first and second contours each being detected at a greater scan rate; forming a map of the specimen from the detecting of the peripheral edge; and in accordance with the map, positioning the specimen for processing in the preselected alignment without changing the first specimen location at which the specimen is held.
Claim 22
Dependent Claim
64 words
The method of claim 18 in which the peripheral edge of the specimen lies substantially in a plane and the positioning of the specimen for processing in the preselected alignment includes rotating the specimen about a rotational axis that is perpendicular to the plane of the specimen and translating the specimen in first and second transverse directions that are substantially parallel to the plane.
Claim 23
Dependent Claim
19 words
The method of claim 19 in which the first and second transverse directions are substantially perpendicular to each other.
Claim 24
Dependent Claim
40 words
The method of claim 19 in which the peripheral edge of the specimen is detected by an edge detector and the detection of the peripheral edge includes moving it past the edge detector to form the map of the specimen.
Claim 25
Dependent Claim
32 words
The method of claim 21 in which the moving of the peripheral edge of the specimen past the edge detector includes rotating the specimen and translating it in only the first direction.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-02 | 1997-11-01 | 1998-05-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-02 | 2001-11-01 | 2002-05-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-02 | 2005-11-01 | 2006-05-03 | $7700.00 | Window Closed / Lapsed |