US5301204A
Expired / Lapsed
US
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Porous silicon as a light source for rare earth-doped CaF2 laser
Assignee: Texas Instruments Inc
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Filing: 1992-09-30
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Granted: 1994-04-05
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Expires: 2012-09-30
Abstract
Abstract A method and apparatus (242) generates intense spectral emissions (68) by associating a porous-Si layer (230) with a rare earth-doped CaF 2 film (234) so that the rare earth-doped CaF 2 film absorbs optical emissions (222) from the porous-Si layer (230). Circuitry (228, 244, and 238) associated with the apparatus (242 and 226) activate the porous-Si layer (230) to produce the optical emissions (222). The porous-Si layer (230) may be formed electrically, by chemical vapor deposition, or by anodizing crystalline silicon.
Inventors
- 👤 Chih-Chen Cho
- 👤 Walter M. Duncan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 16:11
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/05; H01S3/06; H01S3/0627; H01S3/14; H01S3/16; H01S3/0602; H01S3/0604; H01S3/063; H01S3/0632; H01S3/0635; H01S3/1601; H01S3/1603; H01S3/1611; H01S3/163; H01S3/1645; H01S3/165; H01S5/00; H01S5/02; H01S5/026; H01S5/04; H01S5/041; H01S5/10; H01S5/18; H01S5/183; H01S5/30; H01S5/32; H01S5/3223; H01S5/3224; H01S5/3227
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
72 words
A microcavity structure for generating intense spectral emissions, comprising: a semiconductor substrate; a CaF 2 thin film comprising a rare earth-dopant for generating said intense spectral emissions in response to said CaF 2 thin film being optically pumped; a reflective cavity-forming medium for forming a cavity to reflect said intense spectral emissions; a porous-Si layer for optically pumping said CaF 2 thin film; and activating circuitry for pumping said porous silicon layer.
Claim 2
Dependent Claim
72 words
A microcavity structure for generating intense spectral emissions, comprising: a semiconductor substrate; a CaF 2 thin film comprising a rare earth-dopant for generating said intense spectral emissions in response to said CaF 2 thin film being optically pumped; a reflective cavity-forming medium for forming a cavity to reflect said intense spectral emissions; a porous-Si layer for optically pumping said CaF 2 thin film; and activating circuitry for pumping said porous silicon layer.
Claim 3
Dependent Claim
11 words
The apparatus of claim 1, wherein said rare earth-dopant comprises Nd.
Claim 4
Dependent Claim
16 words
The apparatus of claim 1, wherein said reflective cavity-forming medium comprises a plurality of Bragg reflectors.
Claim 5
Dependent Claim
24 words
The apparatus of claim 3, wherein said Bragg reflectors number approximately 10 pairs for high reflectivity that produces a vertical surface emitting laser device.
Claim 6
Dependent Claim
33 words
The apparatus of claim 3, wherein said porous-Si layer and said CaF 2 thin films layers are positioned between a plurality of electrodes associated with said activating circuitry for emitting light by electroluminscence.
Claim 7
Dependent Claim
19 words
The apparatus of claim 3, wherein said porous-Si layer is associated with said activating circuitry to be optically pumped.
Claim 8
Dependent Claim
42 words
The apparatus of claim 1, wherein said porous-Si is positioned between said CaF 2 thin film and said semiconductor substrate for forming a surface emitting laser such that said porous-Si layer is located out of the path of said intense spectral emission.
Claim 9
Independent Claim
56 words
A method for providing an optical light source for rare earth-doped CaF 2 thin films comprising the steps of: associating a porous-Si layer with said rare earth-doped CaF 2 thin films so that the rare earth-doped CaF 2 thin film absorbs optical emissions from said porous-Si layer; activating said porous-Si layer to produce said optical emissions.
Claim 10
Independent Claim
56 words
A method for providing an optical light source for rare earth-doped CaF 2 thin films comprising the steps of: associating a porous-Si layer with said rare earth-doped CaF 2 thin films so that the rare earth-doped CaF 2 thin film absorbs optical emissions from said porous-Si layer; activating said porous-Si layer to produce said optical emissions.
Claim 11
Dependent Claim
20 words
The method of claim 8, further comprising the step of activating said porous-Si layer by optically pumping said porous-Si layer.
Claim 12
Dependent Claim
20 words
The method of claim 8, further comprising the step of activating said porous-Si layer by electrically pumping said porous-Si layer.
Claim 13
Dependent Claim
31 words
The method of claim 8, wherein said activating step further comprises the step of activating said porous-Si layer to form optical emissions having wavelengths ranging approximately from 5200 through 9000 Å.
Claim 14
Dependent Claim
15 words
The method of claim 8, further comprising the step of forming said porous-Si layer electrochemically.
Claim 15
Dependent Claim
17 words
The method of claim 8, further comprising the step of forming said porous-Si by anodizing crystalline silicon.
Claim 16
Dependent Claim
28 words
The method of claim 13, further comprising the step of forming said porous-Si from a mixture consisting essentially of amorphous silicon, crystalline silicon, silicon oxide, and silicon hydride.
Claim 17
Dependent Claim
17 words
The method of claim 8, further comprising the step of forming said porous-Si by chemical vapor deposition.
Claim 18
Dependent Claim
18 words
The method of claim 8, further comprising the step of forming said porous-Si layer by a sputtering technique.
Claim 19
Dependent Claim
18 words
The method of claim 16, further comprising the step of sputtering said porous-Si layer by molecular beam epitaxy.
Claim 20
Dependent Claim
141 words
A CaF 2 Nd laser cavity on a substrate material, comprising: a porous-Si layer a CaF 2 :Nd film layer; a first electrode; a second electrode; a first plurality of reflector layers; a second plurality reflector layers; and a substrate material; said porous-Si layer associated with said first electrode and said first plurality of reflector layers for generating a light to photoluminescently pump said CaF 2 :Nd film layer; said CaF 2 :Nd film layer associated between said first plurality of reflector layers and said second plurality of reflector layers for generating an intense spectral emission in response to being photoluminescently pumped by said light from said porous-Si layer; and said first electrode and second electrode for electrically activating said first plurality of reflector layers, said second plurality of reflector layers, said CaF 2 :Nd film layer, and said porous-Si layer.
Claim 21
Dependent Claim
141 words
A CaF 2 Nd laser cavity on a substrate material, comprising: a porous-Si layer a CaF 2 :Nd film layer; a first electrode; a second electrode; a first plurality of reflector layers; a second plurality reflector layers; and a substrate material; said porous-Si layer associated with said first electrode and said first plurality of reflector layers for generating a light to photoluminescently pump said CaF 2 :Nd film layer; said CaF 2 :Nd film layer associated between said first plurality of reflector layers and said second plurality of reflector layers for generating an intense spectral emission in response to being photoluminescently pumped by said light from said porous-Si layer; and said first electrode and second electrode for electrically activating said first plurality of reflector layers, said second plurality of reflector layers, said CaF 2 :Nd film layer, and said porous-Si layer.
References Cited (Backward Citations)
US5193098A
Cited
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