US5300901A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Arrangement for coupling in of microwave energy
Assignee: Schott AG
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Filing: 1992-07-10
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Granted: 1994-04-05
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Expires: 2012-07-10
Abstract
Abstract An arrangement for coupling microwave energy with a reaction chamber, including electrically stable tuning and being, within limits, tolerant against changes in critical dimensions and power fluctuations. A coaxial line between a hollow waveguide and the reaction chamber is of such a structure that it forms, at least together with the reaction chamber, a loss resonator for the microwave frequency employed. The coaxial line can comprise an absorber or, alternatively, can be made of a poorly conductive material. There is also the possibility of downgrading the quality of the resonator by leaving an annular gap between a metal plate and an outer conductor section.
Inventors
- 👤 Harald Krummel
- 👤 Ewald Morsen
- 👤 Helge Vogt
- 👤 Gunter Weidmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 02:11
CPC Classifications
H; H05; H05H; H05H1/00; H05H1/24; H05H1/46; H01; H01J; H01J37/00; H01J37/32; H01P; H01P5/00; H01P5/02; H01P5/08; H01P5/10; H01P5/103
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
166 words
An arrangement for coupling microwave energy into a reaction chamber (14) with a waveguide (2) comprising: (a) a plasma CVD coating device (16) within the reaction chamber (19); (b) a coaxial waveguide (4) located between the waveguide (2) and the reaction chamber (14) wherein (c) the coaxial waveguide (4) and the reaction chamber (14) combine to form a resonator for a predetermined microwave frequency to be employed; (d) the resonator being configured with predetermined losses; (e) the coaxial waveguide (4) including at least first and second sections (5,8) and (6,9), respectively; (f) the first section (5,8) being connected to the waveguide (2) and having a diameter defined by an inner conductor (8) formed by the first section (5,8) of the coaxial waveguide and an outer conductor (5) formed by the first section (5,8) of the coaxial waveguide wherein the diameter increases continuously towards the reaction chamber (14); and (g) wherein said second section (6,9) has a coaxial waveguide section with a constant diameter (D 2 ).
Claim 2
Dependent Claim
166 words
An arrangement for coupling microwave energy into a reaction chamber (14) with a waveguide (2) comprising: (a) a plasma CVD coating device (16) within the reaction chamber (19); (b) a coaxial waveguide (4) located between the waveguide (2) and the reaction chamber (14) wherein (c) the coaxial waveguide (4) and the reaction chamber (14) combine to form a resonator for a predetermined microwave frequency to be employed; (d) the resonator being configured with predetermined losses; (e) the coaxial waveguide (4) including at least first and second sections (5,8) and (6,9), respectively; (f) the first section (5,8) being connected to the waveguide (2) and having a diameter defined by an inner conductor (8) formed by the first section (5,8) of the coaxial waveguide and an outer conductor (5) formed by the first section (5,8) of the coaxial waveguide wherein the diameter increases continuously towards the reaction chamber (14); and (g) wherein said second section (6,9) has a coaxial waveguide section with a constant diameter (D 2 ).
Claim 3
Dependent Claim
22 words
The arrangement according to claim 1, wherein at least portions of the coaxial waveguide (4) are comprised of a poorly conductive material.
Claim 4
Dependent Claim
24 words
The arrangement according to claim 1, wherein at least one component (13) forming the reaction chamber (14) is made of a poorly conductive material.
Claim 5
Dependent Claim
32 words
The arrangement according to claim 1, wherein a vessel section (13), forming the reaction chamber (14) together with a calotte-shaped substrate (12) to be coated, is made of a poorly conductive material.
Claim 6
Dependent Claim
12 words
The arrangement according to claim 1, wherein the coaxial waveguide includes graphite.
Claim 7
Dependent Claim
18 words
The arrangement according to claim 1, wherein a microwave absorber (10) is positioned in the coaxial line (4).
Claim 8
Dependent Claim
25 words
The arrangement according to claim 6, wherein the microwave absorber (10) is a supporting ring holding the inner conductor (9) of the coaxial line (4).
Claim 9
Dependent Claim
15 words
The arrangement according to claim 7, wherein the supporting ring is made of glass ceramic.
Claim 10
Dependent Claim
17 words
The arrangement according to claim 7, wherein the supporting ring is fashioned as a liquid-traversed tube (19).
Claim 11
Dependent Claim
17 words
The arrangement according to claim 9, wherein the tube is made of glass or a synthetic resin.
Claim 12
Dependent Claim
29 words
The arrangement according to claim 7, wherein the spacing of the supporting ring from the reaction chamber (14) is about at least one-half wavelength of the microwave frequency employed.
Claim 13
Dependent Claim
18 words
The arrangement according to claim 11, wherein the spacing amounts to one wavelength of the microwave frequency employed.
Claim 14
Dependent Claim
33 words
The arrangement according to claim 1, wherein the outer conductor (6) of the coaxial waveguide (4) is located at a spacing with respect to a conductive component (13) of the reaction chamber (14).
Claim 15
Dependent Claim
32 words
The arrangement according to claim 1, wherein portions of the microwaveguide (2) are part of the resonator and wherein the microwaveguide (2), serving as the tuning element, has a three-winding transformer (3).
Claim 16
Dependent Claim
31 words
The arrangement according to claim 1, wherein the coaxial line (4) forms the resonator with reaction chamber (14), and the microwaveguide has, as the tuning element, merely a short-circuit plunger (18).
Claim 17
Dependent Claim
28 words
The arrangement according to claim 1, wherein the outer conductor to inner conductor diameter ratio of the first section (5, 8) of the coaxial line (4) is constant.
Claim 18
Dependent Claim
35 words
The arrangement according to claim 1, wherein a coaxial cable is disposed between the microwaveguide (2) and the first section (5, 8) of the coaxial waveguide (4), the coaxial cable being part of the resonator.
Claim 19
Dependent Claim
50 words
The arrangement of claim 1, wherein the first section (8) has a smallest diameter (D 1 ) which is smaller than a diameter of the section chamber (14) and having a largest diameter (D 2 ) which is equal to or greater than the diameter of the reaction chamber (14).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-04-04 | 1997-10-04 | 1998-04-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-04-04 | 2001-10-04 | 2002-04-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-04-04 | 2005-10-04 | 2006-04-05 | $7700.00 | Window Closed / Lapsed |