US5300307A
Expired / Lapsed
US
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Microstructure control of Al-Cu films for improved electromigration resistance
Assignee: National Technology and Engineering Solutions of Sandia LLC
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Filing: 1992-09-14
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Granted: 1994-04-05
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Expires: 2012-09-14
Abstract
Abstract A process for the forming of Al-Cu conductive thin films with reduced electromigration failures is useful, for example, in the metallization of integrated circuits. An improved formation process includes the heat treatment or annealing of the thin film conductor at a temperature within the range of from 200° C. to 300° C. for a time period between 10 minutes and 24 hours under a reducing atmosphere such as 15% H 2 in N 2 by volume. Al-Cu thin films annealed in the single phase region of a phase diagram, to temperatures between 200° C. and 300° C. have θ-phase Al 2 Cu precipitates at the grain boundaries continuously become enriched in copper, due, it is theorized, to the formation of a thin coating of θ-phase precipitate at the grain boundary. Electromigration behavior of the aluminum is, thus, improved because the θ-phase precipitates with copper hinder aluminum diffusion along the grain boundaries. Electromigration, then, occurs mainly within the aluminum grains, a much slower process.
Inventors
- 👤 Darrel R. Frear
- 👤 Joseph R. Michael
- 👤 Alton D. Romig, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 13:28
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/58; C23C14/5806; C22; C22F; C22F1/00; C22F1/04; C22F1/057; C23C14/06; C23C14/14; C23C14/18; C23C14/185; C23C14/584; H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4405; Y; Y10; Y10S; Y10S438/00; Y10S438/927
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
91 words
A process for producing a thin layer conductive aluminum film having reduced electromigration failures, comprising: depositing an aluminum-copper alloy thin film on a substrate; heating said thin film to a first temperature and maintaining said film at said first temperature for a first length of time; and heating said thin film to a second temperature, said second temperature being lower than said first temperature, and maintaining said thin film at said second temperature for a second time period sufficient for copper enrichment to occur at grain boundaries of said thin film.
Claim 2
Dependent Claim
91 words
A process for producing a thin layer conductive aluminum film having reduced electromigration failures, comprising: depositing an aluminum-copper alloy thin film on a substrate; heating said thin film to a first temperature and maintaining said film at said first temperature for a first length of time; and heating said thin film to a second temperature, said second temperature being lower than said first temperature, and maintaining said thin film at said second temperature for a second time period sufficient for copper enrichment to occur at grain boundaries of said thin film.
Claim 3
Dependent Claim
24 words
The process of claim 1, wherein said thin film comprises in the range of from 0.25 to 4.0 percent copper in aluminum by weight.
Claim 4
Dependent Claim
18 words
The process of claim 2, wherein said thin film comprises about 2 percent copper in aluminum by weight.
Claim 5
Dependent Claim
17 words
The process of claim 2, wherein said thin film further comprises about 1 percent silicon by weight.
Claim 6
Dependent Claim
18 words
The process of claim 1, wherein said second temperature is less than the solvus temperature of said film.
Claim 7
Dependent Claim
31 words
The process of claim 1, wherein said heat treatment steps are performed in a reducing atmosphere of forming gas having a composition of about 15 percent hydrogen in nitrogen by volume.
Claim 8
Dependent Claim
20 words
The process of claim 1, wherein said second temperature is in the range of from 200° C. to 300° C.
Claim 9
Dependent Claim
13 words
The process of claim 7, wherein said second temperature is about 300° C.
Claim 10
Dependent Claim
21 words
The process of claim 1, wherein said second time period is in the range of from 10 minutes to 24 hours.
Claim 11
Dependent Claim
14 words
The process of claim 9, wherein said second time period is about 24 hours.
Claim 12
Dependent Claim
14 words
The process of claim 8, wherein said second time period is about 1 hour.
Claim 13
Dependent Claim
71 words
In a process for forming conductive films on a substrate in the manufacture of integrated circuit computer chips wherein an aluminum-copper alloy film is deposited on said substrate, the improvement comprising: heating said thin film to a sufficient temperature and for a sufficient length of time for forming a substantially continuous, coherent copper precipitate along the grain boundaries of the deposited film; and cooling said thin film to a lower temperature.
Claim 14
Dependent Claim
71 words
In a process for forming conductive films on a substrate in the manufacture of integrated circuit computer chips wherein an aluminum-copper alloy film is deposited on said substrate, the improvement comprising: heating said thin film to a sufficient temperature and for a sufficient length of time for forming a substantially continuous, coherent copper precipitate along the grain boundaries of the deposited film; and cooling said thin film to a lower temperature.
Claim 15
Dependent Claim
18 words
The improvement of claim 12, wherein said sufficient length of time is between 10 minutes and 24 hours.
Claim 16
Dependent Claim
22 words
The improvement of claim 13, wherein said sufficient length of time is about 1 hour and said temperature is about 300° C.
Claim 17
Dependent Claim
145 words
A process for producing thin layer conductive films having reduced electromigration failures comprising: sputter depositing an aluminum-copper alloy thin film having about 2 percent copper in aluminum by weight on a substrate at about room temperature; performing a first heat treatment of said thin film, said treatment comprising: heating said thin film to a first temperature above the solvus temperature of said film; maintaining said thin film at said first temperature for a first time period; and cooling said thin film to about room temperature; and performing a second heat treatment of said thin film, said treatment comprising: heating said thin film to a second temperature less than the solvus temperature of said film; maintaining said thin film at said second temperature for a time period sufficient for copper enrichment to occur at aluminum grain boundaries; and cooling said thin film to about room temperature.
Claim 18
Dependent Claim
145 words
A process for producing thin layer conductive films having reduced electromigration failures comprising: sputter depositing an aluminum-copper alloy thin film having about 2 percent copper in aluminum by weight on a substrate at about room temperature; performing a first heat treatment of said thin film, said treatment comprising: heating said thin film to a first temperature above the solvus temperature of said film; maintaining said thin film at said first temperature for a first time period; and cooling said thin film to about room temperature; and performing a second heat treatment of said thin film, said treatment comprising: heating said thin film to a second temperature less than the solvus temperature of said film; maintaining said thin film at said second temperature for a time period sufficient for copper enrichment to occur at aluminum grain boundaries; and cooling said thin film to about room temperature.
Claim 19
Dependent Claim
18 words
The process of claim 1, wherein said first temperature is higher than the solvus temperature of said film.
Claim 20
Dependent Claim
30 words
The process of claim 1, further including cooling said thin film to a third temperature after said first heat treatment, wherein said third temperature is lower than said second temperature.
Claim 21
Dependent Claim
33 words
The process of claim 1, further including the step of cooling said thin film to a third temperature after said second heat treatment, wherein said third temperature is lower than said second temperature.
References Cited (Backward Citations)
US3879840A
Cited
US3848330A
Cited
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