US5298075A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Furnace tube cleaning process
Assignee: Versum Materials US LLC
•
Filing: 1993-07-28
•
Granted: 1994-03-29
•
Expires: 2013-07-28
Abstract
Abstract A process for thermal oxidation of silicon or cleaning of furnace tubes used in semiconductor manufacturing by exposing the silicon or tube to temperatures above 700 degrees C. while flowing a carrier gas containing oxygen and a chlorohydrocarbon having a general formula CxHxClx where x is 2, 3, or 4 over the silicon or tube. The chlorohydrocarbon is selected to readily and completely oxidize at temperature.
Inventors
- 👤 Andre Lagendijk
- 👤 Arthur K. Hochberg
- 👤 David A. Roberts
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 09:53
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401; C23C16/4405; H10P14/6322; H10P70/00; H10P70/20
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
100 words
A process for cleaning furnace tubes used in the manufacture of semiconductor devices comprising the steps of: heating the furnace tube to a temperature in excess of 800° C.; flowing a gaseous mixture of oxygen and a chlorohydrocarbon having the general formula C x H x Cl x wherein x is 2, 3 or 4 in a carrier gas through said tube, said chlorohydrocarbon being selected based upon its being readily and completely oxidized under the stated conditions; and maintaining said tube at temperature and in contact with said mixture in said carrier gas until said tube is sufficiently clean.
Claim 2
Dependent Claim
100 words
A process for cleaning furnace tubes used in the manufacture of semiconductor devices comprising the steps of: heating the furnace tube to a temperature in excess of 800° C.; flowing a gaseous mixture of oxygen and a chlorohydrocarbon having the general formula C x H x Cl x wherein x is 2, 3 or 4 in a carrier gas through said tube, said chlorohydrocarbon being selected based upon its being readily and completely oxidized under the stated conditions; and maintaining said tube at temperature and in contact with said mixture in said carrier gas until said tube is sufficiently clean.
Claim 3
Dependent Claim
11 words
A process according to claim 1 wherein said chlorohydrocarbon is trans-dichloroethylene.
Claim 4
Dependent Claim
11 words
A process according to claim 1 wherein said chlorohydrocarbon is cis-dichloroethylene.
Claim 5
Dependent Claim
11 words
A process according to claim 1 wherein said chlorohydrocarbon is 1,1-dichloroethylene.
Claim 6
Dependent Claim
22 words
A process according to claim 1 wherein said chlorohydrocarbon is selected from the group consisting of trans-dichloroethylene, cis-dichloroethylene, 1,1-dichloroethylene and mixtures thereof.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-28 | 1997-09-27 | 1998-03-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-28 | 2001-09-27 | 2002-03-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-28 | 2005-09-27 | 2006-03-29 | $7700.00 | Window Closed / Lapsed |