US5297480A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High vacuum hot press
Assignee: Hitachi Plant Technologies Ltd
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Filing: 1992-05-06
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Granted: 1994-03-29
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Expires: 2012-05-06
Abstract
Abstract A high vacuum hot press for producing a multi-layer board. The high vacuum hot press includes a pair of heat insulating members each comprising a heat insulating material and a thin metallic cover defining an evacuated hermetic space accommodating therein the heat insulating material. The heat insulating members are arranged on respective surfaces, facing each other on a pair of bolsters. A pair of hot plates are placed on the heat insulating members, respectively. A multi-layer workpiece is disposed between the hot plates in a sealed space in a sealing unit. The multi-layer work includes wafers and an adhesive base material. The sealed space is evacuated to a high vacuum by an evacuating unit, and the multi-layer workpiece is heated by a heating unit under a high vacuum. The high vacuum hot press is further provided with a bonding unit which shifts the bolsters relative to each other to open and close the sealing unit and to bond the wafers of the multi-layer workpiece to each others for producing the multi-layer board.
Inventors
- 👤 Akimi Miyashita
- 👤 Hazime Sato
- 👤 Mutsumasa Fujii
- 👤 Isao Koromegawa
- 👤 Katsunori Shibata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 15:57
CPC Classifications
B; B30; B30B; B30B15/00; B30B15/06; B30B15/062; B30B15/064; B29; B29C; B29C33/00; B29C33/02; B29C33/04; B29C43/00; B29C43/32; B29C43/56; B30B15/061; B32; B32B; B32B37/00; B32B37/10; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0428; B29C35/00; B29C35/02; B29C2035/0211; B29C2043/561; B29C35/04; B29C35/041; B32B2309/00; B32B2309/60; B32B2309/68; B32B2457/00; B32B2457/08; H05; H05K; H05K3/00; H05K3/46; H05K3/4611
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
179 words
A high vacuum hot press including a pair of bolsters arranged to have surfaces opposed to each other; a pair of hot plates each arranged on the surface of the corresponding bolster through heat insulating means and adapted to hold therebetween a multi-layer workpiece including wafers and an adhesive base material; means, disposed between the bolsters, for hermetically enclosing said hot plate and said heat insulating means and defining therein a sealed space; means for shifting said bolsters relative to each other so as to press said workpiece; evacuating means for evacuating the sealed space in the enclosing means to a high vacuum; a heat source for heating the hot plates to heat the workpiece within the sealed space at the high vacuum to thereby bond the wafers of the multi-layer workpiece to each other by curing the adhesive base material, wherein the heat insulating means comprises a thin metallic cover and a heat insulating material enclosed by said thin metallic cover, said thin metallic cover defining a hermetic space in which said heat insulating material is hermetically accommodated.
Claim 2
Dependent Claim
179 words
A high vacuum hot press including a pair of bolsters arranged to have surfaces opposed to each other; a pair of hot plates each arranged on the surface of the corresponding bolster through heat insulating means and adapted to hold therebetween a multi-layer workpiece including wafers and an adhesive base material; means, disposed between the bolsters, for hermetically enclosing said hot plate and said heat insulating means and defining therein a sealed space; means for shifting said bolsters relative to each other so as to press said workpiece; evacuating means for evacuating the sealed space in the enclosing means to a high vacuum; a heat source for heating the hot plates to heat the workpiece within the sealed space at the high vacuum to thereby bond the wafers of the multi-layer workpiece to each other by curing the adhesive base material, wherein the heat insulating means comprises a thin metallic cover and a heat insulating material enclosed by said thin metallic cover, said thin metallic cover defining a hermetic space in which said heat insulating material is hermetically accommodated.
Claim 3
Dependent Claim
24 words
A high vacuum hot press as set forth in claim 1, wherein means is provided for bringing said hermetic space into an evacuated state.
Claim 4
Dependent Claim
33 words
A high vacuum hot press as set forth in one of claims 1 or 2, further comprising exhaust passage means communicating said hermetic space with the evacuating means for evacuating the hermetic space.
Claim 5
Dependent Claim
41 words
A high vacuum hot press as recited in claim 3, wherein the exhaust passage means comprises a duct communicating said hermetic space with the evacuating means, and a restrictor valve arranged in the duct for restricting air flow in the duct.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-28 | 1997-09-27 | 1998-03-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-28 | 2001-09-27 | 2002-03-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-28 | 2005-09-27 | 2006-03-29 | $7700.00 | Window Closed / Lapsed |