US5296674A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser processing method for a thin-film structure
Assignee: Shell Erneuerbare Energien GmbH
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Filing: 1992-09-18
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Granted: 1994-03-22
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Expires: 2012-09-18
Abstract
Abstract A method for eroding material, particularly material in a thin-film structure, that includes at least one thin-film arranged over at least one transparent layer, includes irradiating the thin-film with a laser pulse through the transparent layer. The laser pulse has a wavelength in the absorption region of the thin-film. The irradiated thin-film region, together with any layers lying above the thin-film region, are popped off, without any residue, from the transparent layer.
Inventors
- 👤 Stefan Praschek
- 👤 Wolfgang Riedl
- 👤 Hans Goslowsky
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 14:31
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/18; B23K26/009; B23K26/02; B23K26/06; B23K26/062; B23K26/0622; B23K26/0624; B23K26/36; B23K26/361; H; H10; H10F; H10F19/00; H10F19/30; H10F19/31; H10F19/33; B23K2101/00; B23K2101/36; B23K2101/40; B23K2103/00; B23K2103/02; B23K2103/04; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10S; Y10S438/00; Y10S438/94
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
90 words
A method for eroding material with a laser including the steps of: providing a thin-film structure including at least one thin-film over at least one transparent layer for laser irradiation, said thin-film structure being a thin-film solar cell; and irradiating said thin-film structure through said transparent layer with a laser pulse having a wavelength in an absorption range of said at least one thin-film for popping said thin-film structure off said at least one transparent layer in a region of said laser pulse and in order to form inactive regions.
Claim 2
Independent Claim
90 words
A method for eroding material with a laser including the steps of: providing a thin-film structure including at least one thin-film over at least one transparent layer for laser irradiation, said thin-film structure being a thin-film solar cell; and irradiating said thin-film structure through said transparent layer with a laser pulse having a wavelength in an absorption range of said at least one thin-film for popping said thin-film structure off said at least one transparent layer in a region of said laser pulse and in order to form inactive regions.
Claim 3
Dependent Claim
49 words
A method as claimed in claim 1, further comprising the steps of focusing said laser pulse to a focal spot in said thin-film, and moving said laser pulse relative to said thin-film structure for forming a trench-shaped cutting line in said thin-film structure by successive, overlapping focal spot locations.
Claim 4
Dependent Claim
38 words
A method as claimed in claim 1, further comprising the step of positioning said transparent layer above said thin-film structure, such that said thin-film structure is popped off said transparent layer with the assistance of a gravitational force.
Claim 5
Dependent Claim
44 words
A method as claimed in claim 1, wherein said step of irradiating said thin-film structure is further defined by irradiating said thin-film structure through said transparent layer with a laser pulse having a wavelength in an absorption maximum of said at least one thin-film.
Claim 6
Dependent Claim
39 words
A method as claimed in claim 1, wherein said step of irradiating said thin-film is further defined by irradiating said thin-film structure through said transparent layer with a laser pulse having a pulse length of less than 200 ns.
Claim 7
Dependent Claim
41 words
A method as claimed in claim 1, wherein said step of irradiating said thin-film is further defined by irradiating said thin-film structure through said transparent layer with a laser pulse having a pulse length ranging from 200 ns through 100 ps.
Claim 8
Dependent Claim
40 words
A method as claimed in claim 1, wherein said step of irradiating said thin-film is further defined by irradiating said thin-film structure through said transparent layer with a laser pulse having a frequency ranging from 1 kHz through 100 kHz.
Claim 9
Dependent Claim
40 words
A method as claimed in claim 1, wherein said step of irradiating said thin-film is further defined by irradiating said thin-film structure through said transparent layer with a laser pulse produced by operating said laser in a TEM 00 mode.
Claim 10
Dependent Claim
34 words
A method as claimed in claim 1, further comprising the step of coupling undesired infrared radiation out of said beam path by interposing an optical arrangement in a beam path of said laser pulse.
Claim 11
Independent Claim
98 words
A method for eroding material using a laser comprising the steps of: providing a thin-film structure including at least one thin-film arranged over at least one transparent layer for laser irradiation, said thin-film structure comprising a solar cell; selecting a laser pulse wavelength in an absorption range of said at least one thin-film; and irradiating said thin-film structure through said at least one transparent layer with a laser pulse for popping said thin-film structure off said at least one transparent layer in a region of said laser pulse and to form inactive layer regions in said thin-film structure.
Claim 12
Independent Claim
98 words
A method for eroding material using a laser comprising the steps of: providing a thin-film structure including at least one thin-film arranged over at least one transparent layer for laser irradiation, said thin-film structure comprising a solar cell; selecting a laser pulse wavelength in an absorption range of said at least one thin-film; and irradiating said thin-film structure through said at least one transparent layer with a laser pulse for popping said thin-film structure off said at least one transparent layer in a region of said laser pulse and to form inactive layer regions in said thin-film structure.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-21 | 1997-09-20 | 1998-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-21 | 2001-09-20 | 2002-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-21 | 2005-09-20 | 2006-03-22 | $7700.00 | Window Closed / Lapsed |