US5294760A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Digital pressure switch and method of fabrication
Assignee: University of California
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Filing: 1992-06-23
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Granted: 1994-03-15
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Expires: 2012-06-23
Abstract
Abstract A micromachined pressure switch and method of fabrication from silicon wafers using aligned fusion bonding. Pattern etched thermally grown silicon dioxide insulating pads are used to determine the size of silicon pressure membranes on an upper silicon wafer, with the desired switch gap set by the oxide thickness. The silicon membranes are formed by controlled thinning the upper silicon wafers. V-shaped vent grooves are pattern etched into a bottom silicon wafer to form electrodes to which the insulating pads are fusion bonded. The area between the electrodes and the membrane forms wells of specified sizes into which the membranes deflect upon application of pressure. The pressure switch operates when the membrane is deflected to contact the electrodes in the bottom wafer, and closes at the desired pressure threshold for both directions of pressure change with negligible hysteresis. The method of fabrication applies to a single element pressure switch as well as to an array of pressure switches.
Inventors
- 👤 Robert W. Bower
- 👤 Mohd S. Ismail
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:54
CPC Classifications
H; H01; H01H; H01H35/00; H01H35/24; H01H35/26; H01H35/2657; H01H1/00; H01H1/0036
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
83 words
A solid state pressure switch, comprising: (a) a resilient membrane formed on a first substrate; (b) an electrode formed on a second substrate; (c) an isolation pad, said isolation pad bonded to said membrane and said first substrate, said isolation pad electrically isolating said membrane from said first substrate, said isolation pad separating said membrane from said electrode; (d) a well region disposed between said membrane and said electrode; and (e) a vent extending through said second substrate and into said well region.
Claim 2
Dependent Claim
83 words
A solid state pressure switch, comprising: (a) a resilient membrane formed on a first substrate; (b) an electrode formed on a second substrate; (c) an isolation pad, said isolation pad bonded to said membrane and said first substrate, said isolation pad electrically isolating said membrane from said first substrate, said isolation pad separating said membrane from said electrode; (d) a well region disposed between said membrane and said electrode; and (e) a vent extending through said second substrate and into said well region.
Claim 3
Dependent Claim
28 words
The device recited in claim 1, wherein said first and second substrates consist of silicon, said membrane consists of silicon, and said isolation pad consists of silicon dioxide.
Claim 4
Dependent Claim
35 words
The device recited in claim 1, further comprising a plurality of metal contacts, at least one of said metal contacts bonded to said membrane, at least one of said metal contacts bonded to said electrode.
Claim 5
Dependent Claim
87 words
A pressure switch, comprising: (a) a resilient silicon membrane formed on a first substrate; (b) a silicon dioxide insulator, said insulator bonded to said silicon membrane and said first substrate, said insulator electrically isolating said membrane from said first substrate; (c) a silicon electrode formed on a second substrate, said electrode bonded to said insulator, said insulator separating said membrane from said electrode; (d) a pressure well disposed between said membrane and said electrode; and (e) a vent extending from said pressure well through said second substrate.
Claim 6
Dependent Claim
87 words
A pressure switch, comprising: (a) a resilient silicon membrane formed on a first substrate; (b) a silicon dioxide insulator, said insulator bonded to said silicon membrane and said first substrate, said insulator electrically isolating said membrane from said first substrate; (c) a silicon electrode formed on a second substrate, said electrode bonded to said insulator, said insulator separating said membrane from said electrode; (d) a pressure well disposed between said membrane and said electrode; and (e) a vent extending from said pressure well through said second substrate.
Claim 7
Dependent Claim
44 words
A pressure switch as recited in claim 4, wherein said pressure well comprises the area of separation between said membrane and said electrode, whereby said membrane deflects into said pressure well and electrically contacts said electrode upon application of pressure in a defined amount.
Claim 8
Dependent Claim
37 words
A pressure switch as recited in claim 5, further comprising a plurality of metal contacts, at least one of said metal contacts bonded to said membrane, at least one of said metal contacts bonded to said electrode.
Claim 9
Dependent Claim
102 words
A solid state pressure sensor array, comprising: (a) a first silicon substrate having an electrode region; (b) a second silicon substrate having a region separated into a plurality of isolated membranes by a plurality of isolation pads, said isolation pads bonded to and extending from said second silicon substrate, said isolation pads bonded to said first silicon substrate, said isolation pads separating said membranes from said electrode region; (c) a plurality of membrane contacts, one of each said membrane contacts bonded to a respective one of said plurality of membranes; and (d) at least one electrode contact bonded to said electrode region.
Claim 10
Dependent Claim
102 words
A solid state pressure sensor array, comprising: (a) a first silicon substrate having an electrode region; (b) a second silicon substrate having a region separated into a plurality of isolated membranes by a plurality of isolation pads, said isolation pads bonded to and extending from said second silicon substrate, said isolation pads bonded to said first silicon substrate, said isolation pads separating said membranes from said electrode region; (c) a plurality of membrane contacts, one of each said membrane contacts bonded to a respective one of said plurality of membranes; and (d) at least one electrode contact bonded to said electrode region.
Claim 11
Dependent Claim
50 words
The apparatus recited in claim 7, further comprising a plurality of pressure wells, said pressure wells disposed between said membranes and said electrode region whereby each said membrane deflects into a respective one of said pressure well and electrically contacts said electrode upon application of pressure in a defined amount.
Claim 12
Dependent Claim
24 words
The apparatus recited in claim 8, further comprising a plurality of vent, said vents extending from said pressure wells through said first silicon substrate.
Claim 13
Independent Claim
98 words
A method of fabricating a solid state pressure switch, comprising the steps of: (a) forming a resilient membrane on a first substrate, said first substrate having first and second surfaces, said membrane coplanar with said first substrate, said membrane electrically isolated from said first substrate by an isolation pad extending from said first surface of said first substrate, said isolation pad forming a well region; (b) etching a vent between the surfaces of a second substrate having first and second surfaces; and (c) bonding said isolation pad to said second substrate, said vent extending into said well region.
Claim 14
Independent Claim
98 words
A method of fabricating a solid state pressure switch, comprising the steps of: (a) forming a resilient membrane on a first substrate, said first substrate having first and second surfaces, said membrane coplanar with said first substrate, said membrane electrically isolated from said first substrate by an isolation pad extending from said first surface of said first substrate, said isolation pad forming a well region; (b) etching a vent between the surfaces of a second substrate having first and second surfaces; and (c) bonding said isolation pad to said second substrate, said vent extending into said well region.
Claim 15
Dependent Claim
70 words
The method recited in claim 10, further comprising the steps of: (d) etching an isolation groove of a predetermined depth into said first surface of said first substrate; (e) depositing a thermal oxide layer onto said first surface of said first substrate, said thermal oxide layer extending into said isolation groove; and (f) patterning and selectively removing said thermal oxide layer to form said isolation pad and said pressure well.
Claim 16
Dependent Claim
23 words
The method recited in claim 11, further comprising the step of thinning said second surface of said first substrate to said isolation groove.
Claim 17
Dependent Claim
60 words
The method recited in claim 10, wherein the step of bonding said isolation pad to said second substrate includes the steps of: (d) aligning said isolation pad in relation to said vent; (e) bringing said isolation pad and said second substrate into physical contact at room temperature where atomic bonds are formed without adhesives; and (f) annealing said bonded substrates.
Claim 18
Independent Claim
191 words
A method of fabricating an integrated digital pressure switch array, comprising the steps of: (a) etching a plurality of isolation grooves into the first surface of a first substrate having first and second surfaces, said isolation grooves defining polish stops; (b) etching a plurality of vents in a second substrate having first and second surfaces, said vents extending between said first and second surfaces of said second substrate; (c) depositing an epitaxial layer of thermal oxide on said first surface of said first substrate, said thermal oxide layer extending into said isolation grooves; (d) patterning and selectively removing said thermal oxide layer adjacent to said isolation grooves to form a plurality of pressure wells of varying widths between a plurality of isolation pads extending from said first surface of said first substrate; (e) grinding said second surface of said first substrate to said polish stops to form isolated membranes between said isolation pads; (f) aligning said isolation pads in relation to said vents; (g) bringing said isolation pads into physical contact with said second substrate whereby an atomic bond is formed; and (h) annealing said substrates to strengthen said atomic bond.
Claim 19
Independent Claim
191 words
A method of fabricating an integrated digital pressure switch array, comprising the steps of: (a) etching a plurality of isolation grooves into the first surface of a first substrate having first and second surfaces, said isolation grooves defining polish stops; (b) etching a plurality of vents in a second substrate having first and second surfaces, said vents extending between said first and second surfaces of said second substrate; (c) depositing an epitaxial layer of thermal oxide on said first surface of said first substrate, said thermal oxide layer extending into said isolation grooves; (d) patterning and selectively removing said thermal oxide layer adjacent to said isolation grooves to form a plurality of pressure wells of varying widths between a plurality of isolation pads extending from said first surface of said first substrate; (e) grinding said second surface of said first substrate to said polish stops to form isolated membranes between said isolation pads; (f) aligning said isolation pads in relation to said vents; (g) bringing said isolation pads into physical contact with said second substrate whereby an atomic bond is formed; and (h) annealing said substrates to strengthen said atomic bond.
Claim 20
Dependent Claim
74 words
The method recited in claim 14, further comprising the steps of: (i) depositing a layer of silicon nitride on said first surface of said first substrate; (j) depositing a layer of silicon nitride onto said first surface of said second substrate; (k) patterning said first surface of said first substrate for a plurality of isolation grooves and polish stops; and (l) patterning said first surface of said second substrate for a plurality of vents.
Claim 21
Dependent Claim
33 words
The method recited in claim 15, further comprising the steps of bonding a separate electrical contact to each of said isolated membranes, and bonding at least one electrical contact to said second substrate.
Claim 22
Dependent Claim
129 words
A solid state pressure switch fabrication process, comprising the steps of: (a) etching an isolation groove into the first surface of a first silicon wafer having first and second surfaces; (b) depositing an epitaxial layer of silicon dioxide on said first surface of said first wafer, said silicon dioxide layer extending into said isolation groove; (c) etching a vent between the surfaces of a second silicon wafer; (d) patterning and selectively removing said silicon dioxide layer to form a pressure well and isolation pad extending from said first surface of said first silicon wafer; (e) thinning said second surface of said first wafer to said isolation groove to form a resilient membrane; and (f) bonding said isolation pad to said second wafer, said vent extending into said pressure well.
Claim 23
Dependent Claim
129 words
A solid state pressure switch fabrication process, comprising the steps of: (a) etching an isolation groove into the first surface of a first silicon wafer having first and second surfaces; (b) depositing an epitaxial layer of silicon dioxide on said first surface of said first wafer, said silicon dioxide layer extending into said isolation groove; (c) etching a vent between the surfaces of a second silicon wafer; (d) patterning and selectively removing said silicon dioxide layer to form a pressure well and isolation pad extending from said first surface of said first silicon wafer; (e) thinning said second surface of said first wafer to said isolation groove to form a resilient membrane; and (f) bonding said isolation pad to said second wafer, said vent extending into said pressure well.
Claim 24
Dependent Claim
46 words
The process of claim 17, further comprising the steps (g) aligning said first and second silicon wafers; (h) bringing said isolation pad into physical contact with said second silicon wafer until an atomic bond is formed; and (i) annealing said wafers to strengthen said atomic bond.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-14 | 1997-09-13 | 1998-03-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-14 | 2001-09-13 | 2002-03-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-14 | 2005-09-13 | 2006-03-15 | $7700.00 | Window Closed / Lapsed |