US5294238A
Expired / Lapsed
US
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Glass substrate for a semiconductor device and method for making same
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1992-03-18
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Granted: 1994-03-15
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Expires: 2012-03-18
Abstract
Abstract A glass substrate usable for a semiconductor device which shrinks less during a heating process. Specifically, lithium is added to the glass substrate material prior to formation. Further, the glass substrate can be thermal annealed in advance. In accordance with the present invention, it is possible to reduce substrate shrinkage even during TFT processing, by using glass material including more than 4% by weight of lithium, and further by heating the glass substrate at a temperature below the glass strain point temperature.
Inventors
- 👤 Takeshi Fukada
- 👤 Naoya Sakamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:10
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/34; C03C17/3411; C03C17/3429; C03C17/3435; H; H10; H10W; H10W70/00; H10W70/60; H10W70/67; H10W70/69; H10W70/692; H10W99/00
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
75 words
A method of making a glass substrate for a semiconductor device, said method comprising: adding more than 4% by weight of lithium to a molten glass material to form a lithium containing glass material; forming a glass substrate from said lithium containing glass material; thermal annealing said glass substrate in order to shrink said glass substrate prior to preparing said semiconductor device on said glass substrate; and preparing said semiconductor device on said glass substrate.
Claim 2
Independent Claim
75 words
A method of making a glass substrate for a semiconductor device, said method comprising: adding more than 4% by weight of lithium to a molten glass material to form a lithium containing glass material; forming a glass substrate from said lithium containing glass material; thermal annealing said glass substrate in order to shrink said glass substrate prior to preparing said semiconductor device on said glass substrate; and preparing said semiconductor device on said glass substrate.
Claim 3
Dependent Claim
41 words
A method of making a glass substrate for a semiconductor device according to claim 1, wherein said thermal annealing said glass substrate is at a temperature below a glass strain point of said glass substrate prior to preparing said semiconductor device.
Claim 4
Dependent Claim
31 words
A method of making a glass substrate for a semiconductor device according to claim 2, wherein a silicon oxide film is formed on the glass substrate before said thermal annealing step.
Claim 5
Independent Claim
99 words
A method of making a glass substrate for a semiconductor device, said method comprising: adding more than 4% by weight of lithium to a molten glass material to form a lithium containing glass material; forming a glass substrate from said lithium containing glass material; forming a silicon nitride film having a blocking action to lithium diffusion on the glass substrate; forming a silicon oxide film on said silicon nitride film; and thermal annealing said glass substrate which includes said silicon nitride film and said silicon oxide film at at temperature below a glass strain point of said glass substrate.
Claim 6
Independent Claim
99 words
A method of making a glass substrate for a semiconductor device, said method comprising: adding more than 4% by weight of lithium to a molten glass material to form a lithium containing glass material; forming a glass substrate from said lithium containing glass material; forming a silicon nitride film having a blocking action to lithium diffusion on the glass substrate; forming a silicon oxide film on said silicon nitride film; and thermal annealing said glass substrate which includes said silicon nitride film and said silicon oxide film at at temperature below a glass strain point of said glass substrate.
Claim 7
Dependent Claim
25 words
A method of making a glass substrate for a semiconductor device according to claim 4, wherein said silicon nitride film is less than 1000 Å.
Claim 8
Independent Claim
88 words
A method of making a glass substrate for a semiconductor device, said method comprising: adding more than 4% by weight of lithium to a molten glass material to form a lithium containing glass material; forming a glass substrate from said lithium containing glass material; forming a silicon nitride film, which has a blocking action to lithium diffusion, on said glass substrate; forming a silicon oxide film on said silicon nitride film; and thermal annealing said glass substrate which includes said silicon nitride film and said silicon oxide film.
Claim 9
Independent Claim
88 words
A method of making a glass substrate for a semiconductor device, said method comprising: adding more than 4% by weight of lithium to a molten glass material to form a lithium containing glass material; forming a glass substrate from said lithium containing glass material; forming a silicon nitride film, which has a blocking action to lithium diffusion, on said glass substrate; forming a silicon oxide film on said silicon nitride film; and thermal annealing said glass substrate which includes said silicon nitride film and said silicon oxide film.
Claim 10
Dependent Claim
24 words
A method of making a glass substrate for semiconductor device according to claim 6, wherein said silicon nitride film is less than 1000 Å.
Claim 11
Independent Claim
50 words
A method of making a glass substrate for a semiconductor device comprising the step of: thermal annealing a glass substrate containing more than 4% by weight of lithium at a temperature less than a glass strain point of said glass substrate; and preparing said semiconductor device on said glass substrate.
Claim 12
Independent Claim
50 words
A method of making a glass substrate for a semiconductor device comprising the step of: thermal annealing a glass substrate containing more than 4% by weight of lithium at a temperature less than a glass strain point of said glass substrate; and preparing said semiconductor device on said glass substrate.
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