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US5291050A Expired / Lapsed US ⏱️ 0.0 years remaining

MOS device having reduced gate-to-drain capacitance

Assignee: Fuji Electric Co Ltd
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Filing: 1991-10-22
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Granted: 1994-03-01
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Expires: 2011-10-22
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Abstract

Abstract A metal-oxide-semiconductor (MOS) device designed to achieve reduced gate-to-drain capacitance is disclosed. The device has gate-electrode layer consisting of alternating polarity regions, such that regions of the gate-electrode layer not involved in channel operations have a conductivity type different from the conductivity type of the gate-electrode-layer regions actually involved in channel operations. Since the alternating conductivity regions form a capacitance in series to the gate-to-drain capacitance, the gate-to-drain capacitance of the device is reduced. An embodiment of the invention also incorporates increased-thickness regions of the gate-oxide film, which regions are disposed over semiconductor areas at which no channel operation occurs.

Inventors

  • 👤 Takeyoshi Nishimura

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 04:30
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/60; H10D64/66; H10D64/671; H10D12/00; H10D12/411; H10D12/441

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 146 words
A metal-oxide-semiconductor device comprising: a first semiconductor region of a first conductive type having a first surface and a second surface; a plurality of second regions of a second conductive type at said first surface of said first semiconductor region; a third region of said first conductive type in each of said second regions; whereby a plurality of channel regions are formed between said third region and said first surface of said first semiconductor region; and a gate-electrode layer disposed on an insulation film over said channel regions and said first surface of said first semiconductor region; wherein said gate-electrode layer comprises first and second portions of opposite conductivity type, each one of the first portions extending across a first surface portion of said first semiconductor region, between a first region over a first channel region and a second region over a neighboring second channel region.
Claim 2
Dependent Claim 146 words
A metal-oxide-semiconductor device comprising: a first semiconductor region of a first conductive type having a first surface and a second surface; a plurality of second regions of a second conductive type at said first surface of said first semiconductor region; a third region of said first conductive type in each of said second regions; whereby a plurality of channel regions are formed between said third region and said first surface of said first semiconductor region; and a gate-electrode layer disposed on an insulation film over said channel regions and said first surface of said first semiconductor region; wherein said gate-electrode layer comprises first and second portions of opposite conductivity type, each one of the first portions extending across a first surface portion of said first semiconductor region, between a first region over a first channel region and a second region over a neighboring second channel region.
Claim 3
Dependent Claim 31 words
A device according to claim 1, wherein said second portions of the gate-electrode layer are formed by ion implantation at a dose of 10 11 to 10 13 /cm 2 .
Claim 4
Dependent Claim 23 words
A device according to claim 2, wherein said second regions are substantially square in shape when viewed from the top of the device.
Claim 5
Dependent Claim 23 words
A device according to claim 2, wherein said second regions are substantially rectangular in shape when viewed from the top of the device.
Claim 6
Independent Claim 37 words
A device according to claims 1, 2 or 3, wherein the portion of said insulation film disposed over said first surface portions of said first semiconductor region is thicker than the insulation film over said channel regions.
Claim 7
Dependent Claim 234 words
A metal-oxide-semiconductor device comprising: a first semiconductor region of a first conductive type having a first surface and a second surface; a plurality of second regions of a second conductive type at said first surface of said first semiconductor region, said second regions being substantially rectangular in shape; a third region of said first conductive type in each of said second regions; a plurality of channel regions formed between said third region and said first surface of said first semiconductor region; and a gate-electrode layer disposed on an insulation film over said channel regions and first surface portions of said first semiconductor region; wherein portions of said gate-electrode layer disposed over two adjacent channel regions and interposing first-surface portions of said first semiconductor region having a conductivity type opposite to the conductivity type of other portions of the gate-electrode layer, portions of the gate-electrode layer not disposed over said channel regions and interposing first-surface portions of said first semiconductor region are formed by ion implantation at a dose of 10 11 to 10 13 /cm 2 , and selected portions of the gate-electrode layer disposed over selected first-surface portions of said first semiconductor region, which surface portions are interposed between longer sides of two adjacent second regions, have a conductivity type opposite to the conductivity type of portions of the gate-electrode layer disposed over said channel regions along longer edge of said channel regions.
Claim 8
Dependent Claim 234 words
A metal-oxide-semiconductor device comprising: a first semiconductor region of a first conductive type having a first surface and a second surface; a plurality of second regions of a second conductive type at said first surface of said first semiconductor region, said second regions being substantially rectangular in shape; a third region of said first conductive type in each of said second regions; a plurality of channel regions formed between said third region and said first surface of said first semiconductor region; and a gate-electrode layer disposed on an insulation film over said channel regions and first surface portions of said first semiconductor region; wherein portions of said gate-electrode layer disposed over two adjacent channel regions and interposing first-surface portions of said first semiconductor region having a conductivity type opposite to the conductivity type of other portions of the gate-electrode layer, portions of the gate-electrode layer not disposed over said channel regions and interposing first-surface portions of said first semiconductor region are formed by ion implantation at a dose of 10 11 to 10 13 /cm 2 , and selected portions of the gate-electrode layer disposed over selected first-surface portions of said first semiconductor region, which surface portions are interposed between longer sides of two adjacent second regions, have a conductivity type opposite to the conductivity type of portions of the gate-electrode layer disposed over said channel regions along longer edge of said channel regions.

References Cited (Backward Citations)

JPS5556663A Cited
US4831424A Cited
GB2122420A Cited
JPS6246570A Cited
JPS6247163A Cited
US4963970A Cited
US4901124A Cited
JPH01295465A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-02-28 1997-08-30 1998-03-01 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-02-28 2001-08-30 2002-03-01 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-02-28 2005-08-30 2006-03-01 $7700.00 Window Closed / Lapsed

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