US5287914A
Expired / Lapsed
US
⏱️ 0.0 years remaining
System for substrate cooling in an evacuated environment
Assignee: Intevac Inc
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Filing: 1992-11-24
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Granted: 1994-02-22
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Expires: 2012-11-24
Abstract
Abstract A method and apparatus are disclosed using a combination of convection and conduction cooling to cool an article in an evacuated environment. A processing chamber is used which includes at least one heat sink. A flat surface of the article to be cooled is positioned within the chamber in a spaced apart facing parallel relationship to a facing surface of the heat sink. High conductivity gases are admitted into the chamber to accomplish cooling of the article.
Inventors
- 👤 John L. Hughes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:55
CPC Classifications
B; B01; B01J; B01J3/00; B01J3/006; C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541; G; G05; G05D; G05D23/00; G05D23/19; G05D23/1919; Y; Y10; Y10S; Y10S165/00; Y10S165/903
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
164 words
An apparatus for temperature control of an article having opposite substantially planar outer surfaces in an evacuated environment, comprising: a heat exchanging structure, said structure having at least a stationary heat sink having a substantially planar surface disposed within a vacuum chamber; transfer means for moving the article into and out of a position with an outer surface thereof adjacent to and substantially parallel with said planar surface of said heat sink; said heat sink being spaced a predetermined distance apart from an article which distances sufficient to permit the positioning and removal of said article from a parallel relationship with the surface of the heat sink without contacting said heat sink; said predetermined distance being further selected to permit a substantial convective/conductive heat transfer between said article and said heat sink; and means for providing a high conductivity gas between said heat sink and said article at a pressure significantly above that of said vacuum chamber, yet substantially below that of the atmosphere.
Claim 2
Independent Claim
164 words
An apparatus for temperature control of an article having opposite substantially planar outer surfaces in an evacuated environment, comprising: a heat exchanging structure, said structure having at least a stationary heat sink having a substantially planar surface disposed within a vacuum chamber; transfer means for moving the article into and out of a position with an outer surface thereof adjacent to and substantially parallel with said planar surface of said heat sink; said heat sink being spaced a predetermined distance apart from an article which distances sufficient to permit the positioning and removal of said article from a parallel relationship with the surface of the heat sink without contacting said heat sink; said predetermined distance being further selected to permit a substantial convective/conductive heat transfer between said article and said heat sink; and means for providing a high conductivity gas between said heat sink and said article at a pressure significantly above that of said vacuum chamber, yet substantially below that of the atmosphere.
Claim 3
Dependent Claim
31 words
The apparatus of claim 1 wherein said predetermined distance from said facing surface of said heat sink to said facing surface of said article is generally between 0.05 to 0.25 in.
Claim 4
Dependent Claim
16 words
The apparatus of claim 1 wherein said heat sink includes means for cooling said heat sink.
Claim 5
Independent Claim
176 words
A method for temperature control of an article having opposite substantially planar outer surfaces in an evacuated environment, comprising: spacing a heat sink having a substantially planar outer surface in a parallel and facing relationship with an outer surface of said article, said heat sink being operatively mounted within a processing chamber adapted to operate at a pressure substantially less than atmospheric pressure; placing the article without contacting the heat sink a predetermined distance apart and in a parallel relationship with said heat sink, said article being positioned close enough to permit a substantial convective/conductive heat transfer from between said article and said heat sink; controlling the temperature of said heat sink to a predetermined cold level compared to the wafter; introducing a high thermal conductivity gas between said heat sink and said article at a pressure significantly above that of said processing chamber, yet substantially below that of atmosphere to facilitate the heat between said substrate and said heat sink; and removing said article from said processing chamber after said article attains a predetermined temperature.
Claim 6
Independent Claim
176 words
A method for temperature control of an article having opposite substantially planar outer surfaces in an evacuated environment, comprising: spacing a heat sink having a substantially planar outer surface in a parallel and facing relationship with an outer surface of said article, said heat sink being operatively mounted within a processing chamber adapted to operate at a pressure substantially less than atmospheric pressure; placing the article without contacting the heat sink a predetermined distance apart and in a parallel relationship with said heat sink, said article being positioned close enough to permit a substantial convective/conductive heat transfer from between said article and said heat sink; controlling the temperature of said heat sink to a predetermined cold level compared to the wafter; introducing a high thermal conductivity gas between said heat sink and said article at a pressure significantly above that of said processing chamber, yet substantially below that of atmosphere to facilitate the heat between said substrate and said heat sink; and removing said article from said processing chamber after said article attains a predetermined temperature.
Claim 7
Dependent Claim
31 words
The method of claim 4 wherein said predetermined distance from said facing surfaces of said heat sink to said facing surface of said article is generally between 0.05 to 0.25 in.
Claim 8
Dependent Claim
24 words
The method of claim 4 wherein said heat sink is precooled to a temperature in the range of approximately -50° C. to -200° C.
Claim 9
Dependent Claim
21 words
The method of claim 4 wherein said high thermal conductivity gas is selected from the group consisting of helium and hydrogen.
Claim 10
Dependent Claim
23 words
The method of claim 4 wherein said high thermal conductivity gas pressure is maintained in the range of approximately 1 to 10 Torr.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-21 | 1997-08-23 | 1998-02-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-21 | 2001-08-23 | 2002-02-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-21 | 2005-08-23 | 2006-02-22 | $7700.00 | Window Closed / Lapsed |