Method for forming position alignment marks in a manufacturing SOI device

Claim 1

A method for forming a position alignment mark comprising the steps of: simultaneously forming on a silicon substrate an alignment marking contact hole and a back surface electrode contact hole, respectively, in a field zone and an element zone; forming on said field zone and said element zone a wiring pattern layer and a back surface electrode, respectively; and cutting a silicon layer from the back surface of said silicon substrate to expose the wiring pattern layer and an alignment marking contact hole pattern and then using said contact hole pattern as an alignment mark for forming a surface electrode.

Claim 2

A method for forming a position alignment mark comprising the steps of: simultaneously forming on a silicon substrate an alignment marking contact hole and a back surface electrode contact hole, respectively, in a field zone and an element zone; forming on said field zone and said element zone a wiring pattern layer and a back surface electrode, respectively; and cutting a silicon layer from the back surface of said silicon substrate to expose the wiring pattern layer and an alignment marking contact hole pattern and then using said contact hole pattern as an alignment mark for forming a surface electrode.

Claim 3

A method for forming a position alignment mark comprising the steps of: etching a surface of a silicon substrate to form a field zone; forming a primary insulating layer over the surface, and forming an alignment marking contact hole exposing said silicon substrate in said primary insulating layer of said field zone and a back surface electrode contact hole exposing said silicon substrate in said primary insulating layer of an element zone on said silicon substrate, respectively; forming over the surface a conductor layer and performing patterning thereafter for forming in said alignment marking contact hole and in said back surface electrode contact hole a conductor pattern and a back surface electrode, respectively; and cutting from the back surface of said silicon substrate a silicon layer, to expose the surface of said conductor pattern and an alignment marking contact hole pattern, and then using said alignment marking contact hole pattern for forming a surface electrode.

Claim 4

A method for forming a position alignment mark comprising the steps of: etching a surface of a silicon substrate to form a field zone; forming a primary insulating layer over the surface, and forming an alignment marking contact hole exposing said silicon substrate in said primary insulating layer of said field zone and a back surface electrode contact hole exposing said silicon substrate in said primary insulating layer of an element zone on said silicon substrate, respectively; forming over the surface a conductor layer and performing patterning thereafter for forming in said alignment marking contact hole and in said back surface electrode contact hole a conductor pattern and a back surface electrode, respectively; and cutting from the back surface of said silicon substrate a silicon layer, to expose the surface of said conductor pattern and an alignment marking contact hole pattern, and then using said alignment marking contact hole pattern for forming a surface electrode.

Claim 5

A method for forming a position alignment mark comprising the steps of: forming on a silicon substrate a primary alignment marking hole in a field zone and a secondary back surface electrode contact hole in an element zone; depositing primary poly-Si over said silicon substrate by chemical vapor deposition forming a primary poly-Si layer; etching said primary alignment marking hole while masking with a photoresist; embedding said secondary contact hole with a plug of a back surface electrode; forming secondary poly-Si over said silicon substrate and performing patterning thereof for forming a secondary poly-Si layer; and sticking a wafer after the formation of a SiO 2 layer and a tertiary poly-Si layer to said tertiary poly-Si layer; and grinding said silicon substrate to expose an electrode which is provided to said alignment marking contact hole for forming a surface electrode.

Claim 6

A method for forming a position alignment mark comprising the steps of: forming on a silicon substrate a primary alignment marking hole in a field zone and a secondary back surface electrode contact hole in an element zone; depositing primary poly-Si over said silicon substrate by chemical vapor deposition forming a primary poly-Si layer; etching said primary alignment marking hole while masking with a photoresist; embedding said secondary contact hole with a plug of a back surface electrode; forming secondary poly-Si over said silicon substrate and performing patterning thereof for forming a secondary poly-Si layer; and sticking a wafer after the formation of a SiO 2 layer and a tertiary poly-Si layer to said tertiary poly-Si layer; and grinding said silicon substrate to expose an electrode which is provided to said alignment marking contact hole for forming a surface electrode.