US5286343A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for protecting chip corners in wet chemical etching of wafers
Assignee: University of California
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Filing: 1992-07-24
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Granted: 1994-02-15
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Expires: 2012-07-24
Abstract
Abstract The present invention is a corner protection mask design that protects chip corners from undercutting during anisotropic etching of wafers. The corner protection masks abut the chip corner point and extend laterally from segments along one or both corner sides of the corner point, forming lateral extensions. The protection mask then extends from the lateral extensions, parallel to the direction of the corner side of the chip and parallel to scribe lines, thus conserving wafer space. Unmasked bomb regions strategically formed in the protection mask facilitate the break-up of the protection mask during etching. Corner protection masks are useful for chip patterns with deep grooves and either large or small chip mask areas. Auxiliary protection masks form nested concentric frames that etch from the center outward are useful for small chip mask patterns. The protection masks also form self-aligning chip mask areas. The present invention is advantageous for etching wafers with thin film windows, microfine and micromechanical structures, and for forming chip structures more elaborate than presently possible.
Inventors
- 👤 Wing C. Hui
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 01:31
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/69; H10P50/691; H10P50/693
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
217 words
A device for protecting corners of polygonal feature areas on a wafer that will undergo anisotropic etching, which comprises: a mask pattern on the wafer, wherein the mask pattern comprises: (1) at least one feature area mask, wherein each feature area mask has at least one outer convex corner, and each corner is defined by two corner sides intersecting at a corner point; and (2) at least one primary corner protection mask, which is to be undercut, wherein the corner protection mask (i) abuts at least one corner point of the feature area mask and a segment along at least one feature area corner side, (ii) extends laterally from the corner side in a first direction, forming a lateral extension, (iii) extends from the lateral extension in a second direction, parallel to the corner side, and (iv) forms at least one unmasked bomb region in the protection mask, wherein the unmasked region has at least one concave or planar boundary that etches more slowly than convex corners; and wherein the dimensions and geometry of the corner protection mask are such that, during anisotropic etching, exposed convex boundaries of the protection mask are undercut back to the feature area mask corners at about the same time that grooves etched into the wafer reach a desired depth and width.
Claim 2
Independent Claim
217 words
A device for protecting corners of polygonal feature areas on a wafer that will undergo anisotropic etching, which comprises: a mask pattern on the wafer, wherein the mask pattern comprises: (1) at least one feature area mask, wherein each feature area mask has at least one outer convex corner, and each corner is defined by two corner sides intersecting at a corner point; and (2) at least one primary corner protection mask, which is to be undercut, wherein the corner protection mask (i) abuts at least one corner point of the feature area mask and a segment along at least one feature area corner side, (ii) extends laterally from the corner side in a first direction, forming a lateral extension, (iii) extends from the lateral extension in a second direction, parallel to the corner side, and (iv) forms at least one unmasked bomb region in the protection mask, wherein the unmasked region has at least one concave or planar boundary that etches more slowly than convex corners; and wherein the dimensions and geometry of the corner protection mask are such that, during anisotropic etching, exposed convex boundaries of the protection mask are undercut back to the feature area mask corners at about the same time that grooves etched into the wafer reach a desired depth and width.
Claim 3
Dependent Claim
70 words
A device for protecting corners as recited in claim 1, wherein each protection mask has two lateral extensions which abut two feature area corners of one side of the feature area mask, wherein at least one unmasked bomb region abuts at least one point of the feature area side between the two abutted feature area corners, and wherein two protection masks abut two opposing sides of the feature area mask.
Claim 4
Dependent Claim
60 words
A device for protecting corners as recited in claim 1, wherein each protection mask has at least six lateral extensions which abut the feature area corners of at least three sides of the feature area mask, and wherein at least one unmasked bomb region abuts at least one point of each feature area side between two abutted feature area corners.
Claim 5
Dependent Claim
59 words
A device for protecting corners as recited in claim 1, wherein the corner protection mask abuts segments along both corner sides of each abutted feature area corner point, whereby the corner protection mask forms two lateral extensions from each abutted corner, and wherein at least one unmasked bomb region abuts at least one point of the feature area mask.
Claim 6
Dependent Claim
28 words
A device for protecting corners as recited in claim 4, wherein at least one unmasked bomb region abuts at least one corner point of the feature area mask.
Claim 7
Dependent Claim
65 words
A device for protecting corners as recited in claim 1, wherein the corner protection mask has a polygonal shape and abuts both corner sides of at least two corner points of the feature area mask, and wherein at least one unmasked bomb region abuts at least one point of each feature area side that is common to two abutted corners of the feature area mask.
Claim 8
Dependent Claim
68 words
A device for protecting corners as recited in claim 1, wherein the feature area mask has four corners, and the corner protection mask has a polygonal shape and abuts both corner sides of each of the four corners of the feature area, surrounding the feature area mask, and wherein at least one unmasked bomb region abuts at least one point of each side of the feature area mask.
Claim 9
Dependent Claim
41 words
A device for protecting corners as recited in claim 1, wherein the width of the grooves etched into the wafer is less than about 200 microns, and wherein the length of the feature area mask is greater than about 200 microns.
Claim 10
Dependent Claim
41 words
A device for protecting corners as recited in claim 1, wherein the width of the grooves etched into the wafer is greater than about 200 microns, and wherein the length of the feature area mask is less than about 200 microns.
Claim 11
Dependent Claim
116 words
A device for protecting corners as recited in claim 1, wherein the corner protection mask abuts segments along both corner sides of each protected feature area corner point, whereby the corner protection mask forms two lateral extensions from each abutted corner, and wherein the corner protection mask (v) further extends from each lateral extension in a third direction, parallel to the respective corner sides, forming at least two extension arms, wherein an unmasked spacer region is formed between each extension arm and the respective corner side, whereby the width of the extension arm is less than the length of the lateral extension, and wherein at least one unmasked bomb region is formed in each extension arm.
Claim 12
Dependent Claim
55 words
A device for protecting corners as recited in claim 10, wherein at least four feature area masks form a two-dimensional array, wherein each corner protection mask forms four extension arms and abuts at least two corners of the feature area masks, whereby each extension arm is positioned between the sides of two feature area masks.
Claim 13
Dependent Claim
102 words
A device for protecting corners as recited in claim 1, wherein the corner protection mask abuts a segment along one corner side of each protected feature area corner point, whereby the corner protection mask forms one lateral extension from each protected corner, and wherein the corner protection mask (v) further extends from the lateral extension in a third direction, parallel to the corner side, forming at least one extension arm, and wherein an unmasked spacer region is formed between the extension arm and the corner side, whereby the width of the extension arm is less than the length of the lateral extension.
Claim 14
Dependent Claim
40 words
A device for protecting corners as recited in claim 12, wherein at least one unmasked bomb region abuts the border of the protection mask and merges with unmasked space surrounding the protection mask, forming an indentation in the protection mask.
Claim 15
Dependent Claim
40 words
A device for protecting corners as recited in claim 13, wherein at least one unmasked bomb region is formed in the side of the protection mask distal to the extension arm and forms a U-shaped indentation in the protection mask.
Claim 16
Dependent Claim
40 words
A device for protecting corners as recited in claim 13, wherein at least one unmasked bomb region is formed at a corner of the protection mask distal to the extension arm and forms an L-shaped indentation in the protection mask.
Claim 17
Dependent Claim
153 words
A device for protecting corners as recited in claim 1, wherein the corner protection mask abuts a segment along one corner side of each protected feature area corner point, whereby the corner protection mask forms one lateral extension from each protected corner; wherein the corner protection mask (v) forms a first extension arm while extending from the lateral extension in the second direction, and (vi) forms a second extension arm by extending from the lateral extension in a third direction, parallel to the corner side and to the second direction, whereby the first and second extension arms extend in opposite directions; wherein an unmasked spacer region is formed between the second extension arm and the feature area corner side, whereby the width of the second extension arm is less than the length of the lateral extension; and wherein the extension arms and the lateral extension form a central body of the protection mask.
Claim 18
Dependent Claim
56 words
A device for protecting corners as recited in claim 16, wherein the corner protection mask abuts at least two corner points of at least two feature area masks and forms at least two lateral extensions from the abutted corners of the feature area masks, and wherein the lateral extensions and extension arms form the central body.
Claim 19
Dependent Claim
41 words
A device for protecting corners as recited in claim 17, wherein at least one unmasked bomb region abuts the border of the protection mask and merges with unmasked space surrounding the protection mask, forming a U-shaped indentation in the protection mask.
Claim 20
Dependent Claim
41 words
A device for protecting corners as recited in claim 17, wherein at least one unmasked bomb region abuts the border of the protection mask and merges with unmasked space surrounding the protection mask, forming an L-shaped indentation in the protection mask.
Claim 21
Dependent Claim
59 words
A device for protecting corners as recited in claim 17, wherein at least one unmasked bomb region is bounded by a planar boundary in the protection mask, and wherein the extension arms are not formed between facing sides of the feature areas, and the lengthwise direction of the central body extends the length of at least one feature area.
Claim 22
Dependent Claim
56 words
A device for protecting corners as recited in claim 16, wherein the corner protection mask abuts at least four corner points of at least four feature area masks and forms at least two lateral extensions from the abutted corners of the feature area masks, and wherein the lateral extensions and extension arms form the central body.
Claim 23
Dependent Claim
39 words
A device for protecting corners as recited in claim 21, wherein a plurality of feature area masks forms a two-dimensional array, and wherein the lengthwise directions of the central bodies of the protection masks are parallel to one another.
Claim 24
Dependent Claim
76 words
A device for protecting corners as recited in claim 21, wherein a plurality of feature area masks forms a two-dimensional array, and wherein the lengthwise directions of the central bodies of the protection masks alternate, whereby a lengthwise direction of a first central body is parallel to one side of the feature area mask, and a next successive lengthwise direction of a second central body is parallel to an adjacent side of the feature area mask.
Claim 25
Dependent Claim
77 words
A device for protecting corners as recited in claim 1, wherein the mask pattern further comprises: (3) at least one auxiliary corner protection mask, and (4) at least one ancillary lateral extension connecting the primary protection mask to the auxiliary corner protection mask on at least one corner point of the primary protection mask; and wherein the convex corners of the primary protection mask are not undercut by the etchant until the auxiliary protection mask is undercut.
Claim 26
Dependent Claim
143 words
A device for protecting corners as recited in claim 24, wherein the auxiliary protection mask comprises: (a) an innermost polygonal frame enclosing an unmasked bomb region; (b) at least one outer polygonal frame enclosing a second unmasked bomb region and the innermost frame, wherein the innermost and outer frames are concentric, and at least one convex corner of the inner frame is exposed for etching, so that etching begins at the inner frame's convex corner, and the etching fronts undercut the inner frame and continue outward to successive outer frames; and (c) at least one lateral connector connecting each outer frame to the frame immediately enclosed by the outer frame, wherein an unmasked bomb region is formed in a juncture of each lateral connector and outer frame, whereby the elimination by etching of the lateral connector exposes convex corners in the outer frame.
Claim 27
Independent Claim
181 words
A device for forming a self-aligning feature area with well-defined corners from a potential feature area on a wafer that will undergo anisotropic etching, which comprises: a mask pattern on the wafer, wherein the mask pattern comprises: (1) at least one potential feature area, wherein the potential feature area is bounded by planes that etch more slowly than convex corners or are etch-stop planes, (2) at least one corner protection mask covering and extending from the potential feature area, and (3) at least one unmasked bomb region formed in a portion of the corner protection mask that does not include the potential feature area, wherein the unmasked region abuts at least one side of the potential feature area and is bounded by planes that etch more slowly than convex corners or are etch stop planes; and wherein the dimensions and geometry of the corner protection mask are such that, during anisotropic etching, the protection mask is undercut back to the potential feature area at about the same time that grooves of a desired depth and width are etched into the wafer.
Claim 28
Independent Claim
181 words
A device for forming a self-aligning feature area with well-defined corners from a potential feature area on a wafer that will undergo anisotropic etching, which comprises: a mask pattern on the wafer, wherein the mask pattern comprises: (1) at least one potential feature area, wherein the potential feature area is bounded by planes that etch more slowly than convex corners or are etch-stop planes, (2) at least one corner protection mask covering and extending from the potential feature area, and (3) at least one unmasked bomb region formed in a portion of the corner protection mask that does not include the potential feature area, wherein the unmasked region abuts at least one side of the potential feature area and is bounded by planes that etch more slowly than convex corners or are etch stop planes; and wherein the dimensions and geometry of the corner protection mask are such that, during anisotropic etching, the protection mask is undercut back to the potential feature area at about the same time that grooves of a desired depth and width are etched into the wafer.
Claim 29
Independent Claim
231 words
A method for protecting corners of polygonal feature areas on a wafer that will undergo anisotropic etching, which comprises: (a) forming a mask pattern on the wafer, wherein the mask pattern comprises: (1) at least one feature area mask, wherein each feature area mask has at least one outer convex corner, and each corner is defined by two corner sides intersecting at a corner point; and (2) at least one primary corner protection mask, which is to be undercut, wherein the corner protection mask (i) abuts at least one corner point of the feature area mask and a segment along at least one feature area corner side, (ii) extends laterally from the corner side in a first direction, forming a lateral extension, (iii) extends from the lateral extension in a second direction, parallel to the corner side, and (iv) forms at least one unmasked bomb region in the protection mask, wherein the unmasked region has at least one concave or planar boundary that etches more slowly than convex corners; wherein the dimensions and geometry of the corner protection mask are such that, during anisotropic etching, exposed convex boundaries of the protection mask are undercut back to the feature area mask corners at about the same time that grooves etched into the wafer reach a desired depth and width; and (b) etching the mask pattern on the wafer with an anisotropic etchant.
Claim 30
Independent Claim
231 words
A method for protecting corners of polygonal feature areas on a wafer that will undergo anisotropic etching, which comprises: (a) forming a mask pattern on the wafer, wherein the mask pattern comprises: (1) at least one feature area mask, wherein each feature area mask has at least one outer convex corner, and each corner is defined by two corner sides intersecting at a corner point; and (2) at least one primary corner protection mask, which is to be undercut, wherein the corner protection mask (i) abuts at least one corner point of the feature area mask and a segment along at least one feature area corner side, (ii) extends laterally from the corner side in a first direction, forming a lateral extension, (iii) extends from the lateral extension in a second direction, parallel to the corner side, and (iv) forms at least one unmasked bomb region in the protection mask, wherein the unmasked region has at least one concave or planar boundary that etches more slowly than convex corners; wherein the dimensions and geometry of the corner protection mask are such that, during anisotropic etching, exposed convex boundaries of the protection mask are undercut back to the feature area mask corners at about the same time that grooves etched into the wafer reach a desired depth and width; and (b) etching the mask pattern on the wafer with an anisotropic etchant.
Claim 31
Dependent Claim
70 words
A method for protecting corners as recited in claim 27, wherein each protection mask has two lateral extensions which abut two feature area corners of one side of the feature area mask, wherein at least one unmasked bomb region abuts at least one point of the feature area side between the two abutted feature area corners, and wherein two protection masks abut two opposing sides of the feature area mask.
Claim 32
Dependent Claim
55 words
A method for protecting corners as recited in claim 27, wherein each protection mask has at least six lateral extensions which abut the feature area corners of at least three sides of the feature area mask, and wherein at least one unmasked bomb region abuts at least one point of each abutted feature area side.
Claim 33
Dependent Claim
58 words
A method for protecting corners as recited in claim 27, wherein the corner protection mask abuts segments along both corner sides of at least one corner point, whereby the corner protection mask forms two lateral extensions from each abutted corner, and wherein at least one unmasked bomb region abuts at least one point of the feature area mask.
Claim 34
Dependent Claim
65 words
A method for protecting corners as recited in claim 27, wherein the corner protection mask has a polygonal shape and abuts both corner sides of at least two corner points of the feature area mask, and wherein at least one unmasked bomb region abuts at least one point of each feature area side that is common to two abutted corners of the feature area mask.
Claim 35
Dependent Claim
115 words
A method for protecting corners as recited in claim 27, wherein the corner protection mask abuts segments along both corner sides of each protected feature area corner point, whereby the corner protection mask forms two lateral extensions from each abutted corner, and wherein the corner protection mask (v) extends from each lateral extension in a third direction, parallel to the respective corner sides, forming at least two extension arms, wherein an unmasked spacer region is formed between each extension arm and the respective corner side, whereby the width of the extension arm is less than the length of the lateral extension, and wherein at least one unmasked bomb region is formed in each extension arm.
Claim 36
Dependent Claim
55 words
A method for protecting corners as recited in claim 32, wherein at least four feature area masks form a two-dimensional array, wherein each corner protection mask forms four extension arms and abuts at least two corners of the feature area masks, whereby each extension arm is positioned between the sides of two feature area masks.
Claim 37
Dependent Claim
104 words
A method for protecting corners as recited in claim 27, wherein the corner protection mask abuts a segment along one corner side of the protected feature area corner point, whereby the corner protection mask forms one lateral extension from each protected feature area corner, and wherein the corner protection mask (v) further extends from the lateral extension in a third direction, parallel to the corner side, forming at least one extension arm, and wherein an unmasked spacer region is formed between the extension arm and the corner side, whereby the width of the extension arm is less than the length of the lateral extension.
Claim 38
Dependent Claim
40 words
A method for protecting corners as recited in claim 34, wherein at least one unmasked bomb region abuts the border of the protection mask and merges with unmasked space surrounding the protection mask, forming an indentation in the protection mask.
Claim 39
Dependent Claim
155 words
A method for protecting corners as recited in claim 27, wherein the corner protection mask abuts a segment along one corner side of the protected feature area corner point, whereby the corner protection mask forms one lateral extension from each protected feature area corner; wherein the corner protection mask (v) forms a first extension arm while extending from the lateral extension in the second direction, and (vi) forms a second extension arm by extending from the lateral extension in a third direction, parallel to the corner side and to the second direction, whereby the first and second extension arms extend in opposite directions; wherein an unmasked spacer region is formed between the second extension arm and the feature area corner side, whereby the width of the second extension arm is less than the length of the lateral extension; and wherein the extension arms and the lateral extension form a central body of the protection mask.
Claim 40
Dependent Claim
56 words
A method for protecting corners as recited in claim 36, wherein the corner protection mask abuts at least two corner points of at least two feature area masks and forms at least two lateral extensions from the abutted corners of the feature area masks, and wherein the lateral extensions and extension arms form the central body.
Claim 41
Dependent Claim
75 words
A method for protecting corners as recited in claim 27, wherein the mask pattern further comprises: (3) at least one auxiliary corner protection mask, (4) at least one ancillary lateral extension connecting the primary protection mask to the auxiliary corner protection mask on at least one corner point of the primary protection mask; wherein the convex corners of the primary protection mask are not undercut by the etchant until the auxiliary protection mask is undercut.
Claim 42
Independent Claim
208 words
A method for forming a self-aligning feature area with well-defined corners from a potential feature area on a wafer that will undergo anisotropic etching, which comprises: (a) forming a mask pattern on the wafer, wherein the mask pattern comprises: (1) at least one potential feature area, wherein the potential feature area is bounded by planes that etch more slowly than convex corners or are etch-stop planes, (2) at least one corner protection mask covering and extending from the potential feature area, and (3) at least one unmasked bomb region formed in a portion of the corner protection mask that does not include the potential feature area, wherein the unmasked region abuts at least one side of the potential feature area and is bounded by planes that etch more slowly than convex corners or are etch stop planes; wherein the dimensions and geometry of the corner protection mask are such that, during anisotropic etching, the protection mask is undercut back to the potential feature area at about the same time that grooves of a desired depth and width are etched into the wafer; and (b) etching the mask pattern along predetermined planes with an anisotropic etchant until the corner protection mask is undercut back to the potential feature area.
Claim 43
Independent Claim
208 words
A method for forming a self-aligning feature area with well-defined corners from a potential feature area on a wafer that will undergo anisotropic etching, which comprises: (a) forming a mask pattern on the wafer, wherein the mask pattern comprises: (1) at least one potential feature area, wherein the potential feature area is bounded by planes that etch more slowly than convex corners or are etch-stop planes, (2) at least one corner protection mask covering and extending from the potential feature area, and (3) at least one unmasked bomb region formed in a portion of the corner protection mask that does not include the potential feature area, wherein the unmasked region abuts at least one side of the potential feature area and is bounded by planes that etch more slowly than convex corners or are etch stop planes; wherein the dimensions and geometry of the corner protection mask are such that, during anisotropic etching, the protection mask is undercut back to the potential feature area at about the same time that grooves of a desired depth and width are etched into the wafer; and (b) etching the mask pattern along predetermined planes with an anisotropic etchant until the corner protection mask is undercut back to the potential feature area.
References Cited (Backward Citations)
US3728179A
Cited
US4172005A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-14 | 1997-08-16 | 1998-02-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-14 | 2001-08-16 | 2002-02-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-14 | 2005-08-16 | 2006-02-15 | $7700.00 | Window Closed / Lapsed |