US5285097A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor sensor of electrostatic capacitance type
Assignee: Canon Inc
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Filing: 1992-02-21
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Granted: 1994-02-08
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Expires: 2012-02-21
Abstract
Abstract A semiconductor sensor has a semiconductor substrate including both of a conductive or semiconductor surface and an insulative surface and a pair of conductive members provided on said conductive or semiconductor surface of the substrate. There is constructed a sensor section in which at least one of the pair of conductive members can be deformed and an electrostatic capacitance between the pair of conductive members is variable. The semiconductor substrate has a functional element which is electrically connected to the sensor section.
Inventors
- 👤 Yutaka Hirai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 06:53
CPC Classifications
H; H10; H10N; H10N39/00
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
106 words
A semiconductor sensor comprising: a substrate having a surface that is one of conductive and semiconductive and an insulative surface; a pair of conductive members provided on said conductive/semiconductive surface; and a semiconductor functional element for sensing an electrostatic capacitance between said pair of conductive members, and being electrically connected with at least one of said conductive members, wherein at least one of said conductive members can be deformed and the electrostatic capacitance between said conductive members varies in accordance with the deformation of said at least one conductive member, and wherein said conductive members and said semiconductor functional element are integrally formed on said substrate.
Claim 2
Dependent Claim
106 words
A semiconductor sensor comprising: a substrate having a surface that is one of conductive and semiconductive and an insulative surface; a pair of conductive members provided on said conductive/semiconductive surface; and a semiconductor functional element for sensing an electrostatic capacitance between said pair of conductive members, and being electrically connected with at least one of said conductive members, wherein at least one of said conductive members can be deformed and the electrostatic capacitance between said conductive members varies in accordance with the deformation of said at least one conductive member, and wherein said conductive members and said semiconductor functional element are integrally formed on said substrate.
Claim 3
Dependent Claim
18 words
A sensor according to claim 1, wherein at least one of the pair of conductive members is fixed.
Claim 4
Dependent Claim
22 words
A sensor according to claim 1, wherein at least one of the pair of conductive members is made of a monocrystalline material.
Claim 5
Dependent Claim
20 words
A sensor according to claim 1, wherein at least one of the pair of conductive members is made of aluminum.
Claim 6
Dependent Claim
19 words
A sensor according to claim 4, wherein said aluminum is formed by a CVD method using alkyl aluminum hydride.
Claim 7
Dependent Claim
19 words
A sensor according to claim 1, wherein said semiconductor substrate further includes a signal processing unit integrally formed thereon.
Claim 8
Dependent Claim
13 words
A sensor according to claim 1, wherein said functional element is a transistor.
Claim 9
Dependent Claim
14 words
A sensor according to claim 6, wherein said signal processing circuit is an amplifier.
Claim 10
Dependent Claim
22 words
A sensor according to claim 1, wherein said conductive member is a plate member elongated perpendicular to a surface of said substrate.
Claim 11
Dependent Claim
14 words
A sensor according to claim 1, wherein said semiconductor sensor is an acceleration sensor.
Claim 12
Dependent Claim
14 words
A sensor according to claim 1, wherein said semiconductor sensor is a pressure sensor.
References Cited (Backward Citations)
US4357834A
Cited
GB2156078A
Cited
US4628403A
Cited
US4875134A
Cited
US5012304A
Cited
US5048343A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-07 | 1997-08-09 | 1998-02-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-07 | 2001-08-09 | 2002-02-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-07 | 2005-08-09 | 2006-02-08 | $7700.00 | Window Closed / Lapsed |