Abstract Disclosed are photo-masks for use in two exposure steps to be effected for forming a ground metal layer on the back surface of a substrate in manufacture of a two-layer: TAB in which a metal layer is formed on one surface or both surfaces of an insulating resin substrate without an adhesive, determined metal leads are formed on the top surface of the substrate, via holes are formed on the determined positions of the substrate, a ground metal layer is formed on the back surface of the substrate, and a part of the leads as formed on the top surface of the substrate are electrically connected with the ground metal layer as formed on the back surface of the same via the via holes; the photo-masks being characterized in that the photo-mask to be used in the first exposure step for forming the via holes to the back surface of the substrate is provided with alignment marks in the determined plural positions thereof and that the photo-mask to be used in the second exposure step for forming the ground metal layer on the back surface of the substrate is provided with alignment marks in the positions corresponding to the positions of the alignment marks made in the first photomask.
A combination of first and second photomasks for use in two exposure steps when forming a ground metal layer on the back surface of a substrate in the manufacture of a two-layer TAB in which a metal layer is formed on one surface or both surfaces of an insulating resin substrate without an adhesive, determined metal leads are formed on the top surfaces of the substrate, via a holes are formed on the determined positions of the substrate, a ground metal layer is formed on the back surface of the substrate, and a part of the leads formed on the top surface of the substrate are electrically connected with the ground metal layer formed on the back surface of the same via the via holes; the first photomask used in the first exposure step for forming the via holes to the back surface of the substrate including means providing a plurality of alignment marks in the determined plural positions thereof and the second photomask used in the second exposure step for forming the ground metal layer on the back surface of the substrate including means providing a plurality of alignment marks in corresponding positions to the alignment marks in the first photomask.
Claim 2
Dependent Claim
202 words
A combination of first and second photomasks for use in two exposure steps when forming a ground metal layer on the back surface of a substrate in the manufacture of a two-layer TAB in which a metal layer is formed on one surface or both surfaces of an insulating resin substrate without an adhesive, determined metal leads are formed on the top surfaces of the substrate, via a holes are formed on the determined positions of the substrate, a ground metal layer is formed on the back surface of the substrate, and a part of the leads formed on the top surface of the substrate are electrically connected with the ground metal layer formed on the back surface of the same via the via holes; the first photomask used in the first exposure step for forming the via holes to the back surface of the substrate including means providing a plurality of alignment marks in the determined plural positions thereof and the second photomask used in the second exposure step for forming the ground metal layer on the back surface of the substrate including means providing a plurality of alignment marks in corresponding positions to the alignment marks in the first photomask.
Claim 3
Dependent Claim
51 words
A combination of photomasks as claimed in claim 1, in which at least one of the plurality of alignment marks in the first photomask is at a position corresponding to where a device hole, and OLB hole, a sprocket hole or a tooling hole is to be holed in the substrate.