US5283692A
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Multi-layer graded reflectivity mirror
Assignee: Newport Corp USA
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Filing: 1992-01-17
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Granted: 1994-02-01
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Expires: 2012-01-17
Abstract
Abstract A multi-layer graded reflectivity mirror (GRM) with high effective reflectivity is suitable for use in large aperture laser systems with relatively low gain. The GRMs are manufactured with multiple dielectric layers with a thickness profile that eliminates the interference fringes, while providing a reflectivity which tapers smoothly from a peak to zero. The mirror is formed on a substrate having a first surface and a second surface opposite the first. The substrate consists of a material which has low absorption at a given wavelength λ. A first dielectric layer is formed on the first surface of the substrate which has an index of refraction n 1 and having an optical thickness profile with a maximum optical thickness of λ/4 at a center which essentially continuously decreases away from the center to a minimum optical thickness of Z at a perimeter P. A second dielectric layer is formed on the first dielectric layer having an index of refraction n 2 and a thickness profile which is similar to the thickness profile of the first dielectric layer. Additional dielectric layers can be added as necessary to achieve the reflectivity magnitude desired. The thickness Z is the thickness at which the reflectivity profile reaches zero at the first interference fringe.
Inventors
- 👤 Richard L. Herbst
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 09:53
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/05; H01S3/08; H01S3/08059; H01S3/08063; G; G02; G02B; G02B5/00; G02B5/08; G02B5/0816; G02B5/0825; G02B5/0883; H01S3/08081
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
234 words
A mirror having graded reflectivity at a given wavelength λ, comprising: a substrate, having a first surface and a second surface opposite the first surface. a first dielectric layer, on the first surface of the substrate, having an index of refraction n 1 and having an optical thickness profile with a maximum optical thickness of λ/4 at a peak area C and essentially continuously decreasing away from the peak area C to an optical thickness of greater than or equal to a determinate value Z at a perimeter P and continuing outside the perimeter P at a constant optical thickness equivalent to the optical thickness at the perimeter P for a distance D, wherein D is greater than zero; a second dielectric layer, on the first dielectric layer, having an index of refraction n 2 and having an optical thickness profile with a maximum optical thickness of λ/4 at the peak C and essentially continuously decreasing away from the peak area C to optical thickness of greater than or equal to the determinate value Z at the perimeter P and continuing outside the perimeter P at a constant optical thickness equivalent to the optical thickness at the perimeter P for a distance D greater than zero; wherein the determinate value Z is an optical thickness greater than zero at which the reflectivity of the mirror is near a minimum for the given wavelength λ.
Claim 2
Dependent Claim
234 words
A mirror having graded reflectivity at a given wavelength λ, comprising: a substrate, having a first surface and a second surface opposite the first surface. a first dielectric layer, on the first surface of the substrate, having an index of refraction n 1 and having an optical thickness profile with a maximum optical thickness of λ/4 at a peak area C and essentially continuously decreasing away from the peak area C to an optical thickness of greater than or equal to a determinate value Z at a perimeter P and continuing outside the perimeter P at a constant optical thickness equivalent to the optical thickness at the perimeter P for a distance D, wherein D is greater than zero; a second dielectric layer, on the first dielectric layer, having an index of refraction n 2 and having an optical thickness profile with a maximum optical thickness of λ/4 at the peak C and essentially continuously decreasing away from the peak area C to optical thickness of greater than or equal to the determinate value Z at the perimeter P and continuing outside the perimeter P at a constant optical thickness equivalent to the optical thickness at the perimeter P for a distance D greater than zero; wherein the determinate value Z is an optical thickness greater than zero at which the reflectivity of the mirror is near a minimum for the given wavelength λ.
Claim 3
Dependent Claim
99 words
The mirror of claim 1, further including: a third dielectric layer, on the second dielectric layer, having an index of refraction n 3 and having an optical thickness profile with a maximum optical thickness of λ/4 at the peak area C and essentially continuously decreasing away from the peak area C to an optical thickness of greater than or equal to the determinate value Z at the perimeter P and continuing outside the perimeter P at a constant optical thickness equivalent to the optical thickness at the perimeter P for a distance D, wherein D is greater than zero.
Claim 4
Dependent Claim
46 words
The mirror of claim 2, wherein the optical thickness profile of the first dielectric layer is essentially radially symmetrical; the optical thickness profile of the second dielectric layer is essentially radially symmetrical; and the optical thickness profile of the third dielectric layer is essentially radially symmetrical.
Claim 5
Dependent Claim
19 words
The mirror of claim 1, wherein the optical thickness profile of the first dielectric layer is essentially radially symmetrical.
Claim 6
Dependent Claim
33 words
The mirror of claim 1, wherein the optical thickness profile of the first dielectric layer is essentially radially symmetrical; and the optical thickness profile of the second dielectric layer is essentially radially symmetrical.
Claim 7
Dependent Claim
20 words
The mirror of claim 1, wherein the optical thickness profiles of the first and second dielectric layers are essentially equivalent.
Claim 8
Dependent Claim
21 words
The mirror of claim 1, wherein the optical thickness profiles of the first, second and third dielectric layers are essentially equivalent.
Claim 9
Dependent Claim
17 words
The mirror of claim 1, wherein the substrate includes an anti-reflective coating which defines the first surface.
Claim 10
Dependent Claim
20 words
A mirror according to claim 1, wherein the substrate consists of a material essentially transparent at the given wavelength λ.
References Cited (Backward Citations)
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