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US5283374A
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Selected phenolic derivatives of 4-(4-hydroxyphenyl)-cyclohexanone and their use as sensitivity enhancers for radiation sensitive mixtures
Assignee: Olin Microelectronic Chemicals Inc
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Filing: 1993-04-05
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Granted: 1994-02-01
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Expires: 2013-04-05
Abstract
Abstract A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one compound of formula (I): ##STR1## wherein each R is individually selected from the group consisting of hydrogen and a lower alkyl group having 1-4 carbon atoms and each n is 0, 1, or 2; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
Inventors
- 👤 Alfred T. Jeffries, III
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 21:57
CPC Classifications
C; C07; C07C; C07C39/00; C07C39/12; C07C39/17; G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/0226; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
37 words
A polyhydric phenolic compound of formula (I): ##STR9## wherein each R is individually selected from the group consisting of hydrogen and a lower alkyl group having 1-4 carbon atoms and each n is 0, 1, or 2.
Claim 2
Dependent Claim
37 words
A polyhydric phenolic compound of formula (I): ##STR9## wherein each R is individually selected from the group consisting of hydrogen and a lower alkyl group having 1-4 carbon atoms and each n is 0, 1, or 2.
Claim 3
Dependent Claim
11 words
The phenolic compound of claim 1 wherein said compound is 1,1,4-tris(4-hydroxyphenyl)-cyclohexane.
Claim 4
Dependent Claim
106 words
A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one phenolic derivative of 4-(4-hydroxyphenol)cyclohexanone compound of formula (I): ##STR10## wherein each R is individually selected from the group consisting of hydrogen and a lower alkyl group having 1-4 carbon atoms and each n is 0, 1, or 2; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
Claim 5
Dependent Claim
106 words
A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one phenolic derivative of 4-(4-hydroxyphenol)cyclohexanone compound of formula (I): ##STR10## wherein each R is individually selected from the group consisting of hydrogen and a lower alkyl group having 1-4 carbon atoms and each n is 0, 1, or 2; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
Claim 6
Dependent Claim
15 words
The composition of claim 3 wherein said binder resin is an alkali-soluble phenolic novolak resin.
Claim 7
Dependent Claim
13 words
The composition of claim 3 wherein said photoactive compound is an o-quinonediazide compound.
Claim 8
Dependent Claim
69 words
The composition of claim 5 wherein said o-quinonediazide compound or compounds are present in the amount of about 10% to about 25% by weight, said binder resin is present in the amount of about 75% to about 90% by weight and said phenolic derivative of 4-(4-hydroxyphenol)cyclohexanone is present in the amount of 0.5% to about 10% by weight, all based on the total solids content of said radiation-sensitive composition.
Claim 9
Dependent Claim
30 words
The composition of claim 3 further comprising at least one substance selected from the group consisting of solvents, actinic and visual contrast dyes, plasticizers, anti-striation agents and other speed enhancers.
Claim 10
Dependent Claim
35 words
The composition of claim 3 wherein said phenolic derivative of 4-(4-hydroxyphenol)cyclohexanone is present in the amount of from about 2% to about 4% by weight, based on the total solids content of said radiation-sensitive composition.
Claim 11
Dependent Claim
12 words
The composition of claim 3 wherein phenolic derivative of 4-(4-hydroxyphenol)cyclohexanone is 1,1,4-tris(4-hydroxyphenol)cyclohexane.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-01-31 | 1997-08-02 | 1998-02-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-31 | 2001-08-02 | 2002-02-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-31 | 2005-08-02 | 2006-02-01 | $7700.00 | Window Closed / Lapsed |