US5282947A
Expired / Lapsed
US
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Magnet assembly for enhanced sputter target erosion
Assignee: Philips Semiconductors Inc
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Filing: 1992-08-13
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Granted: 1994-02-01
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Expires: 2012-08-13
Abstract
Abstract The present invention concerns a magnet assembly for a sputtering chamber that allows for an even erosion of a target in the sputtering chamber so that atoms on the target are deposited on a wafer. This magnet assembly has a side magnet which is thinner than a center and ring magnet. This side magnet's centerplane is positioned above the centerplane of the other magnets. Additionally, this magnet assembly uses a center magnet in the range of substantially 350-450 Gauss and a side magnet of in the range of substantially 680-780 Gauss so that an asymmetrical magnetic field will be created which will cause an even erosion of the target and prevent re-deposition.
Inventors
- 👤 Hunter B. Brugge
- 👤 Kin-Sang Lam
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 17:43
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/345; H01J37/3455; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; H01J37/3402; H01J37/3405; H01J37/3408
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
103 words
A magnet assembly for a sputtering chamber comprising: a ring magnet section of a first thickness, said ring magnet section being symmetrical about a first axis and a second axis, said ring magnet section defining a center area; a center magnet section of a second thickness, said center magnet section located within the center area, said center magnet section located asymmetrically to said first axis; and a side magnet section within said center area attached to said ring magnet section and located on one side of the first axis, said side magnet having of a thickness less than said first and second thickness.
Claim 2
Dependent Claim
103 words
A magnet assembly for a sputtering chamber comprising: a ring magnet section of a first thickness, said ring magnet section being symmetrical about a first axis and a second axis, said ring magnet section defining a center area; a center magnet section of a second thickness, said center magnet section located within the center area, said center magnet section located asymmetrically to said first axis; and a side magnet section within said center area attached to said ring magnet section and located on one side of the first axis, said side magnet having of a thickness less than said first and second thickness.
Claim 3
Dependent Claim
29 words
The magnet assembly of claim 1, wherein the thickness of the side magnet section is less than one-half of said first thickness and less than one-half said second thickness.
Claim 4
Dependent Claim
77 words
The magnet assembly of claim 1, wherein the ring magnet section, the center magnet section, and the side magnet sections are mounted on a plate and the side magnet section is off set from the ring magnet section so that a first centerplane defined as a plane parallel to the plate bisecting the side magnet section is not the same as a second centerplane defined as a plane parallel to the plate bisecting the ring magnet section.
Claim 5
Dependent Claim
30 words
The magnet assembly of claim 3, wherein the first centerplane bisecting the side magnet section is positioned about a quarter inch above the second centerplane bisecting the ring magnet section.
Claim 6
Dependent Claim
38 words
The magnet assembly of claim 4, wherein the length of the ring magnet section along the first axis is about 103/4 inches and the length of the ring magnet section along the second axis is about 83/4 inches.
Claim 7
Dependent Claim
17 words
The magnet assembly of claim 1, wherein the ring magnet section is elongated along the first axis.
Claim 8
Dependent Claim
25 words
The magnet assembly of claim 1 wherein said center magnet section, said ring magnet section, and said side magnet section are comprised of ceramic magnets.
Claim 9
Dependent Claim
112 words
A magnet assembly for, a sputtering chamber comprising: a ring magnet section symmetrical along a first axis and a second axis, said ring magnet section defining a center area; a center magnet section within the center area defined by said ring magnet section, said center magnet section located asymmetrically to said first axis, said center magnet section having a magnetic field strength in the range of substantially 680-780 Gauss; and a side magnet section within said center area attached to said ring magnet section on one side of the first axis of the ring magnet section, said side magnet section having a magnetic field strength in the range of substantially 350-450 Gauss.
Claim 10
Dependent Claim
112 words
A magnet assembly for, a sputtering chamber comprising: a ring magnet section symmetrical along a first axis and a second axis, said ring magnet section defining a center area; a center magnet section within the center area defined by said ring magnet section, said center magnet section located asymmetrically to said first axis, said center magnet section having a magnetic field strength in the range of substantially 680-780 Gauss; and a side magnet section within said center area attached to said ring magnet section on one side of the first axis of the ring magnet section, said side magnet section having a magnetic field strength in the range of substantially 350-450 Gauss.
Claim 11
Dependent Claim
23 words
The magnet assembly of claim 8, wherein said center magnet section has a magnetic field strength in the range of substantially 705-755 Gauss.
Claim 12
Dependent Claim
20 words
The magnet assembly of claim 9, wherein said center magnet section has a magnetic field strength of substantially 730 Gauss.
Claim 13
Dependent Claim
23 words
The magnet assembly of claim 8, wherein said side magnet section has a magnetic field strength in the range of substantially 375-425 Gauss.
Claim 14
Dependent Claim
20 words
The magnet assembly of claim 11, wherein said side magnet section has a magnetic field strength of substantially 400 Gauss.
Claim 15
Dependent Claim
23 words
The magnet assembly of claim 8, wherein said ring magnet section has a magnetic field strength in the range of substantially 1350-1450 Gauss.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-31 | 1997-08-02 | 1998-02-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-31 | 2001-08-02 | 2002-02-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-31 | 2005-08-02 | 2006-02-01 | $7700.00 | Window Closed / Lapsed |