US5281305A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for the production of optical waveguides employing trench and fill techniques
Assignee: Northrop Grumman Systems Corp
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Filing: 1992-05-22
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Granted: 1994-01-25
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Expires: 2012-05-22
Abstract
Abstract A method is described for producing stacked optical waveguides in a silicon dioxide substrate and includes the steps of: etching a first trench in the substrate; filling the first trench with a glassy optical transmission media; depositing a layer of silicon dioxide over the filled trench; etching a second trench in the silicon dioxide layer, the second trench aligned with the first trench; and filling the second trench with a glassy optical transmission media.
Inventors
- 👤 Sae H. Lee
- 👤 Richard L. Davis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 08:49
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/136; G02B6/12002; G02B6/122; G02B6/1221; G02B6/132
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
86 words
A method for producing stacked optical waveguides in an optically transmissive material substrate, the method comprises the steps of: a) etching a first trench in the substrate; b) filling said first trench with a first optically transparent glass; c) depositing a layer of a second optically transparent glass over said filled first trench; d) etching a second trench in said layer of second optically transparent glass, said second trench aligned with said first trench; and e) filling said second trench with a third optically transparent glass.
Claim 2
Independent Claim
86 words
A method for producing stacked optical waveguides in an optically transmissive material substrate, the method comprises the steps of: a) etching a first trench in the substrate; b) filling said first trench with a first optically transparent glass; c) depositing a layer of a second optically transparent glass over said filled first trench; d) etching a second trench in said layer of second optically transparent glass, said second trench aligned with said first trench; and e) filling said second trench with a third optically transparent glass.
Claim 3
Dependent Claim
58 words
The method as recited in claim 1 where, after the etches recited in steps a) and d), steps a) and d) further comprise the further substeps of: wet-etching the trench to smooth its surface; and depositing and reflowing a thin continuous glass layer on the surface of each trench as a support for said respective optically transparent glass.
Claim 4
Dependent Claim
45 words
The method as recited in claim 1, wherein steps b) and e) comprise the further steps of: masking the filled trench and removing non-masked glass on said substrate; and removing the mask and reflowing said optically transparent glass to provide a uniform interface surface therefore.
Claim 5
Dependent Claim
26 words
The method as recited in claim 3 wherein a separation between said first trench and said second trench is the thickness of said continuous glass layer.
Claim 6
Dependent Claim
16 words
The method as recited in claim 4 wherein said first optically transparent glass is silicon dioxide.
Claim 7
Dependent Claim
22 words
The method as recited in claim 5 wherein the optical index of said continuous glass layer is near that of silicon dioxide.
Claim 8
Dependent Claim
21 words
The method as recited in claim 6 wherein one of said glasses filling said first and second trenches is phosphosilicate glass.
Claim 9
Dependent Claim
26 words
The method as recited in claim 7 wherein one said glassy optical transmission media is a glass with refractive index greater than that of phosphosilicate glass.
Claim 10
Dependent Claim
15 words
The method as recited in claim 8 wherein said continuous glassy layer is borosilicate glass.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-24 | 1997-07-26 | 1998-01-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-24 | 2001-07-26 | 2002-01-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-24 | 2005-07-26 | 2006-01-25 | $7700.00 | Window Closed / Lapsed |