Minute particle loading method and apparatus

Claim 2

A minute particle loading method comprising the steps of: preparing a minute particle holder having regularly arranged through holes, the diameter of each of said through holes being greater at one side of the minute particle holder which presents a holding surface and smaller at the other, opposite side of said holder, each said through holes regularly holding minute particles at its greater-diameter end opening in said holding surface; defining an enclosed space over said holding surface of said minute particle holder; and introducing a fluid into said enclosed space to stir up said minute particles put in said enclosed space, while sucking said particles by applying a reduced pressure from the other side of said holder opposite to said holding surface, so that said minute particles are directed toward and placed to be loaded in said holding surface of said minute particle holder.

Claim 3

A minute particle loading method according to claim 1, wherein the supply and stoppage of the fluid to said enclosed space are repeated at least two times.

Claim 4

A minute particle loading method according to claim 1, wherein those minute particles which have not been loaded in said minute particle holder are recovered by introducing compressed air into said enclosed space.

Claim 5

A minute particle loading method according to claim 1, wherein said minute particle holder is made of glass allowing light to pass therethrough, light is illuminated to said minute particle holder after loading said minute particles in said minute particle holder, so that shades of said minute particles are visually recognized to detect whether or not said minute particles are loaded in desired positions on said minute particle holder, and said minute particles are stirred and sucked repeatedly until said minute particles are loaded in all the desired positions.

Claim 6

A minute particle loading method according to claim 4, wherein said enclosed space is defined by a movable hopper, and the light is illuminated to said minute particle holder for confirming whether or not said minute particles are loaded in all the desired positions on said minute particle holder, under a condition that said hopper is moved to make open the space over said minute particle holder.

Claim 7

A minute particle loading method according to claim 4, wherein said minute particles are solder balls which are supplied to said enclosed space such that a solder ball push-up shaft vertically slidable in a stocker and having a recess at the upper end thereof is lifted from the stocker which stores a larger number of solder balls to be used for forming solder bumps of a semiconductor device, thereby taking out said solder balls from said stocker in number required for forming said solder bumps at one time.

Claim 8

A solder ball loading apparatus comprising: supply means for defining an enclosed space over a solder ball holder having numerous through holes which are different in diameter on the opposite surfaces thereof, so that solder balls can be placed and loaded on the surface of said solder ball holder in which larger-diameter ones of sad holes are exposed, and for supplying the solder balls taken out by a solder ball push-up shaft to said enclosed space with compressed air; and stirring-up means for stirring up said solder balls within said enclosed space by repeating the supply and stoppage of the compressed air to said enclosed space at least two times, so that said solder ball are placed and loaded in said solder ball holder.

Claim 9

A solder ball loading apparatus comprising: supply means for defining an enclosed space over a solder ball holder having numerous through holes which are different in diameter on the opposite surfaces thereof, so that solder balls can be placed and loaded on the surface of said solder ball holder in which larger-diameter ones of sad holes are exposed, and for supplying the solder balls taken out by a solder ball push-up shaft to said enclosed space with compressed air; and stirring-up means for stirring up said solder balls within said enclosed space by repeating the supply and stoppage of the compressed air to said enclosed space at least two times, so that said solder ball are placed and loaded in said solder ball holder.

Claim 10

A solder ball loading apparatus comprising: supply means for defining an enclosed space over a solder ball holder having numerous through holes which are different in diameter on the opposite surfaces thereof, so that solder balls can be placed and loaded on the surface of said solder ball holder in which larger-diameter ones of said holes are exposed, and for supplying the solder balls taken out by a solder ball push-up shaft to said enclosed space with compressed air; stirring-up means for stirring up said solder balls within said enclosed space by repeating the supply and stoppage of the compressed air to said enclosed space at least two times; suction means for loading said solder balls in said solder ball holder under suction by sucking said solder balls via said through holes of said solder ball holder, while stirring up said solder balls; and recovery means for recovering from said enclosed space those ones of said solder balls which are not loaded in said solder ball holder under suction, by introducing the compressed air into said enclosed space again.

Claim 11

A solder ball loading apparatus comprising: supply means for defining an enclosed space over a solder ball holder having numerous through holes which are different in diameter on the opposite surfaces thereof, so that solder balls can be placed and loaded on the surface of said solder ball holder in which larger-diameter ones of said holes are exposed, and for supplying the solder balls taken out by a solder ball push-up shaft to said enclosed space with compressed air; stirring-up means for stirring up said solder balls within said enclosed space by repeating the supply and stoppage of the compressed air to said enclosed space at least two times; suction means for loading said solder balls in said solder ball holder under suction by sucking said solder balls via said through holes of said solder ball holder, while stirring up said solder balls; and recovery means for recovering from said enclosed space those ones of said solder balls which are not loaded in said solder ball holder under suction, by introducing the compressed air into said enclosed space again.

Claim 12

A solder ball loading apparatus comprising: storage means for storing a large number of solder balls to be used for forming solder bumps of a semiconductor device; separator means for taking out the solder balls in number required for one cycle of forming said solder bumps by vertically moving a solder ball push-up shaft, which has a recess at the upper end thereof, within said storage means; supply means for defining an enclosed space over a light-transmittable solder ball holder having numerous through holes which are different in diameter on the opposite surfaces thereof, so that solder balls can be placed and loaded on the surface of said solder ball holder in which larger-diameter ones of said holes are exposed, and for supplying the solder balls taken out by said solder ball push-up shaft to said enclosed space with compressed air; stirring-up means for stirring up said solder balls within said enclosed space by repeating the supply and stoppage of the compressed air to said enclosed space at least two times; suction means for positively loading said solder balls in said solder ball holder under suction by sucking said solder balls via said through holes of said solder ball holder, while stirring up said solder balls; detector means for detecting whether or not said solder balls are loaded in desired positions on said solder ball holder, by illuminating light to said solder ball holder and visually recognizing shades of said solder balls caused by the illuminated light; control means for controlling said respective means to supply, stir up and suck said solder balls when the result that said solder balls have not yet been loaded in all the desired positions is visually recognized, so that the supply, stirring-up and suction of said solder balls are repeated until said solder balls are loaded in all the desired positions; and recovery means for recovering from said enclosed space those ones of said solder balls which are not loaded in said solder ball holder under suction, by introducing the compressed air into said enclosed space again.

Claim 13

A solder ball loading apparatus comprising: storage means for storing a large number of solder balls to be used for forming solder bumps of a semiconductor device; separator means for taking out the solder balls in number required for one cycle of forming said solder bumps by vertically moving a solder ball push-up shaft, which has a recess at the upper end thereof, within said storage means; supply means for defining an enclosed space over a light-transmittable solder ball holder having numerous through holes which are different in diameter on the opposite surfaces thereof, so that solder balls can be placed and loaded on the surface of said solder ball holder in which larger-diameter ones of said holes are exposed, and for supplying the solder balls taken out by said solder ball push-up shaft to said enclosed space with compressed air; stirring-up means for stirring up said solder balls within said enclosed space by repeating the supply and stoppage of the compressed air to said enclosed space at least two times; suction means for positively loading said solder balls in said solder ball holder under suction by sucking said solder balls via said through holes of said solder ball holder, while stirring up said solder balls; detector means for detecting whether or not said solder balls are loaded in desired positions on said solder ball holder, by illuminating light to said solder ball holder and visually recognizing shades of said solder balls caused by the illuminated light; control means for controlling said respective means to supply, stir up and suck said solder balls when the result that said solder balls have not yet been loaded in all the desired positions is visually recognized, so that the supply, stirring-up and suction of said solder balls are repeated until said solder balls are loaded in all the desired positions; and recovery means for recovering from said enclosed space those ones of said solder balls which are not loaded in said solder ball holder under suction, by introducing the compressed air into said enclosed space again.

Claim 14

A minute particle holding apparatus comprising: a minute particle holder means having regularly arranged through holes, the diameter of each of said through holes being greater at one side of said minute particle holder means presenting a holding surface and smaller at the other, opposite side of said holder means, each said through holes regularly holding minute particles at its greater-diameter end opening in said holding surface by a suction effected for the other side of said minute particle holder means opposite to said holding surface; enclosed space defining means for defining an enclosed space over said holding surface of said holder means; and stirring-up means for stirring up said minute particles in said enclosed space with a turbulent flow of a fluid so that minute particle therein are placed and held int the greater-diameter ends of said through-holes in said holder means.

Claim 15

A minute particle holding apparatus comprising: a minute particle holder means having regularly arranged through holes, the diameter of each of said through holes being greater at one side of said minute particle holder means presenting a holding surface and smaller at the other, opposite side of said holder means, each said through holes regularly holding minute particles at its greater-diameter end opening in said holding surface by a suction effected for the other side of said minute particle holder means opposite to said holding surface; enclosed space defining means for defining an enclosed space over said holding surface of said holder means; and stirring-up means for stirring up said minute particles in said enclosed space with a turbulent flow of a fluid so that minute particle therein are placed and held int the greater-diameter ends of said through-holes in said holder means.

Claim 16

A minute particle holding apparatus according to claim 10, wherein the fluid for use in said stirring-up mans is a compressed fluid given by inert gas.

Claim 17

A minute particle holding apparatus according to claim 10, further comprising pressure regulator means for regulating pressure of the fluid for use in said stirring-up means to proper pressure so that said minute particles will not be changed in their shape and weight when said particles strike against said enclosed space defining means and collide with one another.

Claim 18

A minute particle holding apparatus according to claim 10, further comprising moisture removing means adapted to remove moisture of the fluid for use in said stirring-up means.

Claim 19

A minute particle holding apparatus according to claim 10, further comprising a static electricity removing device adapted to remove static electricity charged on said minute particles.

Claim 20

A minute particle holding apparatus according to claim 10, wherein said minute particles are solder balls, said apparatus further comprising preheating means for preheating said solder balls to such an extent that said solder balls are not melted, before said solder balls are brought into contact with a semiconductor device and then heated.

Claim 21

A minute particle loading apparatus according to claim 10 wherein said enclosed space has a flow passage through which the fluid introduced into said enclosed space for stirring up said minute particles is delivered outwardly of said enclosed space.

Claim 22

A minute particle holding apparatus comprising: a minute particle holder means having regularly arranged through holes, the diameter of each of said through holes being greater at one side of said minute particle holder means presenting a holding surface at the other, opposite side of said holder means, each said through holes regularly holding minute particles at its greater-diameter end opening in said holding surface by a suction effected from the other side of said minute particle holder means opposite to said holding surface; enclosed space defining means for defining an enclosed space over said holding surface of said holder means; stirring-up means for stirring up minute particles in said enclosed space with a turbulent flow of a fluid so that minute particles are placed and held in said holder means; and recovering means for recovering minute particles which are not placed and held in said holder means, by introducing a fluid into said enclosed space.

Claim 23

A minute particle holding apparatus comprising: a minute particle holder means having regularly arranged through holes, the diameter of each of said through holes being greater at one side of said minute particle holder means presenting a holding surface at the other, opposite side of said holder means, each said through holes regularly holding minute particles at its greater-diameter end opening in said holding surface by a suction effected from the other side of said minute particle holder means opposite to said holding surface; enclosed space defining means for defining an enclosed space over said holding surface of said holder means; stirring-up means for stirring up minute particles in said enclosed space with a turbulent flow of a fluid so that minute particles are placed and held in said holder means; and recovering means for recovering minute particles which are not placed and held in said holder means, by introducing a fluid into said enclosed space.

Claim 24

A minute particle holding apparatus comprising: a minute particle holder means having regularly arranged through holes, the diameter of each of said through holes being greater at one side of said minute particle holder means presenting a holding surface and smaller at the other, opposite side of said holder means, each said through holes regularly holding a minute particles at its greater-diameter end opening in said holding surface by a suction effected from the other side of said minute particle holder means opposite to said holding surface; enclosed space defining means for defining an enclosed space over said holding surface of said holder means; supply means for supplying said minute particles to said enclosed space by introducing a fluid into said enclosed space; stirring-up means for stirring up said minute particles in said enclosed space with a turbulent flow of a fluid so that said minute particles are placed and held in said holder means; and recovery means for covering minute particles which are not placed and held in said holder means, by introducing a fluid into said enclosed space.

Claim 25

A minute particle holding apparatus comprising: a minute particle holder means having regularly arranged through holes, the diameter of each of said through holes being greater at one side of said minute particle holder means presenting a holding surface and smaller at the other, opposite side of said holder means, each said through holes regularly holding a minute particles at its greater-diameter end opening in said holding surface by a suction effected from the other side of said minute particle holder means opposite to said holding surface; enclosed space defining means for defining an enclosed space over said holding surface of said holder means; supply means for supplying said minute particles to said enclosed space by introducing a fluid into said enclosed space; stirring-up means for stirring up said minute particles in said enclosed space with a turbulent flow of a fluid so that said minute particles are placed and held in said holder means; and recovery means for covering minute particles which are not placed and held in said holder means, by introducing a fluid into said enclosed space.