US5275047A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rotation rate sensor
Assignee: Robert Bosch GmbH
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Filing: 1991-09-12
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Granted: 1994-01-04
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Expires: 2011-09-12
Abstract
Abstract A rotation rate sensor has a multi-layer structure, with an oscillatory body (13) formed in one carrier layer (10). The body can be stimulated to oscillate in a first oscillation direction (1). On top of this body (13), a further structural element (21), which is deflectable normal to the major surface of the carrier (10) and which serves to detect Coriolis acceleration, is located. There is a device for capacitive or piezo-resistive measurement of the deflection of the structural element. Preferably, the entire structure is fabricated from a silicon wafer, so that the measurement device can be integrated onto the sensor element.
Inventors
- 👤 Erich Zabler
- 👤 Jiri Marek
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 17:34
CPC Classifications
G; G01; G01C; G01C19/00; G01C19/56; G01C19/5719; G01C19/5733; G01C19/5755
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
198 words
Rotation rate sensor with a multi-layer sensor element having first and second layers (10, 21), wherein said first layer (10) defines a generally planar carrier having two mutually parallel major surfaces, at least one oscillatory body (13) is formed in said first layer, said body being formed as a seismic mass suspended from said planar carrier (10), said oscillatory body is capable of oscillation (1) in at least a first oscillation direction (1) oriented parallel to said major surfaces of said planar carrier (10), said oscillatory body (13) is supported from the carrier (10) on at least one side by support rods (14); said second layer defines at least one acceleration-sensitive structural element (21) supported (23) on a surface of said at least one oscillatory body (13), said oscillatory body surface being oriented parallel to said major surfaces of said carrier (10); said at least one structural element (21) is deflectable (2) perpendicular to said major surfaces of said carrier (10); and further comprising capacitive or piezoresistive detecting means (17, 181; 21, 182) for detecting Coriolis force deflections (2), perpendicular to said carrier major surfaces, of said at least one structural element (21) formed from said second layer.
Claim 2
Dependent Claim
198 words
Rotation rate sensor with a multi-layer sensor element having first and second layers (10, 21), wherein said first layer (10) defines a generally planar carrier having two mutually parallel major surfaces, at least one oscillatory body (13) is formed in said first layer, said body being formed as a seismic mass suspended from said planar carrier (10), said oscillatory body is capable of oscillation (1) in at least a first oscillation direction (1) oriented parallel to said major surfaces of said planar carrier (10), said oscillatory body (13) is supported from the carrier (10) on at least one side by support rods (14); said second layer defines at least one acceleration-sensitive structural element (21) supported (23) on a surface of said at least one oscillatory body (13), said oscillatory body surface being oriented parallel to said major surfaces of said carrier (10); said at least one structural element (21) is deflectable (2) perpendicular to said major surfaces of said carrier (10); and further comprising capacitive or piezoresistive detecting means (17, 181; 21, 182) for detecting Coriolis force deflections (2), perpendicular to said carrier major surfaces, of said at least one structural element (21) formed from said second layer.
Claim 3
Dependent Claim
36 words
Sensor according to claim 1, further comprising support strips (23) connecting at least one side of said structural element (21) to said oscillatory body (13), said strips being aligned parallel to said first oscillation direction (1).
Claim 4
Dependent Claim
42 words
Sensor according to claim 1, wherein said structural element (21) is formed as a plate-like seismic mass, oriented parallel to said major surface of said carrier (10), and connected on at least one side by support strips (23) to said carrier (10).
Claim 5
Dependent Claim
27 words
Sensor according to claim 1, wherein said carrier (10) consists essentially of a material selected from the group consisting of (110)-oriented monocrystalline silicon and (100)-oriented monocrystalline silicon.
Claim 6
Dependent Claim
27 words
Sensor according to claim 2, wherein said carrier (10) consists essentially of a material selected from the group consisting of (110)-oriented monocrystalline silicon and (100)-oriented monocrystalline silicon.
Claim 7
Dependent Claim
27 words
Sensor according to claim 3, wherein said carrier (10) consists essentially of a material selected from the group consisting of (110)-oriented monocrystalline silicon and (100)-oriented monocrystalline silicon.
Claim 8
Dependent Claim
14 words
Sensor according to claim 1, wherein said structural element (21) is a polysilicon structure.
Claim 9
Dependent Claim
14 words
Sensor according to claim 2, wherein said structural element (21) is a polysilicon structure.
Claim 10
Dependent Claim
14 words
Sensor according to claim 3, wherein said structural element (21) is a polysilicon structure.
Claim 11
Dependent Claim
42 words
Sensor according to claim 1, wherein said structural element (21) is a product made by the process of depositing a silicon layer on portions of the surface of said carrier to form an auxiliary layer, and subsequently underetching the thus-deposited auxiliary layer.
Claim 12
Dependent Claim
42 words
Sensor according to claim 2, wherein said structural element (21) is a product made by the process of depositing a silicon layer on portions of the surface of said carrier to form an auxiliary layer, and subsequently underetching the thus-deposited auxiliary layer.
Claim 13
Dependent Claim
42 words
Sensor according to claim 3, wherein said structural element (21) is a produce made by the process of depositing a silicon layer on portions of the surface of said carrier to form an auxiliary layer, and subsequently underetching the thus-deposited auxiliary layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-03 | 1997-07-05 | 1998-01-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-03 | 2001-07-05 | 2002-01-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-03 | 2005-07-05 | 2006-01-04 | $7700.00 | Window Closed / Lapsed |