US5273933A
Expired / Lapsed
US
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Vapor phase growth method of forming film in process of manufacturing semiconductor device
Assignee: Toshiba Corp
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Filing: 1992-07-23
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Granted: 1993-12-28
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Expires: 2012-07-23
Abstract
Abstract In a process of manufacturing a short-wavelength-light emitting element, n- and p-type GaInAlN films are formed on a substrate made of SiC, using an MOCVD method. (CH 3 ) 3 SiN 3 is used as raw material for nitrogen. The films are grown at a relatively low temperature and the amount of nitrogen doped in the films is increased.
Inventors
- 👤 Ako Hatano
- 👤 Toshihide Izumiya
- 👤 Yasuo Ohba
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 18:57
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/822; H10H20/826; H10H20/01; H10H20/011; H10H20/012; H10H20/0125; H10H20/013; H10H20/0133; H10H20/01335; H10H20/052; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2904; H10P14/2907; H10P14/2909; H10P14/2911; H10P14/2921; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3216; H10P14/3218; H10P14/3224; H10P14/3231; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3408; H10P14/3414; H10P14/3416; H10P14/3418; H10P14/3424; H10P14/3431; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; Y; Y10; Y10S; Y10S438/00; Y10S438/914; Y10S438/925
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
109 words
A MOCVD method of growing on a substrate a III-V group compound film containing InN, for use in forming a light emitting layer of a semiconductor light emitting element; wherein an organic metal compound containing an azide group and represented by R 3 SiN 3 (wherein R is an alkyl group) is used as material for N contained in said compound film, and conditions for forming said compound film are set such that said organic metal compound is decomposed to release N therefrom and to maintain bonding between said alkyl group and Si so that Si contained in said organic metal compound is not taken into said compound film.
Claim 2
Dependent Claim
109 words
A MOCVD method of growing on a substrate a III-V group compound film containing InN, for use in forming a light emitting layer of a semiconductor light emitting element; wherein an organic metal compound containing an azide group and represented by R 3 SiN 3 (wherein R is an alkyl group) is used as material for N contained in said compound film, and conditions for forming said compound film are set such that said organic metal compound is decomposed to release N therefrom and to maintain bonding between said alkyl group and Si so that Si contained in said organic metal compound is not taken into said compound film.
Claim 3
Dependent Claim
20 words
A method according to claim 1, wherein (CH 3 ) 3 SiN 3 is used as said organic metal compound.
Claim 4
Dependent Claim
25 words
A method according to claim 2, wherein the temperature of said substrate during growth of said film is set at not more than 1000° C.
Claim 5
Dependent Claim
150 words
A method according to claim 3, wherein said method is a method of forming a first film of a first conductivity type and a second film of a second conductivity type, which constitute a PN junction of said light emitting layer of a semiconductor light emitting element, said first and second films being made of GaInAlN, said method comprising the steps of: receiving said substrate in a reaction vessel; forming said first film by introducing into the reaction vessel material gases containing In(CH 3 ) 3 , Ga(CH 3 ) 3 , (CH 3 ) 3 SiN 3 , Al(CH 3 ) 3 , and a first conductivity-type dopant; and forming said second film by introducing into the reaction vessel material gases containing In(CH 3 ) 3 , Ga(CH 3 ) 3 , (CH 3 ) 3 SiN 3 , Al(CH 3 ) 3 , and a second conductivity-type dopant.
Claim 6
Dependent Claim
19 words
A method according to claim 4, wherein said first and second conductivity type dopants are Si and Mg, respectively.
Claim 7
Dependent Claim
20 words
A method according to claim 5, wherein silane is used as material for Si as said first conductivity type dopant.
Claim 8
Dependent Claim
20 words
A method according to claim 5, wherein cyclopentadienylmagnesium is used as material for Mg as said second conductivity type dopant.
Claim 9
Dependent Claim
175 words
A MOCVD method of growing on a substrate a first film of a first conductivity type and a second film of a second conductivity type, which constitute a PN junction of a semiconductor light emitting element and are made of III-V group compound containing InN, said method comprising the steps of: receiving said substrate in a reaction vessel; forming said first film by introducing material gases into the reaction vessel; and forming said second film by introducing material gases into the reaction vessel; wherein an organic metal compound containing an azide group and represented by R 3 SiN 3 (where R is an alkyl group) is used as material for N contained in each of said first and second films, and conditions for forming each of said first and second films are set such that said organic metal compound is decomposed to release N therefrom and to maintain bonding between said alkyl group and Si so that Si contained in said organic metal compound is not taken into each of said first and second films.
Claim 10
Dependent Claim
175 words
A MOCVD method of growing on a substrate a first film of a first conductivity type and a second film of a second conductivity type, which constitute a PN junction of a semiconductor light emitting element and are made of III-V group compound containing InN, said method comprising the steps of: receiving said substrate in a reaction vessel; forming said first film by introducing material gases into the reaction vessel; and forming said second film by introducing material gases into the reaction vessel; wherein an organic metal compound containing an azide group and represented by R 3 SiN 3 (where R is an alkyl group) is used as material for N contained in each of said first and second films, and conditions for forming each of said first and second films are set such that said organic metal compound is decomposed to release N therefrom and to maintain bonding between said alkyl group and Si so that Si contained in said organic metal compound is not taken into each of said first and second films.
Claim 11
Dependent Claim
20 words
A method according to claim 8, wherein (CH 3 ) 3 SiN 3 is used as said organic metal compound.
Claim 12
Dependent Claim
30 words
A method according to claim 9, wherein the temperature of said substrate during growth of each of said first and second films is set at not more than 1000° C.
Claim 13
Dependent Claim
91 words
A method according to claim 10, wherein each of said first and second films is made of GaInAlN, said material gases for forming said first film contain In(CH 3 ) 3 , Ga(CH 3 ) 3 , (CH 3 ) 3 SiN 3 , Al(CH 3 ) 3 , and a first conductivity-type dopant, and said material gases for forming said second film contain In(CH 3 ) 3 , Ga(CH 3 ) 3 , (CH 3 ) 3 SiN 3 , Al(CH 3 ) 3 , and a second conductivity-type dopant.
Claim 14
Dependent Claim
19 words
A method according to claim 11, wherein said first and second conductivity type dopants are Si and Mg, respectively.
Claim 15
Dependent Claim
20 words
A method according to claim 12, wherein silane is used as material for Si as said first conductivity type dopant.
Claim 16
Dependent Claim
20 words
A method according to claim 12, wherein cyclopentadienylmagnesium is used as material for Mg as said second conductivity type dopant.
References Cited (Backward Citations)
US4569855A
Cited
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