US5273731A
Expired / Lapsed
US
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Substantially transparent free standing diamond films
Assignee: Diamond Innovations Inc
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Filing: 1992-03-30
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Granted: 1993-12-28
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Expires: 2012-03-30
Abstract
Abstract Substantially transparent polycrystalline diamond film is provided having a thickness greater than 50 microns which can be used in glazing applications and as a heat sink in microelectric applications. A mixture of hydrogen and methane is conveyed into a heat filament reaction zone which is adjacent to an appropriate substrate, such as a molybdenum substrate to produce non-adherent polycrystalline substantially transparent diamond film.
Inventors
- 👤 Thomas R. Anthony
- 👤 James F. Fleischer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 23:44
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/01; Y; Y10; Y10S; Y10S117/00; Y10S117/915
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
16 words
A continuous free-standing substantially transparent polycrystalline diamond film having a thickness of at least 50 microns.
Claim 2
Dependent Claim
16 words
A continuous free-standing substantially transparent polycrystalline diamond film having a thickness of at least 50 microns.
Claim 3
Dependent Claim
26 words
A continuous free-standing substantially transparent polycrystalline diamond film having a thickness of at least 50 microns and a thermal conductivity of at least about 4 W/cm-K.
Claim 4
Dependent Claim
26 words
A continuous free-standing substantially transparent polycrystalline diamond film having a thickness of at least 50 microns and a thermal conductivity of at least about 4 W/cm-K.
Claim 5
Dependent Claim
28 words
A continuous free-standing substantially transparent polycrystalline diamond film in accordance with claim 1, having a thermal conductivity in the range of about 4 W/cm-K to about 21 W/cm-K.
Claim 6
Dependent Claim
80 words
A continuous free-standing, substantially transparent, polycrystalline diamond film having a thickness of at least 50 microns, and when examined for transparency at a thickness of about 300 microns, it has an absorbance of less than about 1.6 when using light having a wavelength in the range of between about 300 to 1400 nanometers, and it has an absorbance of less than about 0.2 when using light having a wavelength in the range of between about 1400 to about 2400 nanometers.
Claim 7
Dependent Claim
80 words
A continuous free-standing, substantially transparent, polycrystalline diamond film having a thickness of at least 50 microns, and when examined for transparency at a thickness of about 300 microns, it has an absorbance of less than about 1.6 when using light having a wavelength in the range of between about 300 to 1400 nanometers, and it has an absorbance of less than about 0.2 when using light having a wavelength in the range of between about 1400 to about 2400 nanometers.
Claim 8
Dependent Claim
25 words
A substantially transparent diamond film in accordance with claim 1, wherein the diamond film has a thickness between about 100 microns and about 1000 microns.
Claim 9
Dependent Claim
25 words
A substantially transparent diamond film in accordance with claim 1, wherein the diamond film has a thickness between about 200 microns and about 500 microns.
Claim 10
Dependent Claim
32 words
A substantially transparent diamond film in accordance with claim 1, wherein the diamond film comprises substantially vertical columnar diamond crystals having a preferred <110> orientation perpendicular to the base of the film.
Claim 11
Dependent Claim
34 words
A substantially transparent diamond film in accordance with claim 7, having diamond grain boundaries separating the columnar diamond crystals wherein said boundaries have a 70° to 90° orientation to the base of the film.
Claim 12
Independent Claim
107 words
A method of growing a continuous free standing, non-adherent substantially transparent polycrystalline film on the surface of a substrate, which diamond film has a thickness of at least 50 microns, comprising, passing a hydrogen-methane mixture at a pressure of about 1 to about 50 torr through a heated filament reaction zone which is sufficient to generate active carbon-hydrogen species and provide a temperature of about 600° C. to 1000° C. on the surface of the substrate where the hydrogen-methane mixture introduced into the heated filament reaction zone has from about 0.1 to about 2 volume % of methane based on the total volume of hydrogen and methane.
Claim 13
Independent Claim
107 words
A method of growing a continuous free standing, non-adherent substantially transparent polycrystalline film on the surface of a substrate, which diamond film has a thickness of at least 50 microns, comprising, passing a hydrogen-methane mixture at a pressure of about 1 to about 50 torr through a heated filament reaction zone which is sufficient to generate active carbon-hydrogen species and provide a temperature of about 600° C. to 1000° C. on the surface of the substrate where the hydrogen-methane mixture introduced into the heated filament reaction zone has from about 0.1 to about 2 volume % of methane based on the total volume of hydrogen and methane.
Claim 14
Dependent Claim
15 words
A continuous free-standing translucent polycrystalline diamond film having a thickness of at least 50 microns.
Claim 15
Dependent Claim
15 words
A continuous free-standing translucent polycrystalline diamond film having a thickness of at least 50 microns.
Claim 16
Dependent Claim
25 words
A continuous free-standing translucent polycrystalline diamond film having a thickness of at least 50 microns and a thermal conductivity of at least about 4 W/cm-K.
Claim 17
Dependent Claim
25 words
A continuous free-standing translucent polycrystalline diamond film having a thickness of at least 50 microns and a thermal conductivity of at least about 4 W/cm-K.
Claim 18
Dependent Claim
27 words
A continuous free-standing translucent polycrystalline diamond film in accordance with claim 11, having a thermal conductivity in the range of about 4 W/cm-K to about 21 W/cm-K.
Claim 19
Dependent Claim
79 words
A continuous free-standing, translucent, polycrystalline diamond film having a thickness of at least 50 microns, and when examined for transparency at a thickness of about 300 microns, it has an absorbance of less than about 1.6 when using light having a wavelength in the range of between about 300 to 1400 nanometers, and it has an absorbance of less than about 0.2 when using light having a wavelength in the range of between about 1400 to about 2400 nanometers.
Claim 20
Dependent Claim
79 words
A continuous free-standing, translucent, polycrystalline diamond film having a thickness of at least 50 microns, and when examined for transparency at a thickness of about 300 microns, it has an absorbance of less than about 1.6 when using light having a wavelength in the range of between about 300 to 1400 nanometers, and it has an absorbance of less than about 0.2 when using light having a wavelength in the range of between about 1400 to about 2400 nanometers.
Claim 21
Dependent Claim
24 words
A translucent diamond film in accordance with claim 11, wherein the diamond film has a thickness between about 100 microns and about 1000 microns.
Claim 22
Dependent Claim
24 words
A translucent diamond film in accordance with claim 11, wherein the diamond film has a thickness between about 200 microns and about 500 microns.
Claim 23
Dependent Claim
31 words
A translucent diamond film in accordance with claim 11, wherein the diamond film comprises substantially vertical columnar diamond crystals having a preferred <110> orientation perpendicular to the base of the film.
Claim 24
Dependent Claim
33 words
A translucent diamond film in accordance with claim 16, having diamond grain boundaries separating the columnar diamond crystals wherein said boundaries have a 70° to 90° orientation to the base of the film.
Claim 25
Independent Claim
106 words
A method of growing a continuous free standing, non-adherent translucent polycrystalline film on the surface of a substrate, which diamond film has a thickness of at least 50 microns, comprising, passing a hydrogen-methane mixture at a pressure of about 1 to about 50 torr through a heated filament reaction zone which is sufficient to generate active carbon-hydrogen species and provide a temperature of about 600° C. to 1000° C. on the surface of the substrate where the hydrogen-methane mixture introduced into the heated filament reaction zone has from about 0.1 to about 2 volume % of methane based on the total volume of hydrogen and methane.
Claim 26
Independent Claim
106 words
A method of growing a continuous free standing, non-adherent translucent polycrystalline film on the surface of a substrate, which diamond film has a thickness of at least 50 microns, comprising, passing a hydrogen-methane mixture at a pressure of about 1 to about 50 torr through a heated filament reaction zone which is sufficient to generate active carbon-hydrogen species and provide a temperature of about 600° C. to 1000° C. on the surface of the substrate where the hydrogen-methane mixture introduced into the heated filament reaction zone has from about 0.1 to about 2 volume % of methane based on the total volume of hydrogen and methane.
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| 7.5 Years (Year 8) | 2000-12-27 | 2001-06-28 | 2001-12-28 | $3760.00 | Window Closed / Lapsed |
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