Method of manufacturing a piezoelectric actuator

Claim 1

A method of manufacturing a piezoelectric actuator wherein an electrostrictive effect element which is formed by stacking a plurality of electrostrictive materials and internal electrodes by turns is hermetically sealed by a metal case, a metal member and hermetic terminals, which comprises the steps of: providing the metal case with a flanged mounting portion being provided on the periphery thereof and the metal member with hermetic terminals and a flanged mounting portion being provided on the periphery thereof, either of said metal case or metal member being provided with an expansion and contraction portion so that a contraction force is applied to said sealed electrostrictive effect element in a stacking direction thereof: receiving said electrostrictive effect element in said metal case and said metal member and connecting the element to the hermetic terminals; securing said element on said metal members and said metal case to said metal member in such a state that a gap having a certain size is provided between the flanged mounting portions on said metal case and said metal member; butting said flanged mounting portion on the metal member against said flanged mounting portion on the metal case in such a state that said expansion and contraction portion is expanded to the extent of the gap size and holding the butted portions; and sealing and joining said butted portions.

Claim 2

A method of manufacturing a piezoelectric actuator wherein an electrostrictive effect element which is formed by stacking a plurality of electrostrictive materials and internal electrodes by turns is hermetically sealed by a metal case, a metal member and hermetic terminals, which comprises the steps of: providing the metal case with a flanged mounting portion being provided on the periphery thereof and the metal member with hermetic terminals and a flanged mounting portion being provided on the periphery thereof, either of said metal case or metal member being provided with an expansion and contraction portion so that a contraction force is applied to said sealed electrostrictive effect element in a stacking direction thereof: receiving said electrostrictive effect element in said metal case and said metal member and connecting the element to the hermetic terminals; securing said element on said metal members and said metal case to said metal member in such a state that a gap having a certain size is provided between the flanged mounting portions on said metal case and said metal member; butting said flanged mounting portion on the metal member against said flanged mounting portion on the metal case in such a state that said expansion and contraction portion is expanded to the extent of the gap size and holding the butted portions; and sealing and joining said butted portions.

Claim 5

A method of manufacturing a piezoelectric actuator wherein an electrostrictive effect element which is formed by stacking a plurality of electrostrictive materials and internal electrodes by turns is hermetically sealed by a metal case, a metal member and hermetic terminals, which comprises the steps of: providing the metal case with a flanged mounting portion being provided on the periphery thereof and the metal member with hermetic terminals and a flanged mounting portion on the, periphery thereof being provided with an annular projection which is raised to the extent of a certain amount on the joining face in order to join to the metal case, either of said metal case or metal member being provided with an expansion and contraction portion so that a contraction force is applied to said sealed electrostrictive effect element in a stacking direction thereof; receiving said electrostrictive effect element in said metal case and said metal member and connecting the element to the hermetic terminals; butting said flanged mounting portion on said metal case against said flanged mounting portion on said metal member and holding the butted portions; and crushing said annular projection to extent of a certain amount and sealing the mounting portions.

Claim 6

A method of manufacturing a piezoelectric actuator wherein an electrostrictive effect element which is formed by stacking a plurality of electrostrictive materials and internal electrodes by turns is hermetically sealed by a metal case, a metal member and hermetic terminals, which comprises the steps of: providing the metal case with a flanged mounting portion being provided on the periphery thereof and the metal member with hermetic terminals and a flanged mounting portion on the, periphery thereof being provided with an annular projection which is raised to the extent of a certain amount on the joining face in order to join to the metal case, either of said metal case or metal member being provided with an expansion and contraction portion so that a contraction force is applied to said sealed electrostrictive effect element in a stacking direction thereof; receiving said electrostrictive effect element in said metal case and said metal member and connecting the element to the hermetic terminals; butting said flanged mounting portion on said metal case against said flanged mounting portion on said metal member and holding the butted portions; and crushing said annular projection to extent of a certain amount and sealing the mounting portions.