US5270790A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Moving reflector driving part of a Michelson inteferometer
Assignee: Advantest Corp
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Filing: 1991-04-07
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Granted: 1993-12-14
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Expires: 2011-04-07
Abstract
Abstract Reference light is incident to a Michelson interferometer, in which is obtained a reference interference electric signal which undergoes a sinusoidal variation in accordance with interference of reference light as a movable reflector (14) moves. A direction control signal indicating the direction in which to move the movable reflector (14) is applied from a control circuit (21) to a two-phase signal generator (32B), which derives, from the reference interference electric signal, two-phase signals either one of which leads the other by a phase angle of 90° in accordance with the specified direction. The two-phase signals are fed back to a servo drive circuit (19) and a movement control signal is also applied from the control circuit (21) to the servo drive circuit (19) to control the movement of the movable reflector (14). Thus, the movement of the movable reflector can be controlled with a high degree of accuracy corresponding to the accuracy of the wavelength resolution of the reference light.
Inventors
- 👤 Takashi Matsumura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 06:34
CPC Classifications
G; G01; G01J; G01J3/00; G01J3/28; G01J3/45; G01J3/453; G01J3/4535
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
329 words
A Michelson interferometer comprising: a beam splitter for splitting incident light into reflected light and transmitted light; a fixed reflector fixed relative to said beam splitter, for reflecting one of said reflected light and said transmitted light back to said beam splitter; a movable reflector provided in a manner to be movable back and forth relative to said beam splitter, for reflecting the other of said reflected light and said transmitted light back to said beam splitter; motor means for linearly moving said movable reflector; servo drive means for driving said motor means, based on a feedback signal and a movement control signal; reference light source means for generating reference light of a fixed wavelength and applying said reference light as said incident light to said beam splitter; a photodetector which receives, from said beam splitter, light of interference between said reflected light from said fixed reflector and said reflected light from said movable reflector and which converts said interference light into an electric signal; first feedback signal generating means for generating a first feedback signal derived from said output electric signal of said photodetector; second feedback signal generating means including a scaler related directly to the movement of said movable reflector, for generating a second feedback signal corresponding to the movement of said movable reflector and of the same kind as said first feedback signal; changeover means which switches said first and second feedback signals and supplies one of said first and second feedback signals as said feedback signal to said servo drive means; and control means for generating and applying said movement control signal to said servo drive means and for controlling said changeover means so that when said movable reflector is in a moving state said first feedback signal is provided from said changeover means to said servo drive means and when said movable reflector is substantially in a stationary state said second feedback signal is provided from said changeover means to said servo drive means.
Claim 2
Dependent Claim
329 words
A Michelson interferometer comprising: a beam splitter for splitting incident light into reflected light and transmitted light; a fixed reflector fixed relative to said beam splitter, for reflecting one of said reflected light and said transmitted light back to said beam splitter; a movable reflector provided in a manner to be movable back and forth relative to said beam splitter, for reflecting the other of said reflected light and said transmitted light back to said beam splitter; motor means for linearly moving said movable reflector; servo drive means for driving said motor means, based on a feedback signal and a movement control signal; reference light source means for generating reference light of a fixed wavelength and applying said reference light as said incident light to said beam splitter; a photodetector which receives, from said beam splitter, light of interference between said reflected light from said fixed reflector and said reflected light from said movable reflector and which converts said interference light into an electric signal; first feedback signal generating means for generating a first feedback signal derived from said output electric signal of said photodetector; second feedback signal generating means including a scaler related directly to the movement of said movable reflector, for generating a second feedback signal corresponding to the movement of said movable reflector and of the same kind as said first feedback signal; changeover means which switches said first and second feedback signals and supplies one of said first and second feedback signals as said feedback signal to said servo drive means; and control means for generating and applying said movement control signal to said servo drive means and for controlling said changeover means so that when said movable reflector is in a moving state said first feedback signal is provided from said changeover means to said servo drive means and when said movable reflector is substantially in a stationary state said second feedback signal is provided from said changeover means to said servo drive means.
Claim 3
Dependent Claim
136 words
The Michelson interferometer of claim 1 wherein said first feedback signal generating means is two-phase signal generating means which derives from the output of said photodetector, as said first feedback signal, two-phase signals of the same period either one of which leads the other in phase in accordance with the direction specified by a direction control signal input from said control means and representing the direction in which to move said movable reflector and said second feedback signal generating means is means which includes a scaler and generates, as said second feedback signal, two-phase signals of the same period either one of which leads the other in phase in accordance with the direction of movement of said movable reflector, the period of said two-phase signals corresponding to a fixed amount of movement of said movable reflector.
Claim 4
Dependent Claim
105 words
The Michelson interferometer of claim 1 wherein said first feedback signal generating means outputs, as said first feedback signal, a single-phase signal derived from the output electric signal of said photodetector and a direction control signal input from said control means and representing the direction in which to move said movable reflector and said second feedback signal generating means is means which includes a scaler and generates, as said second feedback signal, a single-phase signal of a period corresponding to a fixed amount of movement of said movable reflector and an output resulting from the detection of the direction of movement of said movable reflector.
Claim 5
Dependent Claim
82 words
The Michelson interferometer of claim 3, wherein said two-phase signal generating means include a first flip-flop which is cleared or preset, depending on whether said direction control signal specifies the one direction or the other, and which frequency divides said electric signal down to 1/2, and a second flip-flop which is cleared by said direction control signal, inverts said electric signal and frequency divides it down to 1/2, the outputs of said first and second flip-flops being output as said two-phase signals.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-12-13 | 1997-06-14 | 1997-12-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-12-13 | 2001-06-14 | 2001-12-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-12-13 | 2005-06-14 | 2005-12-14 | $7700.00 | Window Closed / Lapsed |