US5267017A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of particle analysis on a mirror wafer
Assignee: Applied Materials Inc
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Filing: 1992-05-20
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Granted: 1993-11-30
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Expires: 2012-05-20
Abstract
Abstract A method for reducing targeting errors encountered when trying to locate contaminant particles in a high-magnification imaging device, based on estimates of the particle positions obtained from a scanning device. The method of the invention uses three techniques separately and in combination. The first technique includes selecting at least three reference particles, to provide multiple unique pairs of reference particles for computation of an averaged set of coordinate transformation parameters, used to transform particle position coordinates from the coordinate system of the scanning device to the coordinate system of the imaging device. The averaged transformation parameters result in much smaller targeting errors between the estimated and actual positions of the particles. The targeting errors are further reduced by the use of multiple scans of the scanning device. In a third technique, accumulated reference particle targeting errors observed in prior processing of other wafers are used to reduce these targeting errors when processing a new wafer.
Inventors
- 👤 Yuri S. Uritsky
- 👤 Harry Q. Lee
- 👤 Patrick D. Kinney
- 👤 Kang-Ho Ahn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 13:02
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/305; G01R31/307
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
178 words
A method for reducing errors in locating particles on a semiconductor wafer, the method comprising the steps of: (a) scanning a semiconductor wafer in a scanning device to produce signals pertaining to the positions and sizes of contaminant particles on the wafer; (b) selecting at least three reference particles that are relatively recognizable because of their size and contrast; (c) obtaining estimated coordinates of the reference particles from the scanning device; (d) moving the semiconductor wafer to a high-magnification imaging device; (e) finding the reference particles in the imaging device and obtaining their corresponding actual coordinates in the imaging device; (f) calculating the parameters for a coordinate transformation between the coordinate systems of the scanning device and the imaging device, based on multiple unique pairs of the reference particles and their estimated coordinates and actual coordinates; and (g) transforming the coordinates of other particles on the wafer from values obtained from the scanning device to estimated values in the coordinate system of the imaging device, to facilitate location and further analysis of the particles in the imaging device.
Claim 2
Independent Claim
178 words
A method for reducing errors in locating particles on a semiconductor wafer, the method comprising the steps of: (a) scanning a semiconductor wafer in a scanning device to produce signals pertaining to the positions and sizes of contaminant particles on the wafer; (b) selecting at least three reference particles that are relatively recognizable because of their size and contrast; (c) obtaining estimated coordinates of the reference particles from the scanning device; (d) moving the semiconductor wafer to a high-magnification imaging device; (e) finding the reference particles in the imaging device and obtaining their corresponding actual coordinates in the imaging device; (f) calculating the parameters for a coordinate transformation between the coordinate systems of the scanning device and the imaging device, based on multiple unique pairs of the reference particles and their estimated coordinates and actual coordinates; and (g) transforming the coordinates of other particles on the wafer from values obtained from the scanning device to estimated values in the coordinate system of the imaging device, to facilitate location and further analysis of the particles in the imaging device.
Claim 3
Dependent Claim
63 words
A method as defined in claim 1, wherein the step (f) of calculating the parameters for a coordinate transformation includes: calculating the parameters for the coordinate transformation based on the coordinates of each of multiple unique pairs of reference particles; and averaging corresponding parameters obtained in the preceding step, to obtain an averaged set of transformation parameters for use in the transforming step.
Claim 4
Dependent Claim
46 words
A method as defined in claim 2, wherein: the reference particles are selected such that they are spaced relatively uniformly with respect to each other; and the reference particles are selected such that at least some of them span an area of interest on the wafer.
Claim 5
Dependent Claim
16 words
A method as defined in claim 3, wherein the number of selected reference particles is three.
Claim 6
Dependent Claim
42 words
A method as defined in claim 1, and further comprising the steps of: repeating scanning step (a) at least once; and combining the results of the original and repeated scanning steps to reduce the number of erroneously reported particles on the wafer.
Claim 7
Dependent Claim
34 words
A method as defined in claim 5, wherein the step of combining the results of the scanning steps includes ignoring particles that are detected as a result of only one of the scanning steps.
Claim 8
Dependent Claim
27 words
A method as defined in claim 5, wherein the step of combining the results of the scanning steps includes combining inconsistent positional data pertaining to a particle.
Claim 9
Dependent Claim
26 words
A method as defined in claim 7, wherein the step of combining inconsistent positional data includes averaging the positional data obtained in the multiple scanning steps.
Claim 10
Dependent Claim
103 words
A method as defined in claim 1, wherein the method further comprises the steps of: repeating steps (a) through (g) to process additional wafers; observing, after each step (e), a reference particle targeting error, which is the difference between the estimated position of a reference particle and its actual position as located in the imaging device; and accumulating the observed reference particle targeting errors after each step (e), to compute an accumulated reference particle targeting error; wherein each step (e) of finding the reference particles in the imaging device further includes pre-positioning the imaging device based on the accumulated reference particle targeting error.
Claim 11
Dependent Claim
25 words
A method as defined in claim 9, wherein the accumulated reference particle targeting error is the average of a number of previously observed targeting errors.
Claim 12
Dependent Claim
102 words
A method as defined in claim 5, wherein the method further comprises the steps of: repeating steps (a) through (g) to process additional wafers; observing, after each step (e), a reference particle targeting error, which is the difference between the estimated position of a reference particle and its actual position as located in the imaging device; and accumulating the observed reference particle targeting errors after each step (e), to compute an accumulated reference particle targeting error; wherein each step (e) of finding the referenceparticles in the imaging device further includes pre-positioning the imaging device based on the accumulated reference particle targeting error.
Claim 13
Dependent Claim
25 words
A method as defined in claim 11, wherein the accumulated reference particle targeting error is the average of a number of previously observed targeting errors.
Claim 14
Independent Claim
204 words
A method for reducing errors in locating particles on a semiconductor wafer, the method comprising the steps of: (a) scanning a semiconductor wafer in a scanning device to produce signals pertaining to the positions and sizes of contaminant particles on the wafer; (b) selecting at least two reference particles that are relatively recognizable because of their size and contrast; (c) obtaining estimated coordinates of the reference particles from the scanning device; (d) moving the semiconductor wafer to a high-magnification imaging device; (e) finding the reference particles in the imaging device and obtaining their corresponding actual coordinates in the imaging device; (f) calculating the parameters for a coordinate transformation between the coordinate systems of the scanning device and the imaging device, based on two reference particles and their estimated coordinates and actual coordinates; (g) transforming the coordinates of other particles on the wafer from values obtained from the scanning device to estimated values in the coordinate system of the imaging device, to facilitate location and further analysis of the particles in the imaging device; (h) repeating scanning step (a) at least once; and (i) combining the results of the original and repeated scanning steps to reduce the number of erroneously reported particles on the wafer.
Claim 15
Independent Claim
204 words
A method for reducing errors in locating particles on a semiconductor wafer, the method comprising the steps of: (a) scanning a semiconductor wafer in a scanning device to produce signals pertaining to the positions and sizes of contaminant particles on the wafer; (b) selecting at least two reference particles that are relatively recognizable because of their size and contrast; (c) obtaining estimated coordinates of the reference particles from the scanning device; (d) moving the semiconductor wafer to a high-magnification imaging device; (e) finding the reference particles in the imaging device and obtaining their corresponding actual coordinates in the imaging device; (f) calculating the parameters for a coordinate transformation between the coordinate systems of the scanning device and the imaging device, based on two reference particles and their estimated coordinates and actual coordinates; (g) transforming the coordinates of other particles on the wafer from values obtained from the scanning device to estimated values in the coordinate system of the imaging device, to facilitate location and further analysis of the particles in the imaging device; (h) repeating scanning step (a) at least once; and (i) combining the results of the original and repeated scanning steps to reduce the number of erroneously reported particles on the wafer.
Claim 16
Dependent Claim
34 words
A method as defined in claim 13, wherein the step of combining the results of the scanning steps includes ignoring particles that are detected as a result of only one of the scanning steps.
Claim 17
Dependent Claim
27 words
A method as defined in claim 13, wherein the step of combining the results of the scanning steps includes combining inconsistent positional data pertaining to a particle.
Claim 18
Dependent Claim
26 words
A method as defined in claim 15, wherein the step of combining inconsistent positional data includes averaging the positional data obtained in the multiple scanning steps.
Claim 19
Independent Claim
264 words
A method for reducing errors in locating particles on a semiconductor wafer, the method comprising the steps of: (a) scanning a semiconductor wafer in a scanning device to produce signals pertaining to the positions and sizes of contaminant particles on the wafer; (b) selecting at least two reference particles that are relatively recognizable because of their size and contrast; (c) obtaining estimated coordinates of the reference particles from the scanning device; (d) moving the semiconductor wafer to a high-magnification imaging device; (e) finding the reference particles in the imaging device and obtaining their corresponding actual coordinates in the imaging device; (f) calculating the parameters for a coordinate transformation between the coordinate systems of the scanning device and the imaging device, based on two reference particles and their estimated coordinates and actual coordinates; (g) transforming the coordinates of other particles on the wafer from values obtained from the scanning device to estimated values in the coordinate system of the imaging device, to facilitate location and further analysis of the particles in the imaging device; (h) repeating steps (a) through (g) to process additional wafers; (i) observing, after each step (e), a reference particle targeting error, which is the difference between the estimated position of a reference particle and its actual position as located in the imaging device; and (j) accumulating the observed reference particle targeting errors after each step (e), to compute an accumulated reference particle targeting error; wherein each step (e) of finding the reference particles in the imaging device further includes pre-positioning the imaging device based on the accumulated reference particle targeting error.
Claim 20
Independent Claim
264 words
A method for reducing errors in locating particles on a semiconductor wafer, the method comprising the steps of: (a) scanning a semiconductor wafer in a scanning device to produce signals pertaining to the positions and sizes of contaminant particles on the wafer; (b) selecting at least two reference particles that are relatively recognizable because of their size and contrast; (c) obtaining estimated coordinates of the reference particles from the scanning device; (d) moving the semiconductor wafer to a high-magnification imaging device; (e) finding the reference particles in the imaging device and obtaining their corresponding actual coordinates in the imaging device; (f) calculating the parameters for a coordinate transformation between the coordinate systems of the scanning device and the imaging device, based on two reference particles and their estimated coordinates and actual coordinates; (g) transforming the coordinates of other particles on the wafer from values obtained from the scanning device to estimated values in the coordinate system of the imaging device, to facilitate location and further analysis of the particles in the imaging device; (h) repeating steps (a) through (g) to process additional wafers; (i) observing, after each step (e), a reference particle targeting error, which is the difference between the estimated position of a reference particle and its actual position as located in the imaging device; and (j) accumulating the observed reference particle targeting errors after each step (e), to compute an accumulated reference particle targeting error; wherein each step (e) of finding the reference particles in the imaging device further includes pre-positioning the imaging device based on the accumulated reference particle targeting error.
Claim 21
Dependent Claim
25 words
A method as defined in claim 17, wherein the accumulated reference particle targeting error is the average of a number of previously observed targeting errors.
References Cited (Backward Citations)
US4659220A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-29 | 1997-05-31 | 1997-11-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-29 | 2001-05-31 | 2001-11-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-29 | 2005-05-31 | 2005-11-30 | $7700.00 | Window Closed / Lapsed |